ATE546822T1 - Elektronenpumpquelle, stromversorgungsverfahren für eine elektronenpumpquelle und verfahren zur steuerung einer elektronenpumpquelle - Google Patents

Elektronenpumpquelle, stromversorgungsverfahren für eine elektronenpumpquelle und verfahren zur steuerung einer elektronenpumpquelle

Info

Publication number
ATE546822T1
ATE546822T1 AT09714160T AT09714160T ATE546822T1 AT E546822 T1 ATE546822 T1 AT E546822T1 AT 09714160 T AT09714160 T AT 09714160T AT 09714160 T AT09714160 T AT 09714160T AT E546822 T1 ATE546822 T1 AT E546822T1
Authority
AT
Austria
Prior art keywords
pump source
electron pump
power supply
electron
controlling
Prior art date
Application number
AT09714160T
Other languages
English (en)
Inventor
Maxime Makarov
Original Assignee
Excico Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40810366&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE546822(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Excico Group filed Critical Excico Group
Application granted granted Critical
Publication of ATE546822T1 publication Critical patent/ATE546822T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09707—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using an electron or ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0955—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles
    • H01S3/0959—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles by an electron beam

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Lasers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Plasma Technology (AREA)
AT09714160T 2008-01-11 2009-01-08 Elektronenpumpquelle, stromversorgungsverfahren für eine elektronenpumpquelle und verfahren zur steuerung einer elektronenpumpquelle ATE546822T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0800165A FR2926395B1 (fr) 2008-01-11 2008-01-11 Source pulsee d'electrons, procede d'alimentation electrique pour source pulsee d'electrons et procede de commande d'une source pulsee d'electrons
PCT/FR2009/000018 WO2009106759A1 (fr) 2008-01-11 2009-01-08 Source puisée d'électrons, procédé d'alimentation électrique pour source puisée d'électrons et procédé de commande d'une source puisée d'électrons

Publications (1)

Publication Number Publication Date
ATE546822T1 true ATE546822T1 (de) 2012-03-15

Family

ID=40810366

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09714160T ATE546822T1 (de) 2008-01-11 2009-01-08 Elektronenpumpquelle, stromversorgungsverfahren für eine elektronenpumpquelle und verfahren zur steuerung einer elektronenpumpquelle

Country Status (9)

Country Link
US (1) US8698402B2 (de)
EP (1) EP2227819B1 (de)
JP (1) JP5340310B2 (de)
KR (1) KR20100126679A (de)
CN (1) CN101952926B (de)
AT (1) ATE546822T1 (de)
FR (1) FR2926395B1 (de)
TW (1) TWI446395B (de)
WO (1) WO2009106759A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101564680B1 (ko) * 2015-01-20 2015-11-02 성균관대학교산학협력단 전자총 전원공급장치
CN105301278B (zh) * 2015-11-10 2018-06-26 华中科技大学 一种实现电子和离子速度影像同时测量的方法及装置
RU2759425C1 (ru) * 2020-11-27 2021-11-12 федеральное государственное бюджетное образовательное учреждение высшего образования «Томский государственный университет систем управления и радиоэлектроники» Плазменный эмиттер импульсного форвакуумного источника электронов на основе дугового разряда

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2204882B1 (de) 1972-10-30 1976-10-29 Onera (Off Nat Aerospatiale)
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device
US3970892A (en) 1975-05-19 1976-07-20 Hughes Aircraft Company Ion plasma electron gun
US4642522A (en) * 1984-06-18 1987-02-10 Hughes Aircraft Company Wire-ion-plasma electron gun employing auxiliary grid
FR2591035B1 (fr) 1985-11-29 1988-02-26 Onera (Off Nat Aerospatiale) Canon a electrons operant par emission secondaire sous bombardement ionique
US4786844A (en) * 1987-03-30 1988-11-22 Rpc Industries Wire ion plasma gun
JPH05211052A (ja) 1992-01-30 1993-08-20 Toshiba Corp パルス電子銃
JPH08236053A (ja) 1995-02-28 1996-09-13 Toshiba Corp 電子銃
JP3135864B2 (ja) 1997-05-27 2001-02-19 住友重機械工業株式会社 イオン・プラズマ型電子銃とその制御方法
EP1245036B1 (de) * 1999-12-13 2013-06-19 Semequip, Inc. Ionenquelle
JP2004281230A (ja) * 2003-03-14 2004-10-07 Ebara Corp ビーム源及びビーム処理装置
US7291360B2 (en) * 2004-03-26 2007-11-06 Applied Materials, Inc. Chemical vapor deposition plasma process using plural ion shower grids
US7244474B2 (en) * 2004-03-26 2007-07-17 Applied Materials, Inc. Chemical vapor deposition plasma process using an ion shower grid

Also Published As

Publication number Publication date
TW200939279A (en) 2009-09-16
CN101952926B (zh) 2012-11-21
US8698402B2 (en) 2014-04-15
WO2009106759A1 (fr) 2009-09-03
KR20100126679A (ko) 2010-12-02
US20110057566A1 (en) 2011-03-10
TWI446395B (zh) 2014-07-21
EP2227819B1 (de) 2012-02-22
EP2227819A1 (de) 2010-09-15
JP2011511999A (ja) 2011-04-14
FR2926395B1 (fr) 2010-05-14
FR2926395A1 (fr) 2009-07-17
JP5340310B2 (ja) 2013-11-13
CN101952926A (zh) 2011-01-19

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