ATE99277T1 - Verfahren zum abscheiden eines keramischen ueberzuges aus einem metallnitrid oder carbonitrid aus der dampfphase bei niedriger temperatur. - Google Patents

Verfahren zum abscheiden eines keramischen ueberzuges aus einem metallnitrid oder carbonitrid aus der dampfphase bei niedriger temperatur.

Info

Publication number
ATE99277T1
ATE99277T1 AT90400375T AT90400375T ATE99277T1 AT E99277 T1 ATE99277 T1 AT E99277T1 AT 90400375 T AT90400375 T AT 90400375T AT 90400375 T AT90400375 T AT 90400375T AT E99277 T1 ATE99277 T1 AT E99277T1
Authority
AT
Austria
Prior art keywords
depositioning
carbonitride
low temperature
vapor phase
metal nitride
Prior art date
Application number
AT90400375T
Other languages
English (en)
Inventor
Jean-Francois Nowak
Frederic Schuster
Francis Maury
Roland Morancho
Original Assignee
Nitruvid
Fortech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitruvid, Fortech filed Critical Nitruvid
Application granted granted Critical
Publication of ATE99277T1 publication Critical patent/ATE99277T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemically Coating (AREA)
AT90400375T 1989-02-16 1990-02-12 Verfahren zum abscheiden eines keramischen ueberzuges aus einem metallnitrid oder carbonitrid aus der dampfphase bei niedriger temperatur. ATE99277T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8902045A FR2643071B1 (fr) 1989-02-16 1989-02-16 Procede de depot en phase vapeur a basse temperature d'un revetement ceramique du type nitrure ou carbonitrure metallique
EP90400375A EP0383665B1 (de) 1989-02-16 1990-02-12 Verfahren zum Abscheiden eines keramischen Überzuges aus einem Metallnitrid oder -carbonitrid aus der Dampfphase bei niedriger Temperatur

Publications (1)

Publication Number Publication Date
ATE99277T1 true ATE99277T1 (de) 1994-01-15

Family

ID=9378848

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90400375T ATE99277T1 (de) 1989-02-16 1990-02-12 Verfahren zum abscheiden eines keramischen ueberzuges aus einem metallnitrid oder carbonitrid aus der dampfphase bei niedriger temperatur.

Country Status (10)

Country Link
US (1) US5077091A (de)
EP (1) EP0383665B1 (de)
JP (1) JPH02298271A (de)
AT (1) ATE99277T1 (de)
CA (1) CA2010120A1 (de)
DE (1) DE69005473T2 (de)
FI (1) FI93555C (de)
FR (1) FR2643071B1 (de)
IL (1) IL93377A (de)
ZA (1) ZA901152B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4239234A1 (de) * 1992-11-21 1994-06-09 Krupp Widia Gmbh Werkzeug und Verfahren zur Beschichtung eines Werkzeuggrundkörpers
US5449547A (en) * 1993-03-15 1995-09-12 Teikoku Piston Ring Co., Ltd. Hard coating material, sliding member coated with hard coating material and method for manufacturing sliding member
US5393647A (en) * 1993-07-16 1995-02-28 Armand P. Neukermans Method of making superhard tips for micro-probe microscopy and field emission
WO1999031289A1 (fr) * 1997-12-16 1999-06-24 Taiho Kogyo Co., Ltd. Element a glissement pourvu d'un film de nitrure chromique
DE10080457T1 (de) * 1999-02-12 2001-04-26 Gelest Inc CVD-Abscheidung von Wolframnitrid
JP2005041720A (ja) * 2003-07-24 2005-02-17 Noritake Co Ltd セラミック多孔質膜及びその製造方法
US20050255329A1 (en) * 2004-05-12 2005-11-17 General Electric Company Superalloy article having corrosion resistant coating thereon
JP4591917B2 (ja) * 2004-09-30 2010-12-01 株式会社トリケミカル研究所 導電性モリブデンナイトライド膜形成方法
JP4592373B2 (ja) * 2004-09-30 2010-12-01 株式会社トリケミカル研究所 導電性モリブデンナイトライドゲート電極膜の形成方法
US7556840B2 (en) * 2006-06-30 2009-07-07 Caterpillar Inc. Coating using metal organic chemical vapor deposition
FR3045673B1 (fr) * 2015-12-18 2020-02-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de depot d'un revetement par dli-mocvd avec recyclage du compose precurseur
CN105837642B (zh) * 2016-02-24 2018-07-27 昆明学院 一种多酸席夫碱化合物及其合成方法与应用
EP3519605B1 (de) 2016-09-28 2020-08-05 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Nukleare komponente mit amorpher crc-beschichtung, verfahren zur herstellung davon mittels dli-mocvd und verwendung davon zur kontrolle von oxidation/hydridation
WO2018060644A1 (fr) 2016-09-28 2018-04-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composant nucléaire composite, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
KR102727616B1 (ko) 2016-10-07 2024-11-07 삼성전자주식회사 유기 금속 전구체, 이를 이용한 막 형성 방법 및 이를 이용한 반도체 장치의 제조 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617988A (en) * 1979-07-24 1981-02-20 Toshio Hirai Electroconductive si3n44c type noncrystalline material by chemical gas phase deposition and its manufacture
US4321073A (en) * 1980-10-15 1982-03-23 Hughes Aircraft Company Method and apparatus for forming metal coating on glass fiber
FR2527226B1 (fr) * 1982-05-19 1986-02-21 Creusot Loire Procede de revetement en phase gazeuse de petits orifices menages dans des pieces en aciers
US4605566A (en) * 1983-08-22 1986-08-12 Nec Corporation Method for forming thin films by absorption

Also Published As

Publication number Publication date
FI900757A0 (fi) 1990-02-15
FR2643071B1 (fr) 1993-05-07
IL93377A (en) 1994-02-27
FI93555B (fi) 1995-01-13
EP0383665B1 (de) 1993-12-29
IL93377A0 (en) 1990-11-29
DE69005473T2 (de) 1994-04-21
EP0383665A1 (de) 1990-08-22
FI93555C (fi) 1995-04-25
ZA901152B (en) 1991-10-30
US5077091A (en) 1991-12-31
DE69005473D1 (de) 1994-02-10
CA2010120A1 (en) 1990-08-16
JPH02298271A (ja) 1990-12-10
FR2643071A1 (fr) 1990-08-17

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