ATE547385T1 - Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas - Google Patents

Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas

Info

Publication number
ATE547385T1
ATE547385T1 AT09757375T AT09757375T ATE547385T1 AT E547385 T1 ATE547385 T1 AT E547385T1 AT 09757375 T AT09757375 T AT 09757375T AT 09757375 T AT09757375 T AT 09757375T AT E547385 T1 ATE547385 T1 AT E547385T1
Authority
AT
Austria
Prior art keywords
layer
inner layer
heat shield
vitrifying
producing
Prior art date
Application number
AT09757375T
Other languages
English (en)
Inventor
Thomas Kayser
Walter Lehmann
Hilmar Laudahn
Original Assignee
Heraeus Quarzglas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas filed Critical Heraeus Quarzglas
Application granted granted Critical
Publication of ATE547385T1 publication Critical patent/ATE547385T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
AT09757375T 2008-06-05 2009-05-06 Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas ATE547385T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008026890A DE102008026890B3 (de) 2008-06-05 2008-06-05 Verfahren und Vorrichtung zur Herstellung eines Tiegels aus Quarzglas
PCT/EP2009/055451 WO2009146992A1 (en) 2008-06-05 2009-05-06 Method and apparatus for producing a crucible of quartz glass

Publications (1)

Publication Number Publication Date
ATE547385T1 true ATE547385T1 (de) 2012-03-15

Family

ID=40586175

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09757375T ATE547385T1 (de) 2008-06-05 2009-05-06 Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas

Country Status (10)

Country Link
US (1) US8789391B2 (de)
EP (1) EP2300380B1 (de)
JP (1) JP5456770B2 (de)
KR (1) KR101595403B1 (de)
CN (1) CN102046543B (de)
AT (1) ATE547385T1 (de)
DE (1) DE102008026890B3 (de)
ES (1) ES2383450T3 (de)
TW (1) TWI468351B (de)
WO (1) WO2009146992A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005289776A (ja) * 2004-04-05 2005-10-20 Canon Inc 結晶製造方法および結晶製造装置
US8272234B2 (en) * 2008-12-19 2012-09-25 Heraeus Shin-Etsu America, Inc. Silica crucible with pure and bubble free inner crucible layer and method of making the same
JP4951040B2 (ja) * 2009-08-05 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法
US9003832B2 (en) * 2009-11-20 2015-04-14 Heraeus Shin-Etsu America, Inc. Method of making a silica crucible in a controlled atmosphere
FR2954764B1 (fr) * 2009-12-30 2011-12-30 Saint Gobain Quartz Sas Creuset en silice
JP5605903B2 (ja) * 2010-12-02 2014-10-15 株式会社Ｓｕｍｃｏ シリカガラスルツボ製造装置
US9221709B2 (en) * 2011-03-31 2015-12-29 Raytheon Company Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
CN102363319A (zh) * 2011-06-30 2012-02-29 德清县建明坩埚厂 一种用于坩埚成型机的下模
DE102011113130B3 (de) * 2011-09-14 2013-01-24 Heraeus Quarzglas Gmbh & Co. Kg Solarstrahlungsempfänger mit einem Eintrittsfenster aus Quarzglas
JP7141844B2 (ja) * 2018-04-06 2022-09-26 信越石英株式会社 石英ガラスるつぼの製造方法
WO2021084682A1 (ja) * 2019-10-31 2021-05-06 ユアサ化成株式会社 ガラスセルの製造装置及び製造方法
KR102918650B1 (ko) * 2020-03-30 2026-01-27 코닝 인코포레이티드 유리 용융 시스템에서 결함을 감소시키기 위한 장치 및 방법
CN115572050A (zh) * 2022-10-31 2023-01-06 浙江美晶新材料有限公司 一种用于生产石英坩埚的模具
CN115557678A (zh) * 2022-10-31 2023-01-03 浙江美晶新材料有限公司 一种石英坩埚的生产工艺

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168327A (ja) * 1984-09-11 1986-04-08 Toshiba Corp 六フツ化ウランガスの回収装置
JP2830987B2 (ja) * 1994-07-19 1998-12-02 信越石英株式会社 石英ガラスルツボ及びその製造方法
DE19541372A1 (de) * 1994-11-15 1996-05-23 Gen Electric Tiegel aus geschmolzenem Quarz sowie Verfahren zu dessen Herstellung
JP4398527B2 (ja) * 1998-05-25 2010-01-13 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼ
US6553787B1 (en) * 1999-04-06 2003-04-29 Nanwa Quartz, Inc. Method for manufacturing quartz glass crucible
JP4548682B2 (ja) * 1999-04-06 2010-09-22 株式会社ワコム製作所 石英ガラスるつぼの製造方法
JP3765368B2 (ja) 1999-06-01 2006-04-12 東芝セラミックス株式会社 石英ガラスルツボおよびその製造方法
US6502422B1 (en) * 2000-10-27 2003-01-07 General Electric Company Method for quartz crucible fabrication
JP4279015B2 (ja) 2002-03-19 2009-06-17 コバレントマテリアル株式会社 石英ガラスルツボ及び石英ガラスルツボの製造方法
DE10324440A1 (de) * 2003-05-28 2004-12-16 Wacker-Chemie Gmbh Verfahren zur Herstellung eines innenseitig verglasten SiO2-Tiegels
JP5080764B2 (ja) 2005-08-08 2012-11-21 信越石英株式会社 石英ガラス坩堝の製造方法

Also Published As

Publication number Publication date
JP2011521882A (ja) 2011-07-28
TW200951084A (en) 2009-12-16
EP2300380A1 (de) 2011-03-30
KR20110031909A (ko) 2011-03-29
US8789391B2 (en) 2014-07-29
DE102008026890B3 (de) 2009-06-04
TWI468351B (zh) 2015-01-11
CN102046543A (zh) 2011-05-04
EP2300380B1 (de) 2012-02-29
JP5456770B2 (ja) 2014-04-02
US20090277223A1 (en) 2009-11-12
CN102046543B (zh) 2013-10-16
KR101595403B1 (ko) 2016-02-18
ES2383450T3 (es) 2012-06-21
WO2009146992A1 (en) 2009-12-10

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