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Priority claimed from JP60159192Aexternal-prioritypatent/JPS6218787A/ja
Priority claimed from JP60253324Aexternal-prioritypatent/JPH0634436B2/ja
Application filed by Ibiden Co LtdfiledCriticalIbiden Co Ltd
Priority claimed from PCT/JP1986/000356external-prioritypatent/WO1987000486A1/ja
Application grantedgrantedCritical
Publication of ATE95468T1publicationCriticalpatent/ATE95468T1/de