ATE66241T1 - Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium. - Google Patents
Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium.Info
- Publication number
- ATE66241T1 ATE66241T1 AT87402083T AT87402083T ATE66241T1 AT E66241 T1 ATE66241 T1 AT E66241T1 AT 87402083 T AT87402083 T AT 87402083T AT 87402083 T AT87402083 T AT 87402083T AT E66241 T1 ATE66241 T1 AT E66241T1
- Authority
- AT
- Austria
- Prior art keywords
- polishing
- cerium
- organic glass
- polishing composition
- composition
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 4
- 239000011521 glass Substances 0.000 title abstract 2
- 239000000203 mixture Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 229910052684 Cerium Inorganic materials 0.000 abstract 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract 1
- 229940044927 ceric oxide Drugs 0.000 abstract 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000004033 plastic Substances 0.000 abstract 1
- 239000002985 plastic film Substances 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Surface Treatment Of Glass (AREA)
- Catalysts (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8613443A FR2604443A1 (fr) | 1986-09-26 | 1986-09-26 | Composition de polissage a base de cerium destinee au polissage des verres organiques |
| EP87402083A EP0266233B1 (de) | 1986-09-26 | 1987-09-18 | Verfahren zur Polierung von organischen Gläsern mit einer Polierzusammensetzung auf der Basis von Cerium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE66241T1 true ATE66241T1 (de) | 1991-08-15 |
Family
ID=9339291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT87402083T ATE66241T1 (de) | 1986-09-26 | 1987-09-18 | Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4769073A (de) |
| EP (1) | EP0266233B1 (de) |
| JP (1) | JPS63169262A (de) |
| AT (1) | ATE66241T1 (de) |
| AU (1) | AU601495B2 (de) |
| BR (1) | BR8704936A (de) |
| DE (1) | DE3772151D1 (de) |
| ES (1) | ES2025681T3 (de) |
| FR (1) | FR2604443A1 (de) |
| PT (1) | PT85796B (de) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4470726A (en) * | 1982-10-04 | 1984-09-11 | Halliburton Company | Leg closure |
| FR2624519A1 (fr) * | 1987-12-09 | 1989-06-16 | Rhone Poulenc Chimie | Composition de polissage perfectionnee a base de cerium et son procede de preparation |
| JPH01257563A (ja) * | 1988-04-08 | 1989-10-13 | Showa Denko Kk | アルミニウム磁気ディスク研磨用組成物 |
| JPH0284485A (ja) * | 1988-09-20 | 1990-03-26 | Showa Denko Kk | アルミニウム磁気ディスク研磨用組成物 |
| US5106394A (en) * | 1990-10-01 | 1992-04-21 | The United States Of America As Represented By The Secretary Of The Navy | Fiber optic polishing system |
| US5136818A (en) * | 1990-10-01 | 1992-08-11 | The United States Of America As Represented By The Secretary Of The Navy | Method of polishing optical fiber |
| US5264010A (en) * | 1992-04-27 | 1993-11-23 | Rodel, Inc. | Compositions and methods for polishing and planarizing surfaces |
| WO1996028385A1 (en) * | 1995-03-15 | 1996-09-19 | Hoya Corporation | Process for preparing precipitate of metal oxide |
| JP3359479B2 (ja) * | 1995-11-07 | 2002-12-24 | 三井金属鉱業株式会社 | 研磨材、その製造方法及び研磨方法 |
