ATE547385T1 - Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas - Google Patents

Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas

Info

Publication number: ATE547385T1
Authority: AT; Austria
Prior art keywords: layer; inner layer; heat shield; vitrifying; producing
Prior art date: 2008-06-05

Application number

AT09757375T

Other languages

English (en)

Inventor

Thomas Kayser

Walter Lehmann

Hilmar Laudahn

Original Assignee

Heraeus Quarzglas

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2008-06-05

Filing date

2009-05-06

Publication date

2012-03-15

2009-05-06 Application filed by Heraeus Quarzglas filed Critical Heraeus Quarzglas

2012-03-15 Application granted granted Critical

2012-03-15 Publication of ATE547385T1 publication Critical patent/ATE547385T1/de

Links

VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 5
239000008187 granular material Substances 0.000 abstract 5
229910052681 coesite Inorganic materials 0.000 abstract 2
229910052906 cristobalite Inorganic materials 0.000 abstract 2
238000002844 melting Methods 0.000 abstract 2
230000008018 melting Effects 0.000 abstract 2
239000000377 silicon dioxide Substances 0.000 abstract 2
235000012239 silicon dioxide Nutrition 0.000 abstract 2
229910052682 stishovite Inorganic materials 0.000 abstract 2
229910052905 tridymite Inorganic materials 0.000 abstract 2
238000004519 manufacturing process Methods 0.000 abstract 1
239000000463 material Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
Crystallography & Structural Chemistry (AREA)
Metallurgy (AREA)
Manufacturing & Machinery (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Glass Melting And Manufacturing (AREA)

AT09757375T 2008-06-05 2009-05-06 Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas ATE547385T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE102008026890A DE102008026890B3 (de)	2008-06-05	2008-06-05	Verfahren und Vorrichtung zur Herstellung eines Tiegels aus Quarzglas
PCT/EP2009/055451 WO2009146992A1 (en)	2008-06-05	2009-05-06	Method and apparatus for producing a crucible of quartz glass

Publications (1)

Publication Number	Publication Date
ATE547385T1 true ATE547385T1 (de)	2012-03-15

Family

ID=40586175

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT09757375T ATE547385T1 (de)	2008-06-05	2009-05-06	Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas

Country Status (10)

Country	Link
US (1)	US8789391B2 (de)
EP (1)	EP2300380B1 (de)
JP (1)	JP5456770B2 (de)
KR (1)	KR101595403B1 (de)
CN (1)	CN102046543B (de)
AT (1)	ATE547385T1 (de)
DE (1)	DE102008026890B3 (de)
ES (1)	ES2383450T3 (de)
TW (1)	TWI468351B (de)
WO (1)	WO2009146992A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005289776A (ja) *	2004-04-05	2005-10-20	Canon Inc	結晶製造方法および結晶製造装置
US8272234B2 (en) *	2008-12-19	2012-09-25	Heraeus Shin-Etsu America, Inc.	Silica crucible with pure and bubble free inner crucible layer and method of making the same
JP4951040B2 (ja) *	2009-08-05	2012-06-13	信越石英株式会社	シリカ容器及びその製造方法
US9003832B2 (en) *	2009-11-20	2015-04-14	Heraeus Shin-Etsu America, Inc.	Method of making a silica crucible in a controlled atmosphere
FR2954764B1 (fr) *	2009-12-30	2011-12-30	Saint Gobain Quartz Sas	Creuset en silice
JP5605903B2 (ja) *	2010-12-02	2014-10-15	株式会社Ｓｕｍｃｏ	シリカガラスルツボ製造装置
US9221709B2 (en) *	2011-03-31	2015-12-29	Raytheon Company	Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
CN102363319A (zh) *	2011-06-30	2012-02-29	德清县建明坩埚厂	一种用于坩埚成型机的下模
DE102011113130B3 (de) *	2011-09-14	2013-01-24	Heraeus Quarzglas Gmbh & Co. Kg	Solarstrahlungsempfänger mit einem Eintrittsfenster aus Quarzglas
JP7141844B2 (ja) *	2018-04-06	2022-09-26	信越石英株式会社	石英ガラスるつぼの製造方法
JP6799350B1 (ja) *	2019-10-31	2020-12-16	ユアサ化成株式会社	ガラスセルの製造装置及び製造方法
WO2021202102A1 (en) *	2020-03-30	2021-10-07	Corning Incorporated	Apparatus and method for reducing defects in glass melt systems
CN115557678A (zh) *	2022-10-31	2023-01-03	浙江美晶新材料有限公司	一种石英坩埚的生产工艺
CN115572050A (zh) *	2022-10-31	2023-01-06	浙江美晶新材料有限公司	一种用于生产石英坩埚的模具

