ATE81907T1 - Optische messapparate. - Google Patents

Optische messapparate.

Info

Publication number
ATE81907T1
ATE81907T1 AT86307065T AT86307065T ATE81907T1 AT E81907 T1 ATE81907 T1 AT E81907T1 AT 86307065 T AT86307065 T AT 86307065T AT 86307065 T AT86307065 T AT 86307065T AT E81907 T1 ATE81907 T1 AT E81907T1
Authority
AT
Austria
Prior art keywords
measurement
station
photo
array means
graticule
Prior art date
Application number
AT86307065T
Other languages
English (en)
Inventor
Philip James Eric Aldred
Original Assignee
Tesa Metrology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tesa Metrology Ltd filed Critical Tesa Metrology Ltd
Application granted granted Critical
Publication of ATE81907T1 publication Critical patent/ATE81907T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Communication System (AREA)
AT86307065T 1985-09-13 1986-09-12 Optische messapparate. ATE81907T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08522750A GB2180640A (en) 1985-09-13 1985-09-13 Optical measurement apparatus
EP86307065A EP0216587B1 (de) 1985-09-13 1986-09-12 Optische Messapparate

Publications (1)

Publication Number Publication Date
ATE81907T1 true ATE81907T1 (de) 1992-11-15

Family

ID=10585159

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86307065T ATE81907T1 (de) 1985-09-13 1986-09-12 Optische messapparate.

Country Status (5)

Country Link
US (1) US4747689A (de)
EP (1) EP0216587B1 (de)
AT (1) ATE81907T1 (de)
DE (1) DE3687029T2 (de)
GB (1) GB2180640A (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1106332B1 (de) * 1988-04-18 2005-11-02 3D Systems, Inc. Profilierung eines Strahlungsbündels für Stereolithographie
US4906098A (en) * 1988-05-09 1990-03-06 Glass Technology Development Corporation Optical profile measuring apparatus
GB9107037D0 (en) * 1991-04-04 1991-05-22 Tesa Metrology Ltd Improvements in or relating to electro-optical measurement apparatus
GB9315843D0 (en) * 1993-07-30 1993-09-15 Litton Uk Ltd Improved machine tool
US5757425A (en) * 1995-12-19 1998-05-26 Eastman Kodak Company Method and apparatus for independently calibrating light source and photosensor arrays
AU2003229286A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for the plasma treatment of workpieces
US7745805B2 (en) 2002-06-17 2010-06-29 Johnson Thread-View Systems Product inspection system and a method for implementing same that incorporates a correction factor
US8410466B2 (en) * 2002-06-17 2013-04-02 Quest Metrology Group, Llc Non-contact component inspection system
US8035094B2 (en) 2002-06-17 2011-10-11 Quest Metrology, LLC Methods for measuring at least one physical characteristic of a component
US20100259764A1 (en) * 2003-06-13 2010-10-14 Johnson Stanley P Product inspection system and a method for implementing same
DE102004011404A1 (de) * 2004-03-05 2005-09-22 Prüftechnik Dieter Busch AG Messgerät zur Bestimmung der Geradheit von Wellen oder Wellentunneln
US7633635B2 (en) * 2006-08-07 2009-12-15 GII Acquisitions, LLC Method and system for automatically identifying non-labeled, manufactured parts
DE102007038785A1 (de) 2007-08-06 2009-02-19 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Bestimmen von Geometriedaten eines Messobjekts
US7633046B2 (en) * 2007-10-23 2009-12-15 Gii Acquisition Llc Method for estimating thread parameters of a part
US8643717B2 (en) * 2009-03-04 2014-02-04 Hand Held Products, Inc. System and method for measuring irregular objects with a single camera
US8892398B2 (en) * 2010-04-21 2014-11-18 Tesa Sa Optical measurement method and apparatus
JP6247050B2 (ja) * 2013-08-28 2017-12-13 Necプラットフォームズ株式会社 情報処理装置、及び、位置検出方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3856412A (en) * 1973-06-08 1974-12-24 Zygo Corp Optical noncontacting gauge
US4043673A (en) * 1975-04-09 1977-08-23 Autech Corporation Reticle calibrated diameter gauge
US4182259A (en) * 1978-10-04 1980-01-08 The Dow Chemical Company Apparatus for measuring coating thickness on an applicator roll
JPS5654307A (en) * 1979-10-09 1981-05-14 Inoue Japax Res Inc Measuring instrument for work precision
US4490617A (en) * 1979-11-26 1984-12-25 European Electronic Systems Limited Optical width measuring system using two cameras
US4394683A (en) * 1980-06-26 1983-07-19 Diffracto Ltd. New photodetector array based optical measurement systems
US4498778A (en) * 1981-03-30 1985-02-12 Technical Arts Corporation High speed scanning method and apparatus

Also Published As

Publication number Publication date
EP0216587A3 (en) 1989-03-01
DE3687029T2 (de) 1993-03-04
DE3687029D1 (de) 1992-12-03
EP0216587B1 (de) 1992-10-28
GB8522750D0 (en) 1985-10-16
EP0216587A2 (de) 1987-04-01
GB2180640A (en) 1987-04-01
US4747689A (en) 1988-05-31

Similar Documents

Publication Publication Date Title
ATE81907T1 (de) Optische messapparate.
ES547486A0 (es) Procedimiento y dispositivo de control sin contacto, de ob- jetos fabricados automaticamente a elevada velocidad
DE59006727D1 (de) Verfahren und anordnung zur optoelektronischen vermessung von gegenständen.
ATE88810T1 (de) Temperaturmessung.
JPS5616802A (en) Method and unit for measuring electro-optically dimension,position and form of object
NL191216B (nl) Inrichting voor het controleren van de maatnauwkeurigheid van een groot voorwerp.
JPS5759107A (en) Method and device for measuring plate thickness
ATE85115T1 (de) Optischer messapparat.
FR2487507B1 (fr) Appareil et procede de mesure par triangulation optique
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
ATE144043T1 (de) Elektrooptisches messgerät
NO892596D0 (no) Fremgangsmaate og anordning for dimensjonsmaaling.
FR2623899B1 (fr) Procede de mesure de diametres de fils ou de profils ou pieces circulaires par diffraction de rayons lumineux et dispositif pour la mise en oeuvre de ce procede
JPS5767815A (en) Measuring method for position of reflector using light
SE9303191L (sv) Mätanordning för dimensionsmätning av ett stort mätobjekt, t ex chassiet hos en bil
JPS57211506A (en) Non-contact type measuring device for shape of surface
ES406936A1 (es) Procedimiento y dispositivos para la medida de los defectosopticos de un cuerpo, en particular de vidrio plano.
JPS56132508A (en) Pattern measuring device
SU1548669A1 (ru) Оптический профилометр
SE7713947L (sv) Anordning for vinkelmetning
JPS649304A (en) Height measuring apparatus
JPS6418073A (en) Detecting apparatus for voltage
SE8404376D0 (sv) A measuring device for identification of the surface profile of an object
ATE64013T1 (de) Einrichtung zur beruehrungslosen geschwindigkeitsmessung.
FR2350580A1 (fr) Procede de mesure optique de distances, et dispositif de mesure optique en faisant application

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties