AU736239B2 - Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator - Google Patents
Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator Download PDFInfo
- Publication number
- AU736239B2 AU736239B2 AU95026/98A AU9502698A AU736239B2 AU 736239 B2 AU736239 B2 AU 736239B2 AU 95026/98 A AU95026/98 A AU 95026/98A AU 9502698 A AU9502698 A AU 9502698A AU 736239 B2 AU736239 B2 AU 736239B2
- Authority
- AU
- Australia
- Prior art keywords
- plasma
- matter
- plasma cloud
- energy
- cloud
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000034 method Methods 0.000 title claims description 31
- 230000005672 electromagnetic field Effects 0.000 title claims description 11
- 239000002245 particle Substances 0.000 claims description 50
- 230000000694 effects Effects 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 10
- 238000013461 design Methods 0.000 claims description 7
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 238000012546 transfer Methods 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims 1
- ZFXYFBGIUFBOJW-UHFFFAOYSA-N theophylline Chemical compound O=C1N(C)C(=O)N(C)C2=C1NC=N2 ZFXYFBGIUFBOJW-UHFFFAOYSA-N 0.000 claims 1
- 239000000523 sample Substances 0.000 description 24
- 238000005520 cutting process Methods 0.000 description 22
- 230000005670 electromagnetic radiation Effects 0.000 description 10
- 230000005574 cross-species transmission Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- 230000005658 nuclear physics Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000003518 caustics Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000010399 physical interaction Effects 0.000 description 2
- 230000002459 sustained effect Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
- A61B18/042—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating using additional gas becoming plasma
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
- A61B18/12—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating by passing a current through the tissue to be heated, e.g. high-frequency current
- A61B18/1206—Generators therefor
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B2018/00636—Sensing and controlling the application of energy
- A61B2018/0066—Sensing and controlling the application of energy without feedback, i.e. open loop control
Landscapes
- Health & Medical Sciences (AREA)
- Surgery (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Plasma & Fusion (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Physics & Mathematics (AREA)
- Otolaryngology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Surgical Instruments (AREA)
- Plasma Technology (AREA)
- Arc Welding In General (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/957,786 US5958266A (en) | 1997-10-24 | 1997-10-24 | Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
| US08/957786 | 1997-10-24 | ||
| US09/112471 | 1998-07-09 | ||
| US09/112,471 US6479785B1 (en) | 1998-07-09 | 1998-07-09 | Device for plasma incision of mater with a specifically tuned radiofrequencty electromagnetic field generator |
| PCT/US1998/019843 WO1999021495A1 (fr) | 1997-10-24 | 1998-09-24 | Technique d'incision au plasma d'un materiau a l'aide d'un generateur de champ electromagnetique a frequences radioelectriques accordees de maniere specifique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU9502698A AU9502698A (en) | 1999-05-17 |
| AU736239B2 true AU736239B2 (en) | 2001-07-26 |
Family
ID=26809987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU95026/98A Ceased AU736239B2 (en) | 1997-10-24 | 1998-09-24 | Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
Country Status (14)
| Country | Link |
|---|---|
| EP (1) | EP1028662A4 (fr) |
| JP (1) | JP2001520939A (fr) |
| KR (1) | KR100543054B1 (fr) |
| CN (1) | CN1176636C (fr) |
| AP (2) | AP1248A (fr) |
| AU (1) | AU736239B2 (fr) |
| BR (1) | BR9813268A (fr) |
| CA (1) | CA2307213A1 (fr) |
| EA (1) | EA002935B1 (fr) |
| IL (1) | IL135791A0 (fr) |
| NO (2) | NO20002073L (fr) |
| NZ (2) | NZ504364A (fr) |
| OA (1) | OA11614A (fr) |
| WO (2) | WO1999021495A1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6479785B1 (en) * | 1998-07-09 | 2002-11-12 | Richard J. Fugo | Device for plasma incision of mater with a specifically tuned radiofrequencty electromagnetic field generator |
| JP4834815B2 (ja) * | 2005-03-23 | 2011-12-14 | 国立大学法人愛媛大学 | 医療用治療装置 |
| CN106597519B (zh) * | 2016-11-29 | 2018-10-09 | 华中科技大学 | 一种j-text托卡马克装置杂质粒子浓度测量系统 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4461688A (en) * | 1980-06-23 | 1984-07-24 | Vac-Tec Systems, Inc. | Magnetically enhanced sputtering device having a plurality of magnetic field sources including improved plasma trapping device and method |
