ATE80184T1 - Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. - Google Patents

Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.

Info

Publication number
ATE80184T1
ATE80184T1 AT87201244T AT87201244T ATE80184T1 AT E80184 T1 ATE80184 T1 AT E80184T1 AT 87201244 T AT87201244 T AT 87201244T AT 87201244 T AT87201244 T AT 87201244T AT E80184 T1 ATE80184 T1 AT E80184T1
Authority
AT
Austria
Prior art keywords
cathode
objects
cavity
coating holes
arc deposition
Prior art date
Application number
AT87201244T
Other languages
English (en)
Inventor
Harald Wesemeyer
Hans Veltrop
Original Assignee
Hauzer Holding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hauzer Holding filed Critical Hauzer Holding
Application granted granted Critical
Publication of ATE80184T1 publication Critical patent/ATE80184T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AT87201244T 1987-06-29 1987-06-29 Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden. ATE80184T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87201244A EP0298157B1 (de) 1987-06-29 1987-06-29 Verfahren und Vorrichtung zur Beschichtung von Aushöhlungen von Gegenständen

Publications (1)

Publication Number Publication Date
ATE80184T1 true ATE80184T1 (de) 1992-09-15

Family

ID=8197632

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87201244T ATE80184T1 (de) 1987-06-29 1987-06-29 Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.

Country Status (5)

Country Link
US (1) US5026466A (de)
EP (1) EP0298157B1 (de)
JP (1) JPS6473072A (de)
AT (1) ATE80184T1 (de)
DE (1) DE3781551T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393575A (en) * 1992-03-03 1995-02-28 Esterlis; Moisei Method for carrying out surface processes
JPH0673538A (ja) * 1992-05-26 1994-03-15 Kobe Steel Ltd アークイオンプレーティング装置
WO1994021839A1 (fr) * 1993-03-15 1994-09-29 Kabushiki Kaisha Kobeseikosho Appareil et systeme de placage ionique a l'arc
EP0658634B1 (de) * 1993-12-17 1999-03-10 KABUSHIKI KAISHA KOBE SEIKO SHO also known as Kobe Steel Ltd. Vorrichtung zur Bogenbeschichtung im Vakuum
WO1997038149A1 (en) * 1996-04-08 1997-10-16 Ronald Christy Cathodic arc cathode
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US6193853B1 (en) * 1999-02-25 2001-02-27 Cametoid Limited Magnetron sputtering method and apparatus
US20020110700A1 (en) * 2001-02-12 2002-08-15 Hein Gerald F. Process for forming decorative films and resulting products
WO2003057939A2 (en) * 2002-01-14 2003-07-17 Varco Ltd. Cathode for vacuum arc evaporators
ATE386334T1 (de) * 2002-04-22 2008-03-15 Pivot A S Bogenbeschichtung mit drehkathoden
US7351480B2 (en) * 2002-06-11 2008-04-01 Southwest Research Institute Tubular structures with coated interior surfaces
US7052736B2 (en) * 2002-06-11 2006-05-30 Southwest Research Institute Method for depositing coatings on the interior surfaces of tubular structures
US7867366B1 (en) * 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US7444955B2 (en) * 2004-05-19 2008-11-04 Sub-One Technology, Inc. Apparatus for directing plasma flow to coat internal passageways
US7300684B2 (en) * 2004-07-15 2007-11-27 Sub-One Technology, Inc. Method and system for coating internal surfaces of prefabricated process piping in the field
US7541069B2 (en) * 2005-03-07 2009-06-02 Sub-One Technology, Inc. Method and system for coating internal surfaces using reverse-flow cycling
US7608151B2 (en) * 2005-03-07 2009-10-27 Sub-One Technology, Inc. Method and system for coating sections of internal surfaces
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
JP4878020B2 (ja) * 2007-09-27 2012-02-15 株式会社神戸製鋼所 真空アーク蒸発源
US9260781B2 (en) 2009-02-18 2016-02-16 Council Of Scientific And Industrial Research Process to deposit diamond like carbon as surface of a shaped object
US20120312233A1 (en) * 2011-06-10 2012-12-13 Ge Yi Magnetically Enhanced Thin Film Coating Method and Apparatus
US10304665B2 (en) 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
US20150101924A1 (en) * 2013-10-16 2015-04-16 General Electric Company Assembly and method of coating an interior surface of an object
US9111734B2 (en) 2013-10-31 2015-08-18 General Electric Company Systems and method of coating an interior surface of an object
US20150114828A1 (en) * 2013-10-31 2015-04-30 General Electric Company Systems and method of coating an interior surface of an object
KR101440316B1 (ko) * 2014-04-30 2014-09-18 주식회사 유니벡 박막 코팅을 위한 진공 챔버 내부 아크 스팟 생성장치
CN104451562B (zh) * 2014-12-08 2017-02-22 沈阳工业大学 一种长管件内壁镀膜的电弧离子镀装置
US9765424B2 (en) 2015-02-25 2017-09-19 Engineering And Software System Solutions, Inc. Method of refurbishing high value articles
WO2018226966A1 (en) * 2017-06-08 2018-12-13 Board Of Trustees Of Michigan State University Magnetic-field-assisted plasma coating system
CN108085640B (zh) * 2017-10-31 2023-05-12 东莞市汇成真空科技有限公司 大型罐体内壁镀膜用真空阴极电弧镀膜机
CN107858653B (zh) * 2017-10-31 2023-05-12 东莞市汇成真空科技有限公司 一种电弧靶升降抬头机构
US11834204B1 (en) 2018-04-05 2023-12-05 Nano-Product Engineering, LLC Sources for plasma assisted electric propulsion
US12048910B2 (en) 2018-07-11 2024-07-30 Board Of Trustees Of Michigan State University Vertically oriented plasma reactor
CN108930018B (zh) * 2018-08-09 2020-06-02 南通大学 一种细长管状零件内表面真空镀膜装置
CN109338292B (zh) * 2018-11-15 2020-06-23 温州职业技术学院 一种管件内壁真空镀膜装置及生产工艺
US12224165B2 (en) * 2019-12-06 2025-02-11 Board Of Trustees Of Michigan State University Magnetic-field-assisted plasma coating system