| WO1997029510A1 (fr) * | 1996-02-07 | 1997-08-14 | Hitachi Chemical Company, Ltd. | Abrasif d'oxyde de cerium, microplaquette semi-conductrice, dispositif semi-conducteur, procede pour les produire et procede pour polir les substrats |
| US5897675A (en) * | 1996-04-26 | 1999-04-27 | Degussa Aktiengesellschaft | Cerium oxide-metal/metalloid oxide mixture |
| US5962343A (en) * | 1996-07-30 | 1999-10-05 | Nissan Chemical Industries, Ltd. | Process for producing crystalline ceric oxide particles and abrasive |
| EP1610367B1 (de) * | 1996-09-30 | 2010-03-17 | Hitachi Chemical Co., Ltd. | Schleifmittel auf Basis von Ceroxid und Verfahren zum Polieren von Oberflächen |
| US5759917A (en) | 1996-12-30 | 1998-06-02 | Cabot Corporation | Composition for oxide CMP |
| SG72802A1 (en) * | 1997-04-28 | 2000-05-23 | Seimi Chem Kk | Polishing agent for semiconductor and method for its production |
| EP1021491B1 (de) * | 1997-09-26 | 2001-12-19 | Infineon Technologies AG | Poliermittel und die verwendung dieses poliermittels zum planarisieren eines halbleitersubstrats |
| US6435947B2 (en) | 1998-05-26 | 2002-08-20 | Cabot Microelectronics Corporation | CMP polishing pad including a solid catalyst |
| US6177026B1 (en) | 1998-05-26 | 2001-01-23 | Cabot Microelectronics Corporation | CMP slurry containing a solid catalyst |
| EP0969057A1 (de) * | 1998-07-03 | 2000-01-05 | International Business Machines Corporation | Doppelwertige Seltenerdadditive für Polierschlämme |
| JP3983949B2 (ja) | 1998-12-21 | 2007-09-26 | 昭和電工株式会社 | 研磨用酸化セリウムスラリー、その製造法及び研磨方法 |
| KR20010077710A (ko) * | 2000-02-08 | 2001-08-20 | 구자홍 | 디스플레이 패널의 면세정용 연마제 |
| BR0106273A (pt) * | 2000-05-16 | 2002-03-26 | Mitsui Mining & Smelting Co | Abrasivo à base de cério, matéria-prima para referido abrasivo e métodos de produção do referido abrasivo e da referida matéria-prima |
| US6454821B1 (en) | 2000-06-21 | 2002-09-24 | Praxair S. T. Technology, Inc. | Polishing composition and method |
| US6437336B1 (en) | 2000-08-15 | 2002-08-20 | Crismatec | Scintillator crystals and their applications and manufacturing process |
| US7887714B2 (en) * | 2000-12-25 | 2011-02-15 | Nissan Chemical Industries, Ltd. | Cerium oxide sol and abrasive |
| WO2002067309A1 (en) * | 2001-02-20 | 2002-08-29 | Hitachi Chemical Co., Ltd. | Polishing compound and method for polishing substrate |
| US7077880B2 (en) * | 2004-01-16 | 2006-07-18 | Dupont Air Products Nanomaterials Llc | Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization |
| US20030162398A1 (en) * | 2002-02-11 | 2003-08-28 | Small Robert J. | Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
| US7513920B2 (en) * | 2002-02-11 | 2009-04-07 | Dupont Air Products Nanomaterials Llc | Free radical-forming activator attached to solid and used to enhance CMP formulations |
| TWI314949B (en) * | 2002-09-06 | 2009-09-21 | Seimi Chem Kk | Polishing compound for insulating film for semiconductor integrated circuit and method for producing semiconductor integrated circuit |
| US20040217006A1 (en) * | 2003-03-18 | 2004-11-04 | Small Robert J. | Residue removers for electrohydrodynamic cleaning of semiconductors |
| WO2006105020A1 (en) | 2005-03-25 | 2006-10-05 | Dupont Air Products Nanomaterials Llc | Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers |
