ATE543199T1 - Plasmakammer mit entladung induzierender brücke - Google Patents

Plasmakammer mit entladung induzierender brücke

Info

Publication number
ATE543199T1
ATE543199T1 AT06252610T AT06252610T ATE543199T1 AT E543199 T1 ATE543199 T1 AT E543199T1 AT 06252610 T AT06252610 T AT 06252610T AT 06252610 T AT06252610 T AT 06252610T AT E543199 T1 ATE543199 T1 AT E543199T1
Authority
AT
Austria
Prior art keywords
discharge inducing
bridges
plasma
discharge
bridge
Prior art date
Application number
AT06252610T
Other languages
English (en)
Inventor
Dae-Kyu Choi
Soon-Im Wi
Original Assignee
New Power Plasma Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020050043232A external-priority patent/KR100798355B1/ko
Priority claimed from KR1020050051638A external-priority patent/KR100629231B1/ko
Priority claimed from KR1020060015143A external-priority patent/KR100731993B1/ko
Priority claimed from KR1020060042062A external-priority patent/KR100761688B1/ko
Priority claimed from KR1020060042073A external-priority patent/KR100772451B1/ko
Application filed by New Power Plasma Co Ltd filed Critical New Power Plasma Co Ltd
Application granted granted Critical
Publication of ATE543199T1 publication Critical patent/ATE543199T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
AT06252610T 2005-05-23 2006-05-19 Plasmakammer mit entladung induzierender brücke ATE543199T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR1020050043232A KR100798355B1 (ko) 2005-05-23 2005-05-23 대면적 처리용 외장형 권선 코일을 구비하는 플라즈마처리장치
KR1020050051638A KR100629231B1 (ko) 2005-06-15 2005-06-15 내부 방전 브릿지를 갖는 플라즈마 소오스
KR1020060015143A KR100731993B1 (ko) 2006-02-16 2006-02-16 내부 방전 브리지를 갖는 플라즈마 소오스
KR1020060042062A KR100761688B1 (ko) 2006-05-10 2006-05-10 다중 배열된 방전실을 갖는 플라즈마 반응기 및 이를이용한 대기압 플라즈마 처리 시스템
KR1020060042073A KR100772451B1 (ko) 2006-05-10 2006-05-10 플라즈마 처리 챔버 및 플라즈마 처리 시스템

Publications (1)

Publication Number Publication Date
ATE543199T1 true ATE543199T1 (de) 2012-02-15

Family

ID=36954639

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06252610T ATE543199T1 (de) 2005-05-23 2006-05-19 Plasmakammer mit entladung induzierender brücke

Country Status (5)

Country Link
US (1) US7952048B2 (de)
EP (1) EP1727186B1 (de)
JP (1) JP5257914B2 (de)
AT (1) ATE543199T1 (de)
TW (1) TWI390578B (de)

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US8933628B2 (en) * 2011-10-28 2015-01-13 Applied Materials, Inc. Inductively coupled plasma source with phase control
US10271416B2 (en) 2011-10-28 2019-04-23 Applied Materials, Inc. High efficiency triple-coil inductively coupled plasma source with phase control
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Also Published As

Publication number Publication date
JP5257914B2 (ja) 2013-08-07
US20060289409A1 (en) 2006-12-28
US7952048B2 (en) 2011-05-31
EP1727186A1 (de) 2006-11-29
EP1727186B1 (de) 2012-01-25
JP2006332055A (ja) 2006-12-07
TWI390578B (zh) 2013-03-21
TW200710913A (en) 2007-03-16

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