ATE547589T1 - Verfahren zum betreiben einer vakuumpumpe - Google Patents

Verfahren zum betreiben einer vakuumpumpe

Info

Publication number
ATE547589T1
ATE547589T1 AT06023140T AT06023140T ATE547589T1 AT E547589 T1 ATE547589 T1 AT E547589T1 AT 06023140 T AT06023140 T AT 06023140T AT 06023140 T AT06023140 T AT 06023140T AT E547589 T1 ATE547589 T1 AT E547589T1
Authority
AT
Austria
Prior art keywords
vacuum pump
operating
stator
temperature
rotors
Prior art date
Application number
AT06023140T
Other languages
English (en)
Inventor
Juergen Wagner
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE547589T1 publication Critical patent/ATE547589T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/005—Removing contaminants, deposits or scale from the pump; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F04C27/006—Elements specially adapted for sealing of the lateral faces of intermeshing-engagement type pumps, e.g. gear pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/602—Gap; Clearance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/10—Hardness

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
AT06023140T 2005-12-02 2006-11-07 Verfahren zum betreiben einer vakuumpumpe ATE547589T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005057618A DE102005057618A1 (de) 2005-12-02 2005-12-02 Verfahren zum Betrieb einer Vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE547589T1 true ATE547589T1 (de) 2012-03-15

Family

ID=37808257

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06023140T ATE547589T1 (de) 2005-12-02 2006-11-07 Verfahren zum betreiben einer vakuumpumpe

Country Status (3)

Country Link
EP (1) EP1793080B1 (de)
AT (1) ATE547589T1 (de)
DE (1) DE102005057618A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008060539A1 (de) * 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Zweiwellige Vakuumpumpe
CN103062057B (zh) * 2013-01-06 2015-11-25 南通大学 一种螺杆式真空泵
GB2528658A (en) * 2014-07-24 2016-02-03 Lontra Ltd Rotary piston and cylinder devices
GB201614976D0 (en) 2016-09-02 2016-10-19 Lontra Ltd Rotary piston and cylinder device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2491677A (en) * 1943-09-27 1949-12-20 Borg Warner Grit blasting of rotor housings
DE1145296B (de) * 1959-04-28 1963-03-14 Schweizerische Lokomotiv Verfahren zur Erhoehung des volumetrischen Wirkungsgrades einer Drehkolbenfoerdermaschine mit zahnradartig ineinander greifenden Rotoren
DE1129654B (de) * 1960-03-26 1962-05-17 Leybolds Nachfolger E Rotierende Vakuumpumpe nach dem Drehschieberprinzip
US4466785A (en) * 1982-11-18 1984-08-21 Ingersoll-Rand Company Clearance-controlling means comprising abradable layer and abrasive layer
JPS62121887A (ja) * 1985-11-22 1987-06-03 Shin Meiwa Ind Co Ltd オイルフリ−式真空ポンプ
DE3911314A1 (de) * 1989-04-07 1990-10-11 Leybold Ag Vakuumpumpe
DE3916858A1 (de) * 1989-05-24 1990-11-29 Kuehnle Kopp Kausch Ag Innenachsige drehkolbenmaschine
JP3254457B2 (ja) * 1992-09-18 2002-02-04 株式会社日立製作所 無給油式スクリュー圧縮機のロータ形成方法およびそのロータを用いた無給油式スクリュー圧縮機
US5554020A (en) * 1994-10-07 1996-09-10 Ford Motor Company Solid lubricant coating for fluid pump or compressor
US6688867B2 (en) * 2001-10-04 2004-02-10 Eaton Corporation Rotary blower with an abradable coating
GB0326235D0 (en) * 2003-11-10 2003-12-17 Boc Group Inc Vacuum pump

Also Published As

Publication number Publication date
EP1793080A1 (de) 2007-06-06
DE102005057618A1 (de) 2007-06-06
EP1793080B1 (de) 2012-02-29

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