BE764314A - Appareil et procede de croissance cristalline verticale en phase liquide - Google Patents

Appareil et procede de croissance cristalline verticale en phase liquide

Info

Publication number: BE764314A
Authority: BE; Belgium
Prior art keywords: liquid phase; crystalline growth; vertical crystalline; vertical; growth
Prior art date: 1970-03-16

Application number

BE764314A

Other languages

English (en)

Inventor

A A Bergh

Original Assignee

Western Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-03-16

Filing date

1971-03-16

Publication date

1971-09-16

1971-03-16 Application filed by Western Electric Co filed Critical Western Electric Co

1971-09-16 Publication of BE764314A publication Critical patent/BE764314A/fr

Links

239000007791 liquid phase Substances 0.000 title 1

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/061—Tipping system, e.g. by rotation
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/08—Heating of the reaction chamber or the substrate
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
- C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

BE764314A 1970-03-16 1971-03-16 Appareil et procede de croissance cristalline verticale en phase liquide BE764314A (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US1992970A	1970-03-16	1970-03-16

Publications (1)

Publication Number	Publication Date
BE764314A true BE764314A (fr)	1971-09-16

Family

ID=21795814

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE764314A BE764314A (fr)	1970-03-16	1971-03-16	Appareil et procede de croissance cristalline verticale en phase liquide

Country Status (8)

Country	Link
US (1)	US3648654A (fr)
JP (1)	JPS528796B1 (fr)
BE