ATE82433T1 - THREE-DIMENSIONAL TRANSISTOR CELL ARRANGEMENT FOR DYNAMIC SEMICONDUCTOR MEMORIES WITH TRENCH CAPACITOR AND METHOD FOR MAKING THE BITLINE CONTACT. - Google Patents

THREE-DIMENSIONAL TRANSISTOR CELL ARRANGEMENT FOR DYNAMIC SEMICONDUCTOR MEMORIES WITH TRENCH CAPACITOR AND METHOD FOR MAKING THE BITLINE CONTACT.

Info

Publication number
ATE82433T1
ATE82433T1 AT87112417T AT87112417T ATE82433T1 AT E82433 T1 ATE82433 T1 AT E82433T1 AT 87112417 T AT87112417 T AT 87112417T AT 87112417 T AT87112417 T AT 87112417T AT E82433 T1 ATE82433 T1 AT E82433T1
Authority
AT
Austria
Prior art keywords
trench capacitor
making
bit line
self
gate electrode
Prior art date
Application number
AT87112417T
Other languages
German (de)
Inventor
Karl-Heinz Dr Kuesters
Wolfgang Dr Mueller
Gerd Dipl-Ing Enders
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of ATE82433T1 publication Critical patent/ATE82433T1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)

Abstract

In the arrangement, in which the capacitor for the charges to be stored is designed as a trench capacitor (9) in the substrate (1) and is arranged beneath the selection transistor with insulated gate electrode and connected in an electrically conducting manner to the source/drain zone (23) of the said transistor, the bit line contact (BL) for connection to the selection transistor is of self-aligning design on the drain region (23) situated in the semiconductor substrate (1) and overlaps the gate electrode (18) covered on all sides with insulating layers (19, 20) and also the adjacent field oxide region. The insulation layer situated beneath the bit line (BL) and above the gate level (18, 19) is a triple layer (29, 25, 26) composed of silicon oxide/silicon nitride/silicon oxide and brings about the self-aligning overlapping contact during the etching of vias (24) as a result of carrying out special etching steps. As a result of the positional inaccuracy due to the saving in lithography, the space requirement of a memory cell can be reduced by approximately 20%. The invention is used in the production of 4-megabit DRAMs. <IMAGE>
AT87112417T 1987-03-06 1987-08-26 THREE-DIMENSIONAL TRANSISTOR CELL ARRANGEMENT FOR DYNAMIC SEMICONDUCTOR MEMORIES WITH TRENCH CAPACITOR AND METHOD FOR MAKING THE BITLINE CONTACT. ATE82433T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3707241 1987-03-06
EP87112417A EP0282629B1 (en) 1987-03-06 1987-08-26 Three-dimensional 1-transistor cell structure with a trench capacitor for a dynamic semiconductor memory, and method for producing the bit line contact

Publications (1)

Publication Number Publication Date
ATE82433T1 true ATE82433T1 (en) 1992-11-15

Family

ID=6322436

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87112417T ATE82433T1 (en) 1987-03-06 1987-08-26 THREE-DIMENSIONAL TRANSISTOR CELL ARRANGEMENT FOR DYNAMIC SEMICONDUCTOR MEMORIES WITH TRENCH CAPACITOR AND METHOD FOR MAKING THE BITLINE CONTACT.

Country Status (7)

