ATE547688T1 - Vorrichtung zur messung der oberflächentextur und vorrichtung zum messen der rundheit - Google Patents

Vorrichtung zur messung der oberflächentextur und vorrichtung zum messen der rundheit

Info

Publication number
ATE547688T1
ATE547688T1 AT10166622T AT10166622T ATE547688T1 AT E547688 T1 ATE547688 T1 AT E547688T1 AT 10166622 T AT10166622 T AT 10166622T AT 10166622 T AT10166622 T AT 10166622T AT E547688 T1 ATE547688 T1 AT E547688T1
Authority
AT
Austria
Prior art keywords
elastic force
force adjustment
holding member
contact part
adjustment member
Prior art date
Application number
AT10166622T
Other languages
English (en)
Inventor
Tatsuki Nakayama
Hideki Shindo
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Application granted granted Critical
Publication of ATE547688T1 publication Critical patent/ATE547688T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
AT10166622T 2009-07-08 2010-06-21 Vorrichtung zur messung der oberflächentextur und vorrichtung zum messen der rundheit ATE547688T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009161442A JP5336279B2 (ja) 2009-07-08 2009-07-08 表面性状測定装置および真円度測定装置

Publications (1)

Publication Number Publication Date
ATE547688T1 true ATE547688T1 (de) 2012-03-15

Family

ID=42782201

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10166622T ATE547688T1 (de) 2009-07-08 2010-06-21 Vorrichtung zur messung der oberflächentextur und vorrichtung zum messen der rundheit

Country Status (4)

Country Link
US (1) US7950164B2 (de)
EP (1) EP2278258B1 (de)
JP (1) JP5336279B2 (de)
AT (1) ATE547688T1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7587834B2 (en) * 2008-02-07 2009-09-15 Eaton Homer L Motorized coordinate measuring device
DE102009020294A1 (de) * 2009-05-07 2010-11-18 Mahr Gmbh Verfahren und Vorrichtung zur Messung eines Oberflächenprofils
JP5301412B2 (ja) * 2009-10-21 2013-09-25 株式会社ミツトヨ 測定力制御装置
US8701301B2 (en) * 2011-04-19 2014-04-22 Mitutoyo Corporation Surface texture measuring instrument
JP6113963B2 (ja) * 2012-04-26 2017-04-12 株式会社ミツトヨ 形状測定方法、及び形状測定装置
KR101205311B1 (ko) 2012-05-14 2012-11-27 동우에이치에스티 주식회사 에널러스기어 진원도 교정장치
US9157721B1 (en) * 2012-06-08 2015-10-13 Beeline Company Measuring system
JP6052956B2 (ja) * 2012-07-02 2016-12-27 株式会社ミツトヨ 形状解析方法および形状解析プログラム
US9347761B2 (en) * 2013-06-06 2016-05-24 Cedarflat Precision Inc. Two-way roundness device
JP6518421B2 (ja) * 2014-09-24 2019-05-22 株式会社ミツトヨ 真円度測定機およびその制御方法
US9581424B2 (en) * 2014-12-09 2017-02-28 Tokyo Seimitsu Co., Ltd. Roundness measuring apparatus
JP5943099B1 (ja) * 2015-01-28 2016-06-29 株式会社東京精密 真円度測定装置
JP6361757B1 (ja) * 2017-02-24 2018-07-25 株式会社東京精密 表面測定機用検出器
JP6777589B2 (ja) * 2017-05-24 2020-10-28 株式会社ミツトヨ 表面性状測定装置
JP6964452B2 (ja) * 2017-07-13 2021-11-10 株式会社ミツトヨ 測定機管理システム及びプログラム
CN108362194B (zh) * 2017-12-29 2020-05-05 铜陵日科电子有限责任公司 一种变压器自动检测装置
US11555693B2 (en) 2020-05-12 2023-01-17 The Boeing Company Measurement of surface profiles using unmanned aerial vehicles
CN111595230B (zh) * 2020-06-19 2021-11-05 嘉兴巨腾信息科技有限公司 一种金属圆环生产加工抽样检测装置
CN113074614B (zh) * 2021-03-08 2023-10-03 安徽省恒泰动力科技有限公司 基于自动送料机构的活塞圆度测试装置
US12504266B2 (en) * 2023-06-27 2025-12-23 Raytheon Company Flatness testing for cathodes

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3310345A1 (de) * 1983-03-22 1984-09-27 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München Verfahren und vorrichtung zum messen von werkstuecken in drei dimensionen
JPS6247506A (ja) * 1985-08-28 1987-03-02 Hitachi Ltd 曲面形状測定装置
JP3214952B2 (ja) 1993-04-14 2001-10-02 株式会社小坂研究所 真円度測定器の測定子支持装置
DE59711571D1 (de) * 1996-12-21 2004-06-03 Zeiss Carl Verfahren zur Steuerung von Koordinatenmessgeräten und Koordinatenmessgerät
EP1617171B1 (de) * 2004-07-12 2007-12-12 Tesa S.A. Taster zur Messung in drei Dimensionen
JP4462150B2 (ja) * 2005-09-07 2010-05-12 株式会社東京精密 検出器支持装置
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
JP2008298713A (ja) * 2007-06-04 2008-12-11 Murata Mach Ltd 寸法測定ヘッド

Also Published As

Publication number Publication date
US7950164B2 (en) 2011-05-31
EP2278258B1 (de) 2012-02-29
JP5336279B2 (ja) 2013-11-06
EP2278258A1 (de) 2011-01-26
US20110005095A1 (en) 2011-01-13
JP2011017573A (ja) 2011-01-27

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