ATE542115T1 - Drucksensoreinheit mit temperaturausgleich - Google Patents

Drucksensoreinheit mit temperaturausgleich

Info

Publication number
ATE542115T1
ATE542115T1 AT09165795T AT09165795T ATE542115T1 AT E542115 T1 ATE542115 T1 AT E542115T1 AT 09165795 T AT09165795 T AT 09165795T AT 09165795 T AT09165795 T AT 09165795T AT E542115 T1 ATE542115 T1 AT E542115T1
Authority
AT
Austria
Prior art keywords
sensor unit
pressure sensor
temperature compensation
detecting
external force
Prior art date
Application number
AT09165795T
Other languages
English (en)
Inventor
Takeshi Ohsato
Yasuhiko Jinbu
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Application granted granted Critical
Publication of ATE542115T1 publication Critical patent/ATE542115T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Force In General (AREA)
  • Measuring Fluid Pressure (AREA)
AT09165795T 2008-07-18 2009-07-17 Drucksensoreinheit mit temperaturausgleich ATE542115T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008187038A JP5604035B2 (ja) 2008-07-18 2008-07-18 力覚センサユニット

Publications (1)

Publication Number Publication Date
ATE542115T1 true ATE542115T1 (de) 2012-02-15

Family

ID=41138774

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09165795T ATE542115T1 (de) 2008-07-18 2009-07-17 Drucksensoreinheit mit temperaturausgleich

Country Status (4)

Country Link
US (1) US8196477B2 (de)
EP (1) EP2146194B1 (de)
JP (1) JP5604035B2 (de)
AT (1) ATE542115T1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5243704B2 (ja) * 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP5243988B2 (ja) * 2009-02-10 2013-07-24 本田技研工業株式会社 多軸力覚センサおよび加速度センサ
JP5627556B2 (ja) * 2011-10-31 2014-11-19 アイシン精機株式会社 車両用シートの荷重検出装置
US8757001B2 (en) * 2012-09-27 2014-06-24 Honeywell International Inc. Mechanically coupled force sensor on flexible platform assembly structure
WO2014164207A1 (en) 2013-03-12 2014-10-09 Stryker Corporation Sensor assembly and method for measuring forces and torques
JP6188231B2 (ja) * 2014-02-26 2017-08-30 アルプス電気株式会社 荷重検出装置及び前記荷重検出装置を用いた電子機器
CN106248272A (zh) * 2016-07-27 2016-12-21 同济大学 一种兼顾灵敏度的前提下提高力矩传感器量程的方法
CN106124115A (zh) * 2016-07-27 2016-11-16 同济大学 一种电磁补偿式三维力矩传感器
EP4701393A2 (de) 2017-02-09 2026-02-25 Nextinput, Inc. Integrierte digitale kraftsensoren und zugehörige verfahren zur herstellung
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
US10634695B2 (en) * 2017-04-26 2020-04-28 Minebea Mitsumi Inc. Force sensor
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
US11579028B2 (en) 2017-10-17 2023-02-14 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
WO2019099821A1 (en) * 2017-11-16 2019-05-23 Nextinput, Inc. Force attenuator for force sensor
JP6919964B2 (ja) 2018-01-29 2021-08-18 ミネベアミツミ株式会社 センサチップ及び力覚センサ装置
CN113447170B (zh) * 2020-03-26 2023-08-15 精量电子公司 力检测装置
JP7618916B2 (ja) * 2020-12-24 2025-01-22 ミネベアミツミ株式会社 起歪体、力覚センサ装置
JP2022142118A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142116A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 起歪体、力覚センサ装置
JP2022142117A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
CN115112286A (zh) * 2021-03-19 2022-09-27 美蓓亚三美株式会社 应变体、力传感器装置
JP2023109029A (ja) * 2022-01-26 2023-08-07 アルプスアルパイン株式会社 荷重センサ装置
CN119045675A (zh) * 2023-05-29 2024-11-29 三美电机株式会社 输入装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513831A (en) * 1981-05-19 1985-04-30 Setra Systems, Inc. Weighing system
JPS6034295A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JPS6461628A (en) * 1987-09-02 1989-03-08 Ricoh Kk Force detecting device
DE4111148A1 (de) * 1991-04-06 1992-10-08 Bosch Gmbh Robert Sensor
JP2001183248A (ja) * 1999-12-24 2001-07-06 Furukawa Electric Co Ltd:The 送電線荷重センサ装置およびその設置方法
JP3970640B2 (ja) 2002-03-05 2007-09-05 本田技研工業株式会社 ６軸力センサ
JP2004239621A (ja) * 2003-02-03 2004-08-26 Japan Science & Technology Agency ３次元圧力センサ
JP2005169541A (ja) * 2003-12-10 2005-06-30 Hitachi Metals Ltd 半導体装置およびその製造方法
JP4107235B2 (ja) * 2003-12-25 2008-06-25 株式会社デンソー 力学量センサ構造
DE102004045188A1 (de) * 2004-09-17 2006-03-30 Engelbert Mages Schlagkraftmesseinrichtung
JP4680566B2 (ja) * 2004-10-26 2011-05-11 本田技研工業株式会社 多軸力センサチップとこれを用いた多軸力センサ
JP4203051B2 (ja) * 2005-06-28 2008-12-24 本田技研工業株式会社 力覚センサ
JP2007113957A (ja) * 2005-10-18 2007-05-10 Hitachi Ltd 摩擦力センサおよび摩擦力センサ付きタイヤ
JP2008058110A (ja) * 2006-08-30 2008-03-13 Honda Motor Co Ltd 力覚センサ用チップおよび力覚センサ

Also Published As

Publication number Publication date
EP2146194A2 (de) 2010-01-20
US8196477B2 (en) 2012-06-12
EP2146194B1 (de) 2012-01-18
JP5604035B2 (ja) 2014-10-08
JP2010025735A (ja) 2010-02-04
US20100011885A1 (en) 2010-01-21
EP2146194A3 (de) 2010-02-17

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