Country Link
US (1) US5025295A (en)
EP (1) EP0282629B1 (en)
JP (1) JP2681887B2 (en)
KR (1) KR930001221B1 (en)
AT (1) ATE82433T1 (en)
DE (1) DE3782647D1 (en)
HK (1) HK8995A (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247197A (en) * 1987-11-05 1993-09-21 Fujitsu Limited Dynamic random access memory device having improved contact hole structures
US5374576A (en) * 1988-12-21 1994-12-20 Hitachi, Ltd. Method of fabricating stacked capacitor cell memory devices
US20010008288A1 (en) * 1988-01-08 2001-07-19 Hitachi, Ltd. Semiconductor integrated circuit device having memory cells
US5180683A (en) * 1988-06-10 1993-01-19 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing stacked capacitor type semiconductor memory device
EP0455338A1 (en) * 1990-04-30 1991-11-06 STMicroelectronics, Inc. Dram cell structure
JP2551203B2 (en) * 1990-06-05 1996-11-06 三菱電機株式会社 Semiconductor device
KR930009131B1 (en) * 1991-04-24 1993-09-23 삼성전자 주식회사 Method of fabricating vlsi semiconductor memory device
US5192702A (en) * 1991-12-23 1993-03-09 Industrial Technology Research Institute Self-aligned cylindrical stacked capacitor DRAM cell
US5461005A (en) * 1991-12-27 1995-10-24 At&T Ipm Corp. Method of forming silicide in integrated circuit manufacture
US5880022A (en) * 1991-12-30 1999-03-09 Lucent Technologies Inc. Self-aligned contact window
US5627092A (en) * 1994-09-26 1997-05-06 Siemens Aktiengesellschaft Deep trench dram process on SOI for low leakage DRAM cell
KR0141950B1 (en) * 1994-12-22 1998-06-01 문정환 Manufacturing method of semiconductor device
US6207994B1 (en) 1996-11-05 2001-03-27 Power Integrations, Inc. High-voltage transistor with multi-layer conduction region
GB2324408A (en) * 1997-01-21 1998-10-21 United Microelectronics Corporation Forming DRAM cells
JPH11233451A (en) * 1997-10-07 1999-08-27 Texas Instr Inc <Ti> CVD-based process for producing stable, low-resistance poly-metal gate electrodes
TW396508B (en) * 1999-01-05 2000-07-01 Mosel Vitelic Inc A method for forming trench isolation
JP3972846B2 (en) * 2003-03-25 2007-09-05 セイコーエプソン株式会社 Manufacturing method of semiconductor device
CN102938378B (en) * 2011-08-16 2015-06-17 中芯国际集成电路制造(北京)有限公司 Manufacturing method for semiconductor device
CN108831884A (en) * 2018-06-08 2018-11-16 长鑫存储技术有限公司 Memory structure and its preparation method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4668973A (en) * 1978-06-19 1987-05-26 Rca Corporation Semiconductor device passivated with phosphosilicate glass over silicon nitride
US4403394A (en) * 1980-12-17 1983-09-13 International Business Machines Corporation Formation of bit lines for ram device
JPS58137245A (en) * 1982-02-10 1983-08-15 Hitachi Ltd Semiconductor memory and its manufacture
JPS5982761A (en) * 1982-11-04 1984-05-12 Hitachi Ltd semiconductor memory
JPS59175153A (en) * 1983-03-23 1984-10-03 Nec Corp Semiconductor integrated circuit
JPS60152058A (en) * 1984-01-20 1985-08-10 Toshiba Corp Semiconductor memory device
JPS60227461A (en) * 1984-04-19 1985-11-12 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device and manufacture thereof
US4710897A (en) * 1984-04-27 1987-12-01 Kabushiki Kaisha Toshiba Semiconductor memory device comprising six-transistor memory cells
US4658283A (en) * 1984-07-25 1987-04-14 Hitachi, Ltd. Semiconductor integrated circuit device having a carrier trapping trench arrangement
JPS6154661A (en) * 1984-08-24 1986-03-18 Toshiba Corp Manufacture of semiconductor device
JPS61144863A (en) * 1984-12-19 1986-07-02 Hitachi Ltd Semiconductor storage device and its manufacturing method
JPS61183952A (en) * 1985-02-09 1986-08-16 Fujitsu Ltd Semiconductor memory device and manufacture thereof
US4649625A (en) * 1985-10-21 1987-03-17 International Business Machines Corporation Dynamic memory device having a single-crystal transistor on a trench capacitor structure and a fabrication method therefor
JPS62136069A (en) * 1985-12-10 1987-06-19 Hitachi Ltd Semiconductor device and its manufacturing method
EP0236089B1 (en) * 1986-03-03 1992-08-05 Fujitsu Limited Dynamic random access memory having trench capacitor
JPS63207171A (en) * 1987-02-24 1988-08-26 Nippon Telegr & Teleph Corp <Ntt> Semiconductor memory and manufacture thereof

Also Published As

Publication number Publication date
EP0282629B1 (en) 1992-11-11
KR930001221B1 (en) 1993-02-22
JPS63228742A (en) 1988-09-22
JP2681887B2 (en) 1997-11-26
KR880011926A (en) 1988-10-31
DE3782647D1 (en) 1992-12-17
EP0282629A1 (en) 1988-09-21
US5025295A (en) 1991-06-18
HK8995A (en) 1995-01-27

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