ATE96870T1 - PROCESS FOR MANUFACTURING CHAMBERS. - Google Patents

PROCESS FOR MANUFACTURING CHAMBERS.

Info

Publication number
ATE96870T1
ATE96870T1 AT90112287T AT90112287T ATE96870T1 AT E96870 T1 ATE96870 T1 AT E96870T1 AT 90112287 T AT90112287 T AT 90112287T AT 90112287 T AT90112287 T AT 90112287T AT E96870 T1 ATE96870 T1 AT E96870T1
Authority
AT
Austria
Prior art keywords
manufacturing chambers
chambers
manufacturing
Prior art date
Application number
AT90112287T
Other languages
German (de)
Inventor
Gerhard Enssle
Original Assignee
Gerhard Enssle
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE3921394A external-priority patent/DE3921394A1/en
Priority claimed from DE19904011736 external-priority patent/DE4011736A1/en
Application filed by Gerhard Enssle filed Critical Gerhard Enssle
Priority claimed from EP90112287A external-priority patent/EP0405520B1/en
Application granted granted Critical
Publication of ATE96870T1 publication Critical patent/ATE96870T1/en

Links

AT90112287T 1989-06-29 1990-06-27 PROCESS FOR MANUFACTURING CHAMBERS. ATE96870T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3921394A DE3921394A1 (en) 1989-06-29 1989-06-29 Shaft construction system
DE19904011736 DE4011736A1 (en) 1990-04-11 1990-04-11 Shaft construction system
EP90112287A EP0405520B1 (en) 1989-06-29 1990-06-27 Method of making shafts

Publications (1)

Publication Number Publication Date
ATE96870T1 true ATE96870T1 (en) 1993-11-15

Family

ID=27199817

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90112287T ATE96870T1 (en) 1989-06-29 1990-06-27 PROCESS FOR MANUFACTURING CHAMBERS.

Country Status (1)

Country Link
AT (1) ATE96870T1 (en)

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee