ATE54489T1 - Anordnung fuer das optische messen von oberflaechenprofilen. - Google Patents

Anordnung fuer das optische messen von oberflaechenprofilen.

Info

Publication number
ATE54489T1
ATE54489T1 AT86202021T AT86202021T ATE54489T1 AT E54489 T1 ATE54489 T1 AT E54489T1 AT 86202021 T AT86202021 T AT 86202021T AT 86202021 T AT86202021 T AT 86202021T AT E54489 T1 ATE54489 T1 AT E54489T1
Authority
AT
Austria
Prior art keywords
arrangement
optical measurement
surface profiles
measure
measured
Prior art date
Application number
AT86202021T
Other languages
English (en)
Inventor
Henricus Mathias Marie Kessels
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of ATE54489T1 publication Critical patent/ATE54489T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT86202021T 1985-11-19 1986-11-17 Anordnung fuer das optische messen von oberflaechenprofilen. ATE54489T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8503182A NL8503182A (nl) 1985-11-19 1985-11-19 Inrichting voor het langs optische weg meten van een oppervlakteprofiel.
EP86202021A EP0227136B1 (de) 1985-11-19 1986-11-17 Anordnung für das optische Messen von Oberflächenprofilen

Publications (1)

Publication Number Publication Date
ATE54489T1 true ATE54489T1 (de) 1990-07-15

Family

ID=19846892

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86202021T ATE54489T1 (de) 1985-11-19 1986-11-17 Anordnung fuer das optische messen von oberflaechenprofilen.

Country Status (7)

Country Link
US (1) US4808003A (de)
EP (1) EP0227136B1 (de)
JP (1) JPH0726821B2 (de)
KR (1) KR940003916B1 (de)
AT (1) ATE54489T1 (de)
DE (1) DE3672583D1 (de)
NL (1) NL8503182A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5113082A (en) * 1990-09-11 1992-05-12 Moshe Golberstein Electro-optical instrument with self-contained photometer
NL9100205A (nl) * 1991-02-06 1992-09-01 Philips Nv Inrichting voor het optisch meten van de hoogte van een oppervlak.
GB9107740D0 (en) * 1991-04-11 1991-05-29 Atomic Energy Authority Uk Method of monitoring displacements
WO1998024291A2 (en) * 1996-11-26 1998-06-04 Philips Electronics N.V. Method and machine for placing components on a carrier and a calibration carrier detection device for use in the method and in the machine
WO2001004604A1 (en) * 1999-07-10 2001-01-18 Semiconductor Technologies & Instruments, Inc. Post-seal inspection system and method
DE202004009727U1 (de) 2004-06-21 2004-10-07 Trioptics Gmbh Vorrichtung zur Messung von Winkeln optischer Oberflächen
JP2016201002A (ja) * 2015-04-10 2016-12-01 船井電機株式会社 位置検出装置及び空間入力装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2116872A5 (fr) * 1970-12-10 1972-07-21 Compteurs Comp D Perfectionnements aux dispositifs palpeurs optiques
US3692414A (en) 1971-02-24 1972-09-19 Harry L Hosterman Non-contacting measuring probe
US4379647A (en) * 1971-10-18 1983-04-12 Paul S. Kempf Optical comparator and inspection apparatus
AR205243A1 (es) 1972-05-11 1976-04-21 Philips Nv Aparato para la lectura de un portador de grabacion reflector plano
US3944369A (en) * 1974-05-24 1976-03-16 Bell Telephone Laboratories, Incorporated Optical comparator system to separate unacceptable defects from acceptable edge aberrations
US4017188A (en) * 1975-02-26 1977-04-12 The Bendix Corporation Surface profile measuring device and method
US4158507A (en) * 1977-07-27 1979-06-19 Recognition Equipment Incorporated Laser measuring system for inspection
DE2903529A1 (de) * 1979-01-31 1980-08-07 Schlatter Ag Verfahren zum messen von entfernungen und vorrichtung zur durchfuehrung des verfahrens
US4383168A (en) * 1980-06-02 1983-05-10 Raytheon Company Automatic focusing apparatus
US4427880A (en) * 1981-06-29 1984-01-24 Westinghouse Electric Corp. Non-contact visual proximity sensing apparatus
JPS5963503A (ja) * 1982-10-02 1984-04-11 Canon Inc マ−ク位置検出方法
DE3315576A1 (de) * 1983-04-29 1984-10-31 Hommelwerke GmbH, 7730 Villingen-Schwenningen Einrichtung zur optischen abstandsmessung, insbesondere zur messung von profilen von werkstuecken oder schneidkanten von werkzeugen
US4627734A (en) * 1983-06-30 1986-12-09 Canadian Patents And Development Limited Three dimensional imaging method and device

Also Published As

Publication number Publication date
NL8503182A (nl) 1987-06-16
EP0227136B1 (de) 1990-07-11
EP0227136A1 (de) 1987-07-01
JPH0726821B2 (ja) 1995-03-29
DE3672583D1 (de) 1990-08-16
KR940003916B1 (ko) 1994-05-09
KR870005235A (ko) 1987-06-05
JPS62121305A (ja) 1987-06-02
US4808003A (en) 1989-02-28

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