| US7294044B2 (en) * | 2005-04-08 | 2007-11-13 | Ferro Corporation | Slurry composition and method for polishing organic polymer-based ophthalmic substrates |
| US7467988B2 (en) * | 2005-04-08 | 2008-12-23 | Ferro Corporation | Slurry composition and method for polishing organic polymer-based ophthalmic substrates |
| WO2011054193A1 (zh) * | 2009-11-06 | 2011-05-12 | Wang Chen | 一种化学机械抛光液 |
| CN107735471B (zh) * | 2015-07-10 | 2021-02-12 | 费罗公司 | 用于抛光有机聚合物基眼用基材的浆液组合物和添加剂以及方法 |
| KR101900543B1 (ko) * | 2015-10-02 | 2018-09-20 | 삼성에스디아이 주식회사 | 유기막 cmp 슬러리 조성물 및 이를 이용한 연마방법 |
| WO2018179062A1 (ja) * | 2017-03-27 | 2018-10-04 | 日立化成株式会社 | 研磨液、研磨液セット、添加液及び研磨方法 |
| CN116769401A (zh) * | 2023-02-03 | 2023-09-19 | 包头海亮科技有限责任公司 | 一种改性稀土抛光粉的制备方法及其应用 |
| CN116891596B (zh) * | 2023-07-25 | 2024-04-05 | 铨盛聚碳科技股份有限公司 | 一种含有稀土磺酸盐插层无机物的阻燃剂以及制备方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3097083A (en) * | 1959-07-02 | 1963-07-09 | American Potash & Chem Corp | Polishing composition and process of forming same |
| DE1263955B (de) * | 1962-04-11 | 1968-03-21 | Libbey Owens Ford Glass Co | Verfahren zum Polieren einer Glasoberflaeche |
| US3262766A (en) * | 1963-11-21 | 1966-07-26 | Grace W R & Co | Rare-earth oxides for polishing glass |
| US3768989A (en) * | 1968-08-19 | 1973-10-30 | N Goetzinger | Process for the preparation of a rare earth oxide polishing composition |
| ATE7798T1 (de) * | 1979-11-29 | 1984-06-15 | Rhone-Poulenc Industries | Verfahren zum polieren mineralischer und organischer werkstoffe. |
| FR2472601A1 (fr) * | 1979-12-27 | 1981-07-03 | Rhone Poulenc Ind | Procede de fabrication de compositions de polissage a base de cerium |
| FR2545830B1 (fr) * | 1983-05-13 | 1986-01-03 | Rhone Poulenc Spec Chim | Nouvelle composition de polissage a base de cerium et son procede de fabrication |
| FR2549846B1 (fr) * | 1983-07-29 | 1986-12-26 | Rhone Poulenc Spec Chim | Nouvelle composition de polissage a base de cerium et son procede de fabrication |
-
1986
- 1986-09-26 FR FR8613443A patent/FR2604443A1/fr not_active Withdrawn
-
1987
- 1987-09-18 ES ES198787402083T patent/ES2025681T3/es not_active Expired - Lifetime
- 1987-09-18 EP EP87402083A patent/EP0266233B1/de not_active Expired - Lifetime
- 1987-09-18 AT AT87402083T patent/ATE66241T1/de not_active IP Right Cessation
- 1987-09-18 DE DE8787402083T patent/DE3772151D1/de not_active Expired - Fee Related
- 1987-09-25 JP JP62239127A patent/JPS63169262A/ja active Pending
- 1987-09-25 BR BR8704936A patent/BR8704936A/pt unknown
- 1987-09-25 PT PT85796A patent/PT85796B/pt not_active IP Right Cessation
- 1987-09-28 AU AU79044/87A patent/AU601495B2/en not_active Ceased
- 1987-09-28 US US07/101,409 patent/US4769073A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0266233B1 (de) | 1991-08-14 |
| FR2604443A1 (fr) | 1988-04-01 |
| AU7904487A (en) | 1988-03-31 |
| AU601495B2 (en) | 1990-09-13 |
| EP0266233A1 (de) | 1988-05-04 |
| PT85796A (fr) | 1987-10-01 |
| US4769073A (en) | 1988-09-06 |
| PT85796B (pt) | 1990-08-31 |
| ES2025681T3 (es) | 1992-04-01 |
| DE3772151D1 (de) | 1991-09-19 |
| JPS63169262A (ja) | 1988-07-13 |
| BR8704936A (pt) | 1988-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| REN | Ceased due to non-payment of the annual fee |