ATE550692T1 - Ionische fotosäure erzeugende verbindungen mit segmentierten fluorkohlenstoff-kohlenwasserstoff sulfonatanionen - Google Patents

Ionische fotosäure erzeugende verbindungen mit segmentierten fluorkohlenstoff-kohlenwasserstoff sulfonatanionen

Info

Publication number
ATE550692T1
ATE550692T1 AT03777730T AT03777730T ATE550692T1 AT E550692 T1 ATE550692 T1 AT E550692T1 AT 03777730 T AT03777730 T AT 03777730T AT 03777730 T AT03777730 T AT 03777730T AT E550692 T1 ATE550692 T1 AT E550692T1
Authority
AT
Austria
Prior art keywords
segmented
fluorocarbon
generating compounds
sulfonate anions
photoacid generating
Prior art date
Application number
AT03777730T
Other languages
English (en)
Inventor
William Lamanna
Gregory Clark
Richard Flynn
Zai-Ming Qiu
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE550692T1 publication Critical patent/ATE550692T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/115—Cationic or anionic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
  • Catalysts (AREA)
  • Polymerisation Methods In General (AREA)
  • Epoxy Resins (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
AT03777730T 2002-11-01 2003-10-10 Ionische fotosäure erzeugende verbindungen mit segmentierten fluorkohlenstoff-kohlenwasserstoff sulfonatanionen ATE550692T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/286,330 US6841333B2 (en) 2002-11-01 2002-11-01 Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions
PCT/US2003/033309 WO2004042473A2 (en) 2002-11-01 2003-10-10 Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions

Publications (1)

Publication Number Publication Date
ATE550692T1 true ATE550692T1 (de) 2012-04-15

Family

ID=32175425

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03777730T ATE550692T1 (de) 2002-11-01 2003-10-10 Ionische fotosäure erzeugende verbindungen mit segmentierten fluorkohlenstoff-kohlenwasserstoff sulfonatanionen

Country Status (7)

Country Link
US (2) US6841333B2 (de)
EP (1) EP1556740B1 (de)
JP (1) JP2006504785A (de)
KR (1) KR101010405B1 (de)
AT (1) ATE550692T1 (de)
AU (1) AU2003286528A1 (de)
WO (1) WO2004042473A2 (de)

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Also Published As

Publication number Publication date
US20050158655A1 (en) 2005-07-21
WO2004042473A2 (en) 2004-05-21
US6841333B2 (en) 2005-01-11
AU2003286528A8 (en) 2004-06-07
US20040087690A1 (en) 2004-05-06
KR20050071645A (ko) 2005-07-07
EP1556740B1 (de) 2012-03-21
AU2003286528A1 (en) 2004-06-07
WO2004042473A3 (en) 2004-07-01
US7078444B2 (en) 2006-07-18
EP1556740A2 (de) 2005-07-27
KR101010405B1 (ko) 2011-01-21
JP2006504785A (ja) 2006-02-09

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