BE758258A - Procede de depot d'aluminium - Google Patents

Procede de depot d'aluminium

Info

Publication number
BE758258A
BE758258A BE758258DA BE758258A BE 758258 A BE758258 A BE 758258A BE 758258D A BE758258D A BE 758258DA BE 758258 A BE758258 A BE 758258A
Authority
BE
Belgium
Prior art keywords
deposit process
aluminum deposit
aluminum
deposit
Prior art date
Application number
Other languages
English (en)
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE758258A publication Critical patent/BE758258A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemically Coating (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
BE758258D 1969-11-01 Procede de depot d'aluminium BE758258A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44087965A JPS4819057B1 (fr) 1969-11-01 1969-11-01

Publications (1)

Publication Number Publication Date
BE758258A true BE758258A (fr) 1971-04-01

Family

ID=13929553

Family Applications (1)

Application Number Title Priority Date Filing Date
BE758258D BE758258A (fr) 1969-11-01 Procede de depot d'aluminium

Country Status (8)

Country Link
US (1) US3753768A (fr)
JP (1) JPS4819057B1 (fr)
BE (1) BE758258A (fr)
CA (1) CA944634A (fr)
FR (1) FR2066672A5 (fr)
GB (1) GB1320383A (fr)
NL (1) NL143625B (fr)
SE (1) SE363356B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4433012A (en) * 1980-07-10 1984-02-21 Itt Industries, Inc. Process for the pyrolytic deposition of aluminum from TIBA
US4460618A (en) * 1978-05-25 1984-07-17 Itt Industries, Inc. Aluminum deposition on semiconductor bodies

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183781A (en) * 1978-09-25 1980-01-15 International Business Machines Corporation Stabilization process for aluminum microcircuits which have been reactive-ion etched
US4332879A (en) * 1978-12-01 1982-06-01 Hughes Aircraft Company Process for depositing a film of controlled composition using a metallo-organic photoresist
US5273775A (en) * 1990-09-12 1993-12-28 Air Products And Chemicals, Inc. Process for selectively depositing copper aluminum alloy onto a substrate
US7358674B2 (en) * 2004-07-27 2008-04-15 General Electric Company Structure having electrodes with metal core and coating
US7913644B2 (en) * 2005-09-30 2011-03-29 Lam Research Corporation Electroless deposition system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2443196A (en) * 1944-06-16 1948-06-15 Raines Arnold Process for making front-surface mirrors
US2643959A (en) * 1950-05-29 1953-06-30 Manufacturers Chemical Corp Process for the protective treatment of iron
US2887984A (en) * 1954-06-24 1959-05-26 Ohio Commw Eng Co Apparatus for gas plating continuous length of metal strip
US2880115A (en) * 1955-07-13 1959-03-31 Ohio Commw Eng Co Method of gas plating light metals
US2843506A (en) * 1955-07-13 1958-07-15 Ohio Commw Eng Co Process of gas plating an article with light metal
GB956990A (en) * 1960-10-29 1964-04-29 Sumitomo Chemical Co A method for manufacturing aluminum
US3535108A (en) * 1969-09-22 1970-10-20 Ethyl Corp Process for producing aluminum

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4460618A (en) * 1978-05-25 1984-07-17 Itt Industries, Inc. Aluminum deposition on semiconductor bodies
US4433012A (en) * 1980-07-10 1984-02-21 Itt Industries, Inc. Process for the pyrolytic deposition of aluminum from TIBA

Also Published As

Publication number Publication date
DE2053407B2 (de) 1974-10-03
SE363356B (fr) 1974-01-14
US3753768A (en) 1973-08-21
JPS4819057B1 (fr) 1973-06-11
NL7015888A (fr) 1971-05-04
NL143625B (nl) 1974-10-15
CA944634A (en) 1974-04-02
GB1320383A (en) 1973-06-13
DE2053407A1 (de) 1971-05-27
FR2066672A5 (fr) 1971-08-06

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