ATE545957T1 - Programmierbarer phasenwechselspeicher und verfahren dafür - Google Patents

Programmierbarer phasenwechselspeicher und verfahren dafür

Info

Publication number
ATE545957T1
ATE545957T1 AT05850858T AT05850858T ATE545957T1 AT E545957 T1 ATE545957 T1 AT E545957T1 AT 05850858 T AT05850858 T AT 05850858T AT 05850858 T AT05850858 T AT 05850858T AT E545957 T1 ATE545957 T1 AT E545957T1
Authority
AT
Austria
Prior art keywords
contiguous layer
phase change
electrical current
change material
region
Prior art date
Application number
AT05850858T
Other languages
English (en)
Inventor
Hans Boeve
Niek Lambert
Acht Victor Van
Karen Attenborough
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE545957T1 publication Critical patent/ATE545957T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20Multistable switching devices, e.g. memristors
    • H10N70/231Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H10B63/82Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays the switching components having a common active material layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/881Switching materials
    • H10N70/882Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/821Device geometry
    • H10N70/823Device geometry adapted for essentially horizontal current flow, e.g. bridge type devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/861Thermal details
    • H10N70/8613Heating or cooling means other than resistive heating electrodes, e.g. heater in parallel

Landscapes

  • Semiconductor Memories (AREA)
AT05850858T 2004-12-13 2005-12-09 Programmierbarer phasenwechselspeicher und verfahren dafür ATE545957T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US59312904P 2004-12-13 2004-12-13
PCT/IB2005/054167 WO2006064441A2 (en) 2004-12-13 2005-12-09 Programmable phase-change memory and method therefor

Publications (1)

Publication Number Publication Date
ATE545957T1 true ATE545957T1 (de) 2012-03-15

Family

ID=36228712

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05850858T ATE545957T1 (de) 2004-12-13 2005-12-09 Programmierbarer phasenwechselspeicher und verfahren dafür

Country Status (8)

Country Link
US (2) US8208293B2 (de)
EP (1) EP1829110B1 (de)
JP (1) JP2008523605A (de)
KR (1) KR20070087098A (de)
CN (1) CN101185167A (de)
AT (1) ATE545957T1 (de)
TW (1) TW200629270A (de)
WO (1) WO2006064441A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070087098A (ko) * 2004-12-13 2007-08-27 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 비-휘발성 메모리 및 메모리 디바이스의 형성 방법
JP4625822B2 (ja) 2007-03-16 2011-02-02 株式会社東芝 半導体記憶装置及びその製造方法
US20090180313A1 (en) * 2008-01-15 2009-07-16 Wim Deweerd Chalcogenide anti-fuse
KR101007562B1 (ko) * 2008-05-20 2011-01-14 주식회사 하이닉스반도체 저항성 메모리 소자 및 그 제조 방법
CN110335941B (zh) * 2019-07-03 2023-08-18 芯盟科技有限公司 相变存储器的结构及其形成方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845533A (en) 1986-08-22 1989-07-04 Energy Conversion Devices, Inc. Thin film electrical devices with amorphous carbon electrodes and method of making same
US5166758A (en) * 1991-01-18 1992-11-24 Energy Conversion Devices, Inc. Electrically erasable phase change memory
US6172902B1 (en) 1998-08-12 2001-01-09 Ecole Polytechnique Federale De Lausanne (Epfl) Non-volatile magnetic random access memory
JP2006508522A (ja) * 2002-02-22 2006-03-09 オヴォニクス インコーポレイテッド カルコゲニドクラッド法を使用する単一レベルの金属メモリーセル
US6707087B2 (en) * 2002-06-21 2004-03-16 Hewlett-Packard Development Company, L.P. Structure of chalcogenide memory element
US6766264B2 (en) 2002-08-02 2004-07-20 Sun Microsystems, Inc. Method and apparatus for calibrating parameters to be used in a digital circuit simulation
US6850432B2 (en) * 2002-08-20 2005-02-01 Macronix International Co., Ltd. Laser programmable electrically readable phase-change memory method and device
KR100491978B1 (ko) * 2003-04-12 2005-05-27 한국전자통신연구원 저 전력 동작이 가능한 상변화 메모리 소자 및 그 제조 방법
JP4634014B2 (ja) * 2003-05-22 2011-02-16 株式会社日立製作所 半導体記憶装置
KR100504700B1 (ko) * 2003-06-04 2005-08-03 삼성전자주식회사 고집적 상변환 램
KR20070087098A (ko) * 2004-12-13 2007-08-27 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 비-휘발성 메모리 및 메모리 디바이스의 형성 방법

Also Published As

Publication number Publication date
EP1829110A2 (de) 2007-09-05
US20120230100A1 (en) 2012-09-13
US8503226B2 (en) 2013-08-06
US20100039856A1 (en) 2010-02-18
TW200629270A (en) 2006-08-16
CN101185167A (zh) 2008-05-21
EP1829110B1 (de) 2012-02-15
US8208293B2 (en) 2012-06-26
KR20070087098A (ko) 2007-08-27
JP2008523605A (ja) 2008-07-03
WO2006064441A2 (en) 2006-06-22
WO2006064441A3 (en) 2006-11-16

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