ATE555843T1 - Verfahren zum behandeln eines gasstroms - Google Patents

Verfahren zum behandeln eines gasstroms

Info

Publication number
ATE555843T1
ATE555843T1 AT07700419T AT07700419T ATE555843T1 AT E555843 T1 ATE555843 T1 AT E555843T1 AT 07700419 T AT07700419 T AT 07700419T AT 07700419 T AT07700419 T AT 07700419T AT E555843 T1 ATE555843 T1 AT E555843T1
Authority
AT
Austria
Prior art keywords
gas stream
treating
gas
abatement device
abatement
Prior art date
Application number
AT07700419T
Other languages
English (en)
Inventor
Andrew James Seeley
James Robert Smith
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE555843T1 publication Critical patent/ATE555843T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30—Controlling by gas-analysis apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Drying Of Semiconductors (AREA)
  • Lasers (AREA)
AT07700419T 2006-02-08 2007-01-12 Verfahren zum behandeln eines gasstroms ATE555843T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0602506.8A GB0602506D0 (en) 2006-02-08 2006-02-08 Method of treating a gas stream
PCT/GB2007/050012 WO2007091100A1 (en) 2006-02-08 2007-01-12 Method of treating a gas stream

Publications (1)

Publication Number Publication Date
ATE555843T1 true ATE555843T1 (de) 2012-05-15

Family

ID=36119696

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07700419T ATE555843T1 (de) 2006-02-08 2007-01-12 Verfahren zum behandeln eines gasstroms

Country Status (8)

Country Link
EP (1) EP1981618B1 (de)
JP (1) JP5172707B2 (de)
KR (1) KR101321265B1 (de)
CN (1) CN101410167B (de)
AT (1) ATE555843T1 (de)
GB (1) GB0602506D0 (de)
TW (1) TWI400354B (de)
WO (1) WO2007091100A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0523947D0 (en) * 2005-11-24 2006-01-04 Boc Group Plc Microwave plasma system
CN101939079B (zh) * 2008-02-05 2013-06-12 应用材料公司 用于处理来自制程的可燃性废气的系统及方法
FR2981705B1 (fr) * 2011-10-19 2013-11-22 Adixen Vacuum Products Dispositif de pompage et de traitement des gaz
KR20140107758A (ko) 2013-02-28 2014-09-05 삼성전자주식회사 반응 부산물 처리기 및 반응 부산물의 처리방법과 반응 부산물 처리기를 구비하는 반도체 소자 제조설비
JP6153754B2 (ja) * 2013-03-28 2017-06-28 株式会社荏原製作所 除害機能付真空ポンプ
KR102111914B1 (ko) * 2014-03-06 2020-05-18 어플라이드 머티어리얼스, 인코포레이티드 중원자들을 함유하는 화합물들의 플라즈마 저감
GB2588906A (en) * 2019-11-13 2021-05-19 Edwards Ltd Gas purged valve
GB2597545A (en) * 2020-07-28 2022-02-02 Edwards Ltd A noble gas recovery system
US12285715B2 (en) 2020-07-28 2025-04-29 Edwards Limited Noble gas recovery system
US11603313B2 (en) 2021-05-11 2023-03-14 Praxair Technology, Inc. Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8813270D0 (en) * 1988-06-04 1988-07-06 Plasma Products Ltd Dry exhaust gas conditioning
JP3553310B2 (ja) * 1997-03-11 2004-08-11 株式会社荏原製作所 真空排気システム
EP1048337A1 (de) * 1999-04-28 2000-11-02 Air Products And Chemicals, Inc. Verfahren zur Rückgewinung von perfluorinierten Verbindungen in Abgasen bei der Halbleiterherstellung mit Rückführung des Vakuumpumpenverdünnungsmittels
KR100755241B1 (ko) * 2000-05-29 2007-09-04 가부시키가이샤 아도테쿠 프라즈마 테쿠노로지 피처리물처리장치 및 그것을 사용한 플라즈마설비
US6576573B2 (en) * 2001-02-09 2003-06-10 Advanced Technology Materials, Inc. Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species
JP4549563B2 (ja) * 2001-03-22 2010-09-22 三菱電機株式会社 ハロゲン含有ガスの処理装置

Also Published As

Publication number Publication date
EP1981618A1 (de) 2008-10-22
KR20080100214A (ko) 2008-11-14
WO2007091100A1 (en) 2007-08-16
EP1981618B1 (de) 2012-05-02
JP5172707B2 (ja) 2013-03-27
JP2009525861A (ja) 2009-07-16
TWI400354B (zh) 2013-07-01
GB0602506D0 (en) 2006-03-22
CN101410167A (zh) 2009-04-15
CN101410167B (zh) 2012-07-11
TW200732502A (en) 2007-09-01
KR101321265B1 (ko) 2013-10-25

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