ATE549750T1 - Piezoelektrischer aktuator - Google Patents

Piezoelektrischer aktuator

Info

Publication number
ATE549750T1
ATE549750T1 AT07738408T AT07738408T ATE549750T1 AT E549750 T1 ATE549750 T1 AT E549750T1 AT 07738408 T AT07738408 T AT 07738408T AT 07738408 T AT07738408 T AT 07738408T AT E549750 T1 ATE549750 T1 AT E549750T1
Authority
AT
Austria
Prior art keywords
thick
film
conductor
film conductor
piezoelectric actuator
Prior art date
Application number
AT07738408T
Other languages
English (en)
Inventor
Shodo Takei
Hidekiyo Takaoka
Shigeharu Kasai
Koichi Hayashi
Shizuharu Watanabe
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE549750T1 publication Critical patent/ATE549750T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
AT07738408T 2006-03-31 2007-03-13 Piezoelektrischer aktuator ATE549750T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006097575 2006-03-31
PCT/JP2007/054936 WO2007114002A1 (ja) 2006-03-31 2007-03-13 圧電アクチュエータ

Publications (1)

Publication Number Publication Date
ATE549750T1 true ATE549750T1 (de) 2012-03-15

Family

ID=38563274

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07738408T ATE549750T1 (de) 2006-03-31 2007-03-13 Piezoelektrischer aktuator

Country Status (6)

Country Link
US (1) US7777398B2 (de)
EP (1) EP2003707B1 (de)
JP (1) JP4154538B2 (de)
CN (1) CN101405882B (de)
AT (1) ATE549750T1 (de)
WO (1) WO2007114002A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4929875B2 (ja) * 2006-06-30 2012-05-09 株式会社デンソー 積層型圧電素子
CN101911325B (zh) * 2007-12-26 2013-05-15 京瓷株式会社 层叠型压电元件、利用该元件的喷射装置及燃料喷射系统
EP2259352B1 (de) * 2008-04-11 2012-08-29 Murata Manufacturing Co. Ltd. Beschichteter piezoelektrischer aktuator
JPWO2009130863A1 (ja) * 2008-04-21 2011-08-11 株式会社村田製作所 積層型圧電アクチュエータ
DE102008062021A1 (de) * 2008-08-18 2010-03-04 Epcos Ag Piezoaktor in Vielschichtbauweise
JP5385400B2 (ja) * 2009-10-23 2014-01-08 株式会社村田製作所 電気機械変換素子及びアクチュエータ
DE102010063385A1 (de) * 2010-12-17 2012-06-21 Robert Bosch Gmbh Piezoaktor
US8450910B2 (en) * 2011-01-14 2013-05-28 General Electric Company Ultrasound transducer element and method for providing an ultrasound transducer element
US9478725B2 (en) 2011-02-24 2016-10-25 Kyocera Corporation Multi-layer piezoelectric element, and injection device and fuel injection system provided with the same
DE102012105517B4 (de) * 2012-06-25 2020-06-18 Tdk Electronics Ag Vielschichtbauelement mit einer Außenkontaktierung und Verfahren zur Herstellung eines Vielschichtbauelements mit einer Außenkontaktierung
DE102012109250B4 (de) * 2012-09-28 2020-07-16 Tdk Electronics Ag Elektrisches Bauelement und Verfahren zur Herstellung einer Kontaktierung eines Elektrischen Bauelements
CN105374929B (zh) * 2015-11-20 2018-10-30 中国科学院上海硅酸盐研究所 一种织构化无铅压电陶瓷多层驱动器及其制备方法
WO2020059200A1 (ja) * 2018-09-21 2020-03-26 株式会社村田製作所 圧電デバイス

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
DE19646676C1 (de) * 1996-11-12 1998-04-23 Siemens Ag Piezoaktor mit neuartiger Kontaktierung und Herstellverfahren
DE19928190A1 (de) 1999-06-19 2001-01-11 Bosch Gmbh Robert Piezoaktor
US6396193B1 (en) * 1999-10-01 2002-05-28 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having mutually opposing thin plate portions
JP4158338B2 (ja) * 2000-06-06 2008-10-01 株式会社デンソー インジェクタ用圧電体素子
DE10152490A1 (de) * 2000-11-06 2002-05-08 Ceramtec Ag Außenelektroden an piezokeramischen Vielschichtaktoren
JP3964184B2 (ja) * 2000-12-28 2007-08-22 株式会社デンソー 積層型圧電アクチュエータ
US6548943B2 (en) * 2001-04-12 2003-04-15 Nokia Mobile Phones Ltd. Method of producing thin-film bulk acoustic wave devices
JP3815285B2 (ja) * 2001-10-09 2006-08-30 ブラザー工業株式会社 インクジェットヘッド
JP4422973B2 (ja) * 2002-08-27 2010-03-03 京セラ株式会社 積層圧電体、アクチュエータ及び印刷ヘッド
JP4208234B2 (ja) 2003-03-24 2009-01-14 株式会社ノリタケカンパニーリミテド 圧電セラミック材用導体ペースト及びその利用
JP2005183478A (ja) * 2003-12-16 2005-07-07 Ibiden Co Ltd 積層型圧電素子
WO2005064700A1 (ja) 2003-12-26 2005-07-14 Murata Manufacturing Co., Ltd 厚膜電極、及び積層セラミック電子部品
JP4355665B2 (ja) 2004-04-09 2009-11-04 Ｔｄｋ株式会社 圧電磁器および圧電素子
JP2006041279A (ja) * 2004-07-28 2006-02-09 Denso Corp 積層型圧電体素子及びその製造方法
US7249817B2 (en) * 2005-03-17 2007-07-31 Hewlett-Packard Development Company, L.P. Printer having image dividing modes
JP2006303044A (ja) * 2005-04-18 2006-11-02 Denso Corp 積層型圧電体素子
US7998362B2 (en) * 2005-08-23 2011-08-16 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element
JP2007173320A (ja) * 2005-12-19 2007-07-05 Denso Corp 積層型圧電素子及びその製造方法

Also Published As

Publication number Publication date
EP2003707A1 (de) 2008-12-17
WO2007114002A1 (ja) 2007-10-11
US7777398B2 (en) 2010-08-17
EP2003707A4 (de) 2010-10-13
JPWO2007114002A1 (ja) 2009-08-13
US20080007144A1 (en) 2008-01-10
EP2003707B1 (de) 2012-03-14
JP4154538B2 (ja) 2008-09-24
CN101405882A (zh) 2009-04-08
CN101405882B (zh) 2011-06-15

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