ATE541185T1 - Vibrationskreiselsensor - Google Patents

Vibrationskreiselsensor

Info

Publication number
ATE541185T1
ATE541185T1 AT02758565T AT02758565T ATE541185T1 AT E541185 T1 ATE541185 T1 AT E541185T1 AT 02758565 T AT02758565 T AT 02758565T AT 02758565 T AT02758565 T AT 02758565T AT E541185 T1 ATE541185 T1 AT E541185T1
Authority
AT
Austria
Prior art keywords
resonator
drive means
motion
axis
pick
Prior art date
Application number
AT02758565T
Other languages
English (en)
Inventor
Christopher Paul Fell
Rebecka Eley
Colin Fox
Stewart Mcwilliam
Original Assignee
Atlantic Inertial Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlantic Inertial Systems Ltd filed Critical Atlantic Inertial Systems Ltd
Application granted granted Critical
Publication of ATE541185T1 publication Critical patent/ATE541185T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
AT02758565T 2001-09-14 2002-09-06 Vibrationskreiselsensor ATE541185T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0122253.8A GB0122253D0 (en) 2001-09-14 2001-09-14 Vibratory gyroscopic rate sensor
PCT/GB2002/004057 WO2003025504A1 (en) 2001-09-14 2002-09-06 Vibratory gyroscopic rate sensor

Publications (1)

Publication Number Publication Date
ATE541185T1 true ATE541185T1 (de) 2012-01-15

Family

ID=9922108

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02758565T ATE541185T1 (de) 2001-09-14 2002-09-06 Vibrationskreiselsensor

Country Status (9)

Country Link
US (1) US6848305B2 (de)
EP (1) EP1425554B1 (de)
JP (1) JP4298503B2 (de)
KR (1) KR20040031088A (de)
CN (1) CN100374821C (de)
AT (1) ATE541185T1 (de)
CA (1) CA2459787A1 (de)
GB (1) GB0122253D0 (de)
WO (1) WO2003025504A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD532324S1 (en) * 2005-03-09 2006-11-21 Thomson Licensing Vibratory element for an inertial device
USD527659S1 (en) * 2005-03-09 2006-09-05 Thomson Licensing Vibratory element for an inertial device
USD527660S1 (en) * 2005-03-09 2006-09-05 Thomson Licensing Vibratory element for an inertial device
US7617727B2 (en) * 2006-04-18 2009-11-17 Watson Industries, Inc. Vibrating inertial rate sensor utilizing split or skewed operational elements
US7526957B2 (en) * 2006-04-18 2009-05-05 Watson Industries, Inc. Vibrating inertial rate sensor utilizing skewed drive or sense elements
US8056413B2 (en) * 2007-09-11 2011-11-15 Evigia Systems, Inc. Sensor and sensing method utilizing symmetrical differential readout
US7908922B2 (en) * 2008-01-24 2011-03-22 Delphi Technologies, Inc. Silicon integrated angular rate sensor
WO2009119204A1 (ja) * 2008-03-25 2009-10-01 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ
WO2009119205A1 (ja) * 2008-03-25 2009-10-01 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ
US20090286383A1 (en) * 2008-05-15 2009-11-19 Applied Nanotech Holdings, Inc. Treatment of whiskers
US8151641B2 (en) 2009-05-21 2012-04-10 Analog Devices, Inc. Mode-matching apparatus and method for micromachined inertial sensors
CN101846517B (zh) * 2010-06-18 2011-11-30 中国人民解放军国防科学技术大学 杯形波动陀螺的杯形谐振子的机械平衡方法
US8616056B2 (en) * 2010-11-05 2013-12-31 Analog Devices, Inc. BAW gyroscope with bottom electrode
US9091544B2 (en) * 2010-11-05 2015-07-28 Analog Devices, Inc. XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching
US8631700B2 (en) 2010-11-05 2014-01-21 Analog Devices, Inc. Resonating sensor with mechanical constraints
EP2646773B1 (de) 2010-12-01 2015-06-24 Analog Devices, Inc. Vorrichtung und verfahren zur verankerung von elektroden in mems-vorrichtungen
US20140260611A1 (en) * 2013-03-15 2014-09-18 Analog Devices, Inc. XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes
US9599471B2 (en) 2013-11-14 2017-03-21 Analog Devices, Inc. Dual use of a ring structure as gyroscope and accelerometer
US9709595B2 (en) 2013-11-14 2017-07-18 Analog Devices, Inc. Method and apparatus for detecting linear and rotational movement
US10746548B2 (en) 2014-11-04 2020-08-18 Analog Devices, Inc. Ring gyroscope structural features
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
US10563984B2 (en) * 2016-01-20 2020-02-18 Moog Inc. Method and device for determining rotational rate
US10987191B2 (en) 2017-02-10 2021-04-27 Michael Rose Template device for marking a surgical site before breast surgery and surgical procedure guided by the marking
GB2565298B (en) 2017-08-07 2022-03-16 Atlantic Inertial Systems Ltd Angular rate sensors
GB2567479B (en) * 2017-10-13 2022-04-06 Atlantic Inertial Systems Ltd Angular rate sensors
GB2570732B (en) * 2018-02-06 2023-01-11 Atlantic Inertial Systems Ltd Angular rate sensors
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope
DE102023117380A1 (de) * 2023-06-30 2025-01-02 Northrop Grumman Litef Gmbh Mikroelektromechanische Kopplungsvorrichtung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69102590T2 (de) * 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
GB2276976B (en) 1993-04-07 1996-10-23 British Aerospace Method of manufacturing a motion sensor
US5817940A (en) * 1996-03-14 1998-10-06 Aisin Seiki Kabishiki Kaisha Angular rate detector
GB2318184B (en) 1996-10-08 2000-07-05 British Aerospace A rate sensor
JPH10115526A (ja) * 1996-10-15 1998-05-06 Ngk Insulators Ltd 振動ジャイロ・センサ及び振動ジャイロ・センサの製造方法
GB2322196B (en) * 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
GB9722865D0 (en) 1997-10-29 1997-12-24 British Tech Group Multi-axis gyroscope
GB2335273B (en) * 1998-03-14 2002-02-27 British Aerospace A two axis gyroscope
GB2338781B (en) 1998-03-14 2002-04-03 British Aerospace A gyroscope
US6151964A (en) * 1998-05-25 2000-11-28 Citizen Watch Co., Ltd. Angular velocity sensing device
GB9817347D0 (en) * 1998-08-11 1998-10-07 British Aerospace An angular rate sensor
US6272925B1 (en) * 1999-09-16 2001-08-14 William S. Watson High Q angular rate sensing gyroscope
GB0001294D0 (en) * 2000-01-20 2000-03-08 British Aerospace Multi-axis sensing device
GB0001775D0 (en) * 2000-01-27 2000-03-22 British Aerospace Improvements relating to angular rate sensor devices

Also Published As

Publication number Publication date
JP2005503549A (ja) 2005-02-03
US20040134279A1 (en) 2004-07-15
US6848305B2 (en) 2005-02-01
CA2459787A1 (en) 2003-03-27
GB0122253D0 (en) 2001-11-07
WO2003025504A1 (en) 2003-03-27
CN100374821C (zh) 2008-03-12
JP4298503B2 (ja) 2009-07-22
KR20040031088A (ko) 2004-04-09
EP1425554B1 (de) 2012-01-11
EP1425554A1 (de) 2004-06-09
CN1571913A (zh) 2005-01-26

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