ATE69647T1 - Richtungsempfindlicher durchflussanzeiger. - Google Patents

Richtungsempfindlicher durchflussanzeiger.

Info

Publication number
ATE69647T1
ATE69647T1 AT88201994T AT88201994T ATE69647T1 AT E69647 T1 ATE69647 T1 AT E69647T1 AT 88201994 T AT88201994 T AT 88201994T AT 88201994 T AT88201994 T AT 88201994T AT E69647 T1 ATE69647 T1 AT E69647T1
Authority
AT
Austria
Prior art keywords
flow
directional flow
flow indicator
thermocouples
thermocouple
Prior art date
Application number
AT88201994T
Other languages
English (en)
Inventor
Johan Hendrik Huijsing
Oudsheusden Bastiaan Wille Van
Original Assignee
Bronkhorst High Tech Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bronkhorst High Tech Bv filed Critical Bronkhorst High Tech Bv
Application granted granted Critical
Publication of ATE69647T1 publication Critical patent/ATE69647T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Burglar Alarm Systems (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Geophysics And Detection Of Objects (AREA)
AT88201994T 1987-09-18 1988-09-14 Richtungsempfindlicher durchflussanzeiger. ATE69647T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8702229A NL8702229A (nl) 1987-09-18 1987-09-18 Richtingsgevoelige stroomsnelheidsmeter.
EP88201994A EP0313120B1 (de) 1987-09-18 1988-09-14 Richtungsempfindlicher Durchflussanzeiger

Publications (1)

Publication Number Publication Date
ATE69647T1 true ATE69647T1 (de) 1991-12-15

Family

ID=19850629

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88201994T ATE69647T1 (de) 1987-09-18 1988-09-14 Richtungsempfindlicher durchflussanzeiger.

Country Status (7)

Country Link
US (1) US4890489A (de)
EP (1) EP0313120B1 (de)
JP (1) JP2561230B2 (de)
AT (1) ATE69647T1 (de)
DE (1) DE3866331D1 (de)
ES (1) ES2028996T3 (de)
NL (1) NL8702229A (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0663799B2 (ja) * 1987-10-05 1994-08-22 株式会社村田製作所 熱型流量検出装置
NL8901500A (nl) * 1989-06-13 1991-01-02 Bronkhorst High Tech Bv Inrichting voor het bepalen van de snelheid en richting van een stromend medium.
NL8901602A (nl) * 1989-06-23 1991-01-16 Bronkhorst High Tech Bv Geintegreerde halfgeleider-schakeling voor thermische metingen.
FR2670579A1 (fr) * 1990-12-14 1992-06-19 Schlumberger Ind Sa Capteur semi-conducteur de debit.
JPH04295768A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
ITGE940008A1 (it) * 1994-01-19 1995-07-19 Vincenzo Arrichiello Dispositivo per la misurazione della velocita' di un flusso di fluido.
US5557967A (en) * 1995-02-24 1996-09-24 Pacesetter, Inc. Thermopile flow sensor
NL1000454C2 (nl) * 1995-05-30 1996-12-03 Mierij Meteo Bv Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.
DE19623174C1 (de) * 1996-06-10 1997-11-27 Trilog Thermotechnik Gmbh Vorrichtung zum Erfassen eines flüssigen oder gasförmigen Mediums
US6502459B1 (en) 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
EP1223411A1 (de) * 2001-01-12 2002-07-17 Lidact GmbH Universeller Messaufnehmer zur Messung der Scherspannung, des Massendurchflusses oder der Geschwindigkeit eines Fluids oder Gases, zur Bestimmung der Tropfenzahl sowie zur Tropf- oder Leckdetektion
US7670045B2 (en) * 2004-06-18 2010-03-02 Raytheon Company Microstrip power sensor
JP5224089B2 (ja) * 2007-06-07 2013-07-03 セイコーＮｐｃ株式会社 熱式センサ
JP2013195085A (ja) * 2012-03-15 2013-09-30 Sharp Corp 風速計
DE102013020904B3 (de) * 2013-12-16 2014-11-20 Dräger Safety AG & Co. KGaA Vorrichtung zur Überwachung eines Massen- oder Volumenstroms eines Gasstroms
CN108697353A (zh) 2016-02-04 2018-10-23 迈迪瑞股份公司 传感器装置和包括传感器装置的导管
JP7235218B2 (ja) * 2019-03-04 2023-03-08 ミネベアミツミ株式会社 流体センサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3732729A (en) * 1971-08-19 1973-05-15 N Greene Speed sensor
US3996799A (en) * 1975-09-29 1976-12-14 Putten Antonius Ferdinandus Pe Device for measuring the flow velocity of a medium
NL177629C (nl) * 1979-07-09 1985-10-16 Brooks Instr Bv Richtingsgevoelige stroomsnelheidsmeter.
US4332157A (en) * 1980-08-29 1982-06-01 Trustees Of The University Of Pennsylvania Pyroelectric anemometer
US4637253A (en) * 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
US4561303A (en) * 1984-12-06 1985-12-31 Ford Motor Company Mass airflow sensor with backflow detection

Also Published As

Publication number Publication date
NL8702229A (nl) 1989-04-17
US4890489A (en) 1990-01-02
JPH01147322A (ja) 1989-06-09
DE3866331D1 (de) 1992-01-02
EP0313120B1 (de) 1991-11-21
JP2561230B2 (ja) 1996-12-04
ES2028996T3 (es) 1992-07-16
EP0313120A1 (de) 1989-04-26

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EELA Cancelled due to lapse of time