| US5591301A (en) * | 1994-12-22 | 1997-01-07 | Siemens Aktiengesellschaft | Plasma etching method |
| US5669975A (en) * | 1996-03-27 | 1997-09-23 | Sony Corporation | Plasma producing method and apparatus including an inductively-coupled plasma source |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3903891A (en) * | 1968-01-12 | 1975-09-09 | Hogle Kearns Int | Method and apparatus for generating plasma |
| BE758571A (fr) * | 1969-11-06 | 1971-04-16 | Euratom | Generateur de plasma a haute frequence |
| US3987795A (en) * | 1974-08-28 | 1976-10-26 | Valleylab, Inc. | Electrosurgical devices having sesquipolar electrode structures incorporated therein |
| DE3024338A1 (de) * | 1980-06-27 | 1982-01-21 | NPK za Kontrolno-Zavaračni Raboti, Sofija | Verfahren und vorrichtung fuer das schneiden von nichtmetallischen stoffen mittels plasma-bogens |
| US4534347A (en) | 1983-04-08 | 1985-08-13 | Research Corporation | Microwave coagulating scalpel |
| DE3815835A1 (de) * | 1988-05-09 | 1989-11-23 | Flachenecker Gerhard | Hochfrequenzgenerator zum gewebeschneiden und koagulieren in der hochfrequenzchirurgie |
| US5217457A (en) * | 1990-03-15 | 1993-06-08 | Valleylab Inc. | Enhanced electrosurgical apparatus |
| US5047649A (en) * | 1990-10-09 | 1991-09-10 | International Business Machines Corporation | Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
| US5518597A (en) * | 1995-03-28 | 1996-05-21 | Minnesota Mining And Manufacturing Company | Cathodic arc coating apparatus and method |
| JP3069271B2 (ja) * | 1995-07-12 | 2000-07-24 | 勇藏 森 | 回転電極を用いた高密度ラジカル反応による高能率加工方法及びその装置 |
-
1998
- 1998-09-24 AP APAP/P/2000/001810A patent/AP1248A/en active
- 1998-09-24 BR BR9813268-7A patent/BR9813268A/pt not_active Application Discontinuation
- 1998-09-24 IL IL13579198A patent/IL135791A0/xx unknown
- 1998-09-24 CN CNB988105012A patent/CN1176636C/zh not_active Expired - Fee Related
- 1998-09-24 NZ NZ504364A patent/NZ504364A/xx unknown
- 1998-09-24 KR KR1020007004440A patent/KR100543054B1/ko not_active Expired - Fee Related
- 1998-09-24 EP EP98948457A patent/EP1028662A4/fr not_active Ceased
- 1998-09-24 OA OA1200000113A patent/OA11614A/en unknown
- 1998-09-24 CA CA002307213A patent/CA2307213A1/fr not_active Abandoned
- 1998-09-24 WO PCT/US1998/019843 patent/WO1999021495A1/fr not_active Ceased
- 1998-09-24 JP JP2000517662A patent/JP2001520939A/ja active Pending
- 1998-09-24 AU AU95026/98A patent/AU736239B2/en not_active Ceased
- 1998-09-24 EA EA200000458A patent/EA002935B1/ru not_active IP Right Cessation
- 1998-10-02 NZ NZ509421A patent/NZ509421A/en unknown
- 1998-10-02 WO PCT/US1998/021033 patent/WO1999021496A1/fr not_active Ceased
-
1999
- 1999-10-02 AP APAP/P/2001/002064A patent/AP1357A/en active
-
2000
- 2000-04-19 NO NO20002073A patent/NO20002073L/no not_active Application Discontinuation
-
2001
- 2001-01-08 NO NO20010130A patent/NO20010130D0/no not_active Application Discontinuation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4461688A (en) * | 1980-06-23 | 1984-07-24 | Vac-Tec Systems, Inc. | Magnetically enhanced sputtering device having a plurality of magnetic field sources including improved plasma trapping device and method |
| US5591301A (en) * | 1994-12-22 | 1997-01-07 | Siemens Aktiengesellschaft | Plasma etching method |
| US5669975A (en) * | 1996-03-27 | 1997-09-23 | Sony Corporation | Plasma producing method and apparatus including an inductively-coupled plasma source |
Also Published As
| Publication number | Publication date |
|---|---|
| IL135791A0 (en) | 2001-05-20 |
| EP1028662A1 (fr) | 2000-08-23 |
| AP1248A (en) | 2004-02-21 |
| JP2001520939A (ja) | 2001-11-06 |
| WO1999021495A1 (fr) | 1999-05-06 |
| NZ509421A (en) | 2003-05-30 |
| CN1176636C (zh) | 2004-11-24 |
| NO20002073D0 (no) | 2000-04-19 |
| EA002935B1 (ru) | 2002-10-31 |
| OA11614A (en) | 2004-09-10 |
| AP1357A (en) | 2004-12-03 |
| BR9813268A (pt) | 2000-08-22 |
| AU9502698A (en) | 1999-05-17 |
| NO20002073L (no) | 2000-06-19 |
| CN1277546A (zh) | 2000-12-20 |
| KR20010024563A (ko) | 2001-03-26 |
| NO20010130D0 (no) | 2001-01-08 |
| WO1999021496A1 (fr) | 1999-05-06 |
| CA2307213A1 (fr) | 1999-05-06 |
| EA200000458A1 (ru) | 2001-04-23 |
| KR100543054B1 (ko) | 2006-01-20 |
| AP2000001810A0 (en) | 2000-06-30 |
| EP1028662A4 (fr) | 2006-11-08 |
| NZ504364A (en) | 2002-11-26 |
| AP2001002064A0 (en) | 2001-03-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FGA | Letters patent sealed or granted (standard patent) |