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6168327A (ja) *	1984-09-11	1986-04-08	Toshiba Corp	六フツ化ウランガスの回収装置
JP2830987B2 (ja)	1994-07-19	1998-12-02	信越石英株式会社	石英ガラスルツボ及びその製造方法
DE19541372A1 (de) *	1994-11-15	1996-05-23	Gen Electric	Tiegel aus geschmolzenem Quarz sowie Verfahren zu dessen Herstellung
JP4398527B2 (ja) *	1998-05-25	2010-01-13	信越石英株式会社	シリコン単結晶引き上げ用石英ガラスるつぼ
JP4548682B2 (ja) *	1999-04-06	2010-09-22	株式会社ワコム製作所	石英ガラスるつぼの製造方法
KR100383796B1 (ko) *	1999-04-06	2003-05-14	가부시키가이샤 난와쿼츠	석영유리도가니의 제조방법
JP3765368B2 (ja) *	1999-06-01	2006-04-12	東芝セラミックス株式会社	石英ガラスルツボおよびその製造方法
US6502422B1 (en) *	2000-10-27	2003-01-07	General Electric Company	Method for quartz crucible fabrication
JP4279015B2 (ja) *	2002-03-19	2009-06-17	コバレントマテリアル株式会社	石英ガラスルツボ及び石英ガラスルツボの製造方法
DE10324440A1 (de) *	2003-05-28	2004-12-16	Wacker-Chemie Gmbh	Verfahren zur Herstellung eines innenseitig verglasten SiO2-Tiegels
JP5080764B2 (ja) *	2005-08-08	2012-11-21	信越石英株式会社	石英ガラス坩堝の製造方法

2008
- 2008-06-05 DE DE102008026890A patent/DE102008026890B3/de not_active Expired - Fee Related
2009
- 2009-01-09 US US12/319,592 patent/US8789391B2/en not_active Expired - Fee Related
- 2009-05-06 ES ES09757375T patent/ES2383450T3/es active Active
- 2009-05-06 CN CN200980121185.9A patent/CN102046543B/zh active Active
- 2009-05-06 AT AT09757375T patent/ATE547385T1/de active
- 2009-05-06 JP JP2011512054A patent/JP5456770B2/ja active Active
- 2009-05-06 EP EP09757375A patent/EP2300380B1/de not_active Not-in-force
- 2009-05-06 KR KR1020107027334A patent/KR101595403B1/ko active Active
- 2009-05-06 WO PCT/EP2009/055451 patent/WO2009146992A1/en not_active Ceased
- 2009-05-08 TW TW98115224A patent/TWI468351B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
EP2300380B1 (de)	2012-02-29
ES2383450T3 (es)	2012-06-21
CN102046543B (zh)	2013-10-16
EP2300380A1 (de)	2011-03-30
US20090277223A1 (en)	2009-11-12
JP5456770B2 (ja)	2014-04-02
DE102008026890B3 (de)	2009-06-04
US8789391B2 (en)	2014-07-29
JP2011521882A (ja)	2011-07-28
KR20110031909A (ko)	2011-03-29
WO2009146992A1 (en)	2009-12-10
TWI468351B (zh)	2015-01-11
CN102046543A (zh)	2011-05-04
TW200951084A (en)	2009-12-16
KR101595403B1 (ko)	2016-02-18

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