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US3491015A (en) * 1967-04-04 1970-01-20 Automatic Fire Control Inc Method of depositing elemental material from a low pressure electrical discharge
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
DE2346738A1 (de) * 1973-09-17 1975-04-24 Bbc Brown Boveri & Cie Verfahren zum aufbringen duenner schichten auf flaechenhafte gebilde
DE2820301B2 (de) * 1978-05-10 1980-11-06 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Anordnung zur Innenbeschichtung von Rohren
SU711787A1 (ru) * 1978-06-17 1980-10-07 Предприятие П/Я В-8851 Электродуговой испаритель металлов
US4419202A (en) * 1980-12-22 1983-12-06 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Metal coatings
US4609564C2 (en) * 1981-02-24 2001-10-09 Masco Vt Inc Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
US4505947A (en) * 1982-07-14 1985-03-19 The Standard Oil Company (Ohio) Method for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US4468309A (en) * 1983-04-22 1984-08-28 White Engineering Corporation Method for resisting galling
US4673477A (en) * 1984-03-02 1987-06-16 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
JPS60187669A (ja) * 1984-06-22 1985-09-25 Nippon Tungsten Co Ltd 線爆溶射方法
US4724058A (en) * 1984-08-13 1988-02-09 Vac-Tec Systems, Inc. Method and apparatus for arc evaporating large area targets
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.

Also Published As

Publication number Publication date
DE3781551D1 (de) 1992-10-08
EP0298157A1 (de) 1989-01-11
EP0298157B1 (de) 1992-09-02
JPS6473072A (en) 1989-03-17
US5026466A (en) 1991-06-25
DE3781551T2 (de) 1993-04-08

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