ATE545841T1 - Drehgeschwindigkeitsdetektionsgerät - Google Patents

Drehgeschwindigkeitsdetektionsgerät

Info

Publication number
ATE545841T1
ATE545841T1 AT04020140T AT04020140T ATE545841T1 AT E545841 T1 ATE545841 T1 AT E545841T1 AT 04020140 T AT04020140 T AT 04020140T AT 04020140 T AT04020140 T AT 04020140T AT E545841 T1 ATE545841 T1 AT E545841T1
Authority
AT
Austria
Prior art keywords
mass portions
vibration
detection device
rotation speed
speed detection
Prior art date
Application number
AT04020140T
Other languages
English (en)
Inventor
Yoichi Mochida
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE545841T1 publication Critical patent/ATE545841T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
AT04020140T 2003-09-29 2004-08-25 Drehgeschwindigkeitsdetektionsgerät ATE545841T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003338507A JP4433747B2 (ja) 2003-09-29 2003-09-29 角速度検出装置

Publications (1)

Publication Number Publication Date
ATE545841T1 true ATE545841T1 (de) 2012-03-15

Family

ID=34191593

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04020140T ATE545841T1 (de) 2003-09-29 2004-08-25 Drehgeschwindigkeitsdetektionsgerät

Country Status (6)

Country Link
US (1) US7093487B2 (de)
EP (1) EP1519149B1 (de)
JP (1) JP4433747B2 (de)
KR (1) KR100650363B1 (de)
CN (1) CN100429480C (de)
AT (1) ATE545841T1 (de)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4512636B2 (ja) * 2004-04-14 2010-07-28 アナログ デバイシス， インコーポレイテッド 直線的にアレイされたセンサエレメントを有する慣性センサ
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
CN101180516B (zh) 2005-05-24 2011-09-14 独立行政法人宇宙航空研究开发机构 陀螺仪
FR2888318B1 (fr) * 2005-07-05 2007-09-14 Thales Sa Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
EP1947420B1 (de) 2006-01-24 2018-03-07 Panasonic Intellectual Property Management Co., Ltd. Tragheitskraftsensor
DE102006046772A1 (de) * 2006-09-29 2008-04-03 Siemens Ag Anordnung zur Messung einer Drehrate mit einem Vibrationssensor
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
JP5105968B2 (ja) * 2007-06-22 2012-12-26 株式会社日立製作所 角速度検出装置
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
KR101348841B1 (ko) * 2007-07-13 2014-01-07 현대모비스 주식회사 역상 진동 이중 질량 소자 타입 마이크로 자이로스코프 및그 제어 방법
US8413509B2 (en) 2008-04-14 2013-04-09 Freescale Semiconductor, Inc. Spring member for use in a microelectromechanical systems sensor
WO2009150898A1 (ja) * 2008-06-10 2009-12-17 株式会社村田製作所 外力検知装置および配線破断検出方法
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
JP4609558B2 (ja) * 2008-09-02 2011-01-12 株式会社デンソー 角速度センサ
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US8616057B1 (en) * 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
WO2012037501A2 (en) 2010-09-18 2012-03-22 Cenk Acar Flexure bearing to reduce quadrature for resonating micromachined devices
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
WO2012037540A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
EP2616389B1 (de) 2010-09-18 2017-04-05 Fairchild Semiconductor Corporation Mehrchip-mems-verpackung
US9856132B2 (en) 2010-09-18 2018-01-02 Fairchild Semiconductor Corporation Sealed packaging for microelectromechanical systems
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9006846B2 (en) 2010-09-20 2015-04-14 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
US10065851B2 (en) 2010-09-20 2018-09-04 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
JP5923970B2 (ja) * 2011-12-23 2016-05-25 株式会社デンソー 振動型角速度センサ
US8650955B2 (en) 2012-01-18 2014-02-18 The United States Of America As Represented By The Secretary Of The Navy Time domain switched gyroscope
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
WO2013116522A1 (en) * 2012-02-01 2013-08-08 Cenk Acar Mems multi-axis gyroscope z-axis electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US8875576B2 (en) 2012-03-21 2014-11-04 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for providing an in-plane inertial device with integrated clock
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2648334B1 (de) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Front-end-Ladungsverstärker einer MEMS-Vorrichtung
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
US9094027B2 (en) 2012-04-12 2015-07-28 Fairchild Semiconductor Corporation Micro-electro-mechanical-system (MEMS) driver
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
US8991250B2 (en) 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
WO2015146566A1 (ja) * 2014-03-25 2015-10-01 株式会社村田製作所 振動子駆動回路
DE102015213469A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit mehrfacher Auswertung über Betrieb bei mehreren Frequenzen
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
JP6740965B2 (ja) * 2017-06-22 2020-08-19 株式会社デンソー 振動型角速度センサ
DE102017213644A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Drehratensensor, Verfahren zur Herstellung eines Drehratensensors
DE102017217975A1 (de) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Mikromechanische Federstruktur
DE102020112261A1 (de) 2020-05-06 2021-11-11 Northrop Grumman Litef Gmbh Kopplungsvorrichtung zum Koppeln von Schwingungssystemen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170275A (ja) * 1996-12-13 1998-06-26 Toyota Central Res & Dev Lab Inc 振動型角速度センサ
JP3702607B2 (ja) * 1997-02-28 2005-10-05 株式会社村田製作所 角速度検出素子
US6044707A (en) 1997-06-20 2000-04-04 Aisin Seiki Kabushiki Kaisha Angular rate sensor
JP3123503B2 (ja) * 1998-03-16 2001-01-15 株式会社村田製作所 角速度センサ
JP4075022B2 (ja) * 1998-06-24 2008-04-16 アイシン精機株式会社 角速度センサ
JP3589182B2 (ja) * 2000-07-07 2004-11-17 株式会社村田製作所 外力計測装置
JP2003202226A (ja) * 2002-01-07 2003-07-18 Murata Mfg Co Ltd 外力計測装置
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
DE03707756T1 (de) * 2002-02-06 2005-05-04 Analog Devices Inc Mikrohergestellter kreisel

Also Published As

Publication number Publication date
CN100429480C (zh) 2008-10-29
KR20050031376A (ko) 2005-04-06
KR100650363B1 (ko) 2006-11-29
US7093487B2 (en) 2006-08-22
EP1519149B1 (de) 2012-02-15
EP1519149A1 (de) 2005-03-30
JP4433747B2 (ja) 2010-03-17
CN1603745A (zh) 2005-04-06
JP2005106550A (ja) 2005-04-21
US20050066726A1 (en) 2005-03-31

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