ATE553494T1 - Sekundärelektronendetektor insbesondere in einem rasterelektronenmikroskop - Google Patents

Sekundärelektronendetektor insbesondere in einem rasterelektronenmikroskop

Info

Publication number
ATE553494T1
ATE553494T1 AT03813483T AT03813483T ATE553494T1 AT E553494 T1 ATE553494 T1 AT E553494T1 AT 03813483 T AT03813483 T AT 03813483T AT 03813483 T AT03813483 T AT 03813483T AT E553494 T1 ATE553494 T1 AT E553494T1
Authority
AT
Austria
Prior art keywords
detector
detector chamber
electron microscope
sensor
scanning electron
Prior art date
Application number
AT03813483T
Other languages
English (en)
Inventor
Marcus Jacka
Martin Zadrazil
Filip Lopour
Original Assignee
Tescan S R O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tescan S R O filed Critical Tescan S R O
Application granted granted Critical
Publication of ATE553494T1 publication Critical patent/ATE553494T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
AT03813483T 2002-06-17 2003-06-13 Sekundärelektronendetektor insbesondere in einem rasterelektronenmikroskop ATE553494T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ20022105A CZ20022105A3 (cs) 2002-06-17 2002-06-17 Detektor sekundárních elektronů, zejména v rastrovacím elektronovém mikroskopu
PCT/CZ2003/000033 WO2004059691A1 (en) 2002-06-17 2003-06-13 Secondary electron detector, especially in a scanning electron microscope

Publications (1)

Publication Number Publication Date
ATE553494T1 true ATE553494T1 (de) 2012-04-15

Family

ID=30774654

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03813483T ATE553494T1 (de) 2002-06-17 2003-06-13 Sekundärelektronendetektor insbesondere in einem rasterelektronenmikroskop

Country Status (8)

Country Link
US (1) US7193222B2 (de)
EP (1) EP1537595B1 (de)
CN (1) CN1329943C (de)
AT (1) ATE553494T1 (de)
AU (1) AU2003303138A1 (de)
CZ (1) CZ20022105A3 (de)
RU (1) RU2005100770A (de)
WO (1) WO2004059691A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7504182B2 (en) * 2002-09-18 2009-03-17 Fei Company Photolithography mask repair
US6979822B1 (en) 2002-09-18 2005-12-27 Fei Company Charged particle beam system
PL207238B1 (pl) * 2003-10-14 2010-11-30 Politechnika Wroclawska Układ detekcyjny elektronów wtórnych i wstecznie rozproszonych do skaningowego mikroskopu elektronowego
US7791020B2 (en) 2008-03-31 2010-09-07 Fei Company Multistage gas cascade amplifier
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
JP5352262B2 (ja) 2009-02-06 2013-11-27 株式会社日立ハイテクノロジーズ 荷電粒子線装置
CN102680741B (zh) * 2012-05-21 2014-03-19 中国科学院电工研究所 一种计量型扫描电子显微镜成像控制系统及扫描成像方法
US9070533B2 (en) 2012-07-30 2015-06-30 Fei Company Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure
JP5662393B2 (ja) * 2012-08-30 2015-01-28 株式会社アドバンテスト 電子ビーム検出器、電子ビーム処理装置及び電子ビーム検出器の製造方法
CN103594310B (zh) * 2013-11-22 2015-09-16 北京中科科仪股份有限公司 高温二次电子探测器收集组件及高温扫描电镜
JP6362253B2 (ja) * 2014-04-30 2018-07-25 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
CN105987924A (zh) * 2015-02-11 2016-10-05 中国科学院空间科学与应用研究中心 卫星金属表面的二次电子发射的测量装置及其使用方法
CN106033065A (zh) * 2015-03-13 2016-10-19 中国科学院空间科学与应用研究中心 卫星材料表面的二次电子发射率的测量装置及其使用方法
EP3176808B1 (de) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Verfahren zur detektion geladener partikel und partikelstrahlvorrichtung zur durchführung des verfahrens
CN110779845A (zh) * 2019-09-12 2020-02-11 天津力神电池股份有限公司 一种锂离子电池含涂层隔膜的孔隙结构的多维观测方法
US11239048B2 (en) * 2020-03-09 2022-02-01 Kla Corporation Arrayed column detector
CN113421813A (zh) * 2021-07-21 2021-09-21 无锡量子感知技术有限公司 一种高收集效率的扫描电镜电子探测器
CN117650032B (zh) * 2023-11-08 2024-10-15 北京中科科仪股份有限公司 一种探头装置、二次电子探测器及扫描电镜

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5927075B2 (ja) * 1974-07-17 1984-07-03 ユニチカ株式会社 走査型電子顕微鏡
US4677296A (en) * 1984-09-24 1987-06-30 Siemens Aktiengesellschaft Apparatus and method for measuring lengths in a scanning particle microscope
US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US5408098A (en) * 1993-09-10 1995-04-18 International Business Machines Corporation Method and apparatus for detecting low loss electrons in a scanning electron microscope
GB9623768D0 (en) 1996-11-15 1997-01-08 Leo Electron Microscopy Limite Scanning electron microscope
US6255708B1 (en) * 1997-10-10 2001-07-03 Rengarajan Sudharsanan Semiconductor P-I-N detector
DE10012314A1 (de) * 2000-03-14 2001-09-20 Leo Elektronenmikroskopie Gmbh Detektorsystem für ein Korpuskularstrahlgerät und Korpuskularstrahlgerät mit einem solchen Detektorsystem
GB2367686B (en) 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
ATE524821T1 (de) * 2002-05-31 2011-09-15 Zeiss Carl Smt Ltd Verbesserungen in einem teilchendetektor

Also Published As

Publication number Publication date
RU2005100770A (ru) 2005-09-10
EP1537595B1 (de) 2012-04-11
CN1659679A (zh) 2005-08-24
WO2004059691A1 (en) 2004-07-15
CN1329943C (zh) 2007-08-01
US20050230620A1 (en) 2005-10-20
US7193222B2 (en) 2007-03-20
EP1537595A1 (de) 2005-06-08
CZ20022105A3 (cs) 2004-02-18
AU2003303138A1 (en) 2004-07-22

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