BE725683A - - Google Patents

Info

Publication number
BE725683A
BE725683A BE725683DA BE725683A BE 725683 A BE725683 A BE 725683A BE 725683D A BE725683D A BE 725683DA BE 725683 A BE725683 A BE 725683A
Authority
BE
Belgium
Prior art keywords
gas
chamber
electrodes
tube
speed
Prior art date
Application number
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE725683A publication Critical patent/BE725683A/fr

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/48Generating plasma using an arc
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
BE725683D 1968-12-18 1968-12-18 BE725683A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE725683 1968-12-18

Publications (1)

Publication Number Publication Date
BE725683A true BE725683A (de) 1969-05-29

Family

ID=3853991

Family Applications (1)

Application Number Title Priority Date Filing Date
BE725683D BE725683A (de) 1968-12-18 1968-12-18

Country Status (1)

Country Link
BE (1) BE725683A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0201034A3 (en) * 1985-04-30 1988-09-21 Nippon Telegraph And Telephone Corporation X-ray source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0201034A3 (en) * 1985-04-30 1988-09-21 Nippon Telegraph And Telephone Corporation X-ray source

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