H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by sputtering
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Engineering & Computer Science
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Manufacturing & Machinery
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Microelectronics & Electronic Packaging
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Apparatuses And Processes For Manufacturing Resistors
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Dispositif de denudage de la surface d'un element en materiau conducteur de l'electricite recouvert d'un element protecteur ou isolant tel qu'une pellicule, gaine ou analogue.