ATE69526T1 - Hochspannungsquelle fuer kontinuierlich geregelte ausgangsspannung, vorzugsweise um ionen- und elektronenstrahl-bearbeitungs- und verdampfungsgeraete mit niedriger leistung zu speisen. - Google Patents

Hochspannungsquelle fuer kontinuierlich geregelte ausgangsspannung, vorzugsweise um ionen- und elektronenstrahl-bearbeitungs- und verdampfungsgeraete mit niedriger leistung zu speisen.

Info

Publication number
ATE69526T1
ATE69526T1 AT86117640T AT86117640T ATE69526T1 AT E69526 T1 ATE69526 T1 AT E69526T1 AT 86117640 T AT86117640 T AT 86117640T AT 86117640 T AT86117640 T AT 86117640T AT E69526 T1 ATE69526 T1 AT E69526T1
Authority
AT
Austria
Prior art keywords
high voltage
output
preferable
voltage source
electron beam
Prior art date
Application number
AT86117640T
Other languages
English (en)
Inventor
Arpad Barna
Istvan Bodi
Original Assignee
Mta Mueszaki Fiz Kutato Inteze
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mta Mueszaki Fiz Kutato Inteze filed Critical Mta Mueszaki Fiz Kutato Inteze
Application granted granted Critical
Publication of ATE69526T1 publication Critical patent/ATE69526T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
AT86117640T 1985-12-18 1986-12-18 Hochspannungsquelle fuer kontinuierlich geregelte ausgangsspannung, vorzugsweise um ionen- und elektronenstrahl-bearbeitungs- und verdampfungsgeraete mit niedriger leistung zu speisen. ATE69526T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
HU854849A HU194421B (en) 1985-12-18 1985-12-18 High-voltage supply unit for supplying regulable output high voltege, advantegously for operating ion- or electron ray processing and evaporating apparatus of low power
EP86117640A EP0227042B1 (de) 1985-12-18 1986-12-18 Hochspannungsquelle für kontinuierlich geregelte Ausgangsspannung, vorzugsweise um Ionen- und Elektronenstrahl-Bearbeitungs- und -Verdampfungsgeräte mit niedriger Leistung zu speisen

Publications (1)

Publication Number Publication Date
ATE69526T1 true ATE69526T1 (de) 1991-11-15

Family

ID=10969012

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86117640T ATE69526T1 (de) 1985-12-18 1986-12-18 Hochspannungsquelle fuer kontinuierlich geregelte ausgangsspannung, vorzugsweise um ionen- und elektronenstrahl-bearbeitungs- und verdampfungsgeraete mit niedriger leistung zu speisen.

Country Status (6)

Country Link
US (1) US4739463A (de)
EP (1) EP0227042B1 (de)
JP (1) JPS62236363A (de)
AT (1) ATE69526T1 (de)
DE (1) DE3682489D1 (de)
HU (1) HU194421B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807760B2 (ja) * 1988-10-26 1998-10-08 九州大学長 スイッチング電源
EP0383962A1 (de) * 1989-02-20 1990-08-29 Hauzer Holding B.V. Hochspannungsgleichrichter und zugeordnete Steuerelektronik
US7180758B2 (en) * 1999-07-22 2007-02-20 Mks Instruments, Inc. Class E amplifier with inductive clamp
US6469919B1 (en) * 1999-07-22 2002-10-22 Eni Technology, Inc. Power supplies having protection circuits
US7516623B2 (en) * 2006-01-09 2009-04-14 Glastender, Inc. Chilled beverage delivery system
US8344801B2 (en) 2010-04-02 2013-01-01 Mks Instruments, Inc. Variable class characteristic amplifier
US9214901B2 (en) 2012-07-27 2015-12-15 Mks Instruments, Inc. Wideband AFT power amplifier systems with frequency-based output transformer impedance balancing
CN109802573B (zh) * 2019-01-30 2020-04-17 西安微电子技术研究所 一种基于电流型脉宽调制控制器的磁隔离反馈驱动电路和dc/dc变换器
CN111391611B (zh) * 2020-03-25 2021-10-22 广州华凌制冷设备有限公司 运行检测方法、运行检测装置、车载空调器和存储介质

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE217968C (de) *
UST950004I4 (de) * 1975-05-30 1976-09-07
US4005352A (en) * 1976-04-05 1977-01-25 Northern Telecom Limited Protection circuit for magnetically controlled d-c to d-c converter
US4150424A (en) * 1978-04-04 1979-04-17 International Telephone And Telegraph Corporation Dynamic current balancing for power converters
JPS5566279A (en) * 1978-11-13 1980-05-19 Yuasa Battery Co Ltd Switching regulator
US4301499A (en) * 1980-06-13 1981-11-17 The United States Of America As Represented By The Secretary Of The Army Inverter circuit with current equalization

Also Published As

Publication number Publication date
DE3682489D1 (de) 1991-12-19
EP0227042A2 (de) 1987-07-01
US4739463A (en) 1988-04-19
HU194421B (en) 1988-01-28
EP0227042A3 (en) 1988-09-28
JPS62236363A (ja) 1987-10-16
HUT42644A (en) 1987-07-28
EP0227042B1 (de) 1991-11-13

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ATE69526T1 (de) Hochspannungsquelle fuer kontinuierlich geregelte ausgangsspannung, vorzugsweise um ionen- und elektronenstrahl-bearbeitungs- und verdampfungsgeraete mit niedriger leistung zu speisen.
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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties