ATE546256T1 - Verfahren und vorrichtung zur behandlung von verbrauchten schleifschlämmen aus dem läppverfahren zur rückgewinnung ihrer wiederverwendbaren schleifbestandteile - Google Patents

Verfahren und vorrichtung zur behandlung von verbrauchten schleifschlämmen aus dem läppverfahren zur rückgewinnung ihrer wiederverwendbaren schleifbestandteile

Info

Publication number
ATE546256T1
ATE546256T1 AT07866781T AT07866781T ATE546256T1 AT E546256 T1 ATE546256 T1 AT E546256T1 AT 07866781 T AT07866781 T AT 07866781T AT 07866781 T AT07866781 T AT 07866781T AT E546256 T1 ATE546256 T1 AT E546256T1
Authority
AT
Austria
Prior art keywords
slurry
reusable
lapping
grinding
counter
Prior art date
Application number
AT07866781T
Other languages
English (en)
Inventor
Guido Fragiacomo
Original Assignee
Garbo S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Garbo S R L filed Critical Garbo S R L
Application granted granted Critical
Publication of ATE546256T1 publication Critical patent/ATE546256T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Disintegrating Or Milling (AREA)
  • Treatment Of Sludge (AREA)
AT07866781T 2006-12-22 2007-12-04 Verfahren und vorrichtung zur behandlung von verbrauchten schleifschlämmen aus dem läppverfahren zur rückgewinnung ihrer wiederverwendbaren schleifbestandteile ATE546256T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000692A ITRM20060692A1 (it) 2006-12-22 2006-12-22 Procedimento per il trattamento di sospensioni abrasive esauste dal processo di lappatura per il recupero della componente di abrasivo riciclabile e relativo impianto.
PCT/IT2007/000844 WO2008078349A1 (en) 2006-12-22 2007-12-04 Process and apparatus for treating exhausted abrasive slurries from the lapping process for the recovery of their reusable abrasive component

Publications (1)

Publication Number Publication Date
ATE546256T1 true ATE546256T1 (de) 2012-03-15

Family

ID=39315222

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07866781T ATE546256T1 (de) 2006-12-22 2007-12-04 Verfahren und vorrichtung zur behandlung von verbrauchten schleifschlämmen aus dem läppverfahren zur rückgewinnung ihrer wiederverwendbaren schleifbestandteile

Country Status (5)

Country Link
EP (1) EP2094441B1 (de)
AT (1) ATE546256T1 (de)
IT (1) ITRM20060692A1 (de)
TW (1) TW200841991A (de)
WO (1) WO2008078349A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253621A (ja) * 2009-04-27 2010-11-11 Ihi Compressor & Machinery Co Ltd ワイヤソーのクーラント管理方法及び装置
JP5399125B2 (ja) * 2009-04-27 2014-01-29 株式会社Ｉｈｉ回転機械 ワイヤソーのクーラント管理方法及び装置
DE102010011853A1 (de) 2010-03-09 2011-09-15 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von hochreinem Silizium
GB2484348A (en) 2010-10-08 2012-04-11 Rec Wafer Norway As Abrasive slurry and method of production of photovoltaic wafers
DE102011115081B4 (de) 2011-09-19 2017-08-31 Baufeld-Mineralölraffinerie GmbH Verfahren zur Gewinnung von Solarsilizium aus Sägeabfällen
TWI461258B (zh) * 2012-11-09 2014-11-21 Sino American Silicon Prod Inc 研磨漿料回收利用方法及運用在該研磨漿料回收利用方法的研磨漿料回收利用設備
CN114193329B (zh) * 2021-12-09 2023-03-21 中环领先半导体材料有限公司 一种磨片在线回收的浆液利用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741535B2 (ja) * 1991-04-10 1995-05-10 中小企業事業団 ラップ加工装置の砥粒液再生・循環装置
JP2001287163A (ja) * 2000-04-06 2001-10-16 Nec Corp 研磨用スラリー再生装置

Also Published As

Publication number Publication date
EP2094441B1 (de) 2012-02-22
WO2008078349A1 (en) 2008-07-03
EP2094441A1 (de) 2009-09-02
TW200841991A (en) 2008-11-01
ITRM20060692A1 (it) 2008-06-23

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