ATE96235T1 - Filmherstellungverfahren und einstellvorrichtung dazu. - Google Patents

Filmherstellungverfahren und einstellvorrichtung dazu.

Info

Publication number
ATE96235T1
ATE96235T1 AT88304851T AT88304851T ATE96235T1 AT E96235 T1 ATE96235 T1 AT E96235T1 AT 88304851 T AT88304851 T AT 88304851T AT 88304851 T AT88304851 T AT 88304851T AT E96235 T1 ATE96235 T1 AT E96235T1
Authority
AT
Austria
Prior art keywords
adjustment device
making process
film making
film
adjustment
Prior art date
Application number
AT88304851T
Other languages
English (en)
Inventor
Toshio Kaya
Makoto Fujimoto
Hiroaki Nakagawa
Original Assignee
Mitsui Petrochemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP13435887A external-priority patent/JP2673987B2/ja
Priority claimed from JP13435787A external-priority patent/JPH0812418B2/ja
Application filed by Mitsui Petrochemical Ind filed Critical Mitsui Petrochemical Ind
Priority claimed from EP88304851A external-priority patent/EP0293239B1/de
Application granted granted Critical
Publication of ATE96235T1 publication Critical patent/ATE96235T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
AT88304851T 1987-05-28 1988-05-27 Filmherstellungverfahren und einstellvorrichtung dazu. ATE96235T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13435887A JP2673987B2 (ja) 1987-05-28 1987-05-28 膜の引剥し方法
JP13435787A JPH0812418B2 (ja) 1987-05-28 1987-05-28 ペリクルの製造方法
EP88304851A EP0293239B1 (de) 1987-05-28 1988-05-27 Filmherstellungverfahren und Einstellvorrichtung dazu

Publications (1)

Publication Number Publication Date
ATE96235T1 true ATE96235T1 (de) 1993-11-15

Family

ID=27231591

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88304851T ATE96235T1 (de) 1987-05-28 1988-05-27 Filmherstellungverfahren und einstellvorrichtung dazu.

Country Status (1)

Country Link
AT (1) ATE96235T1 (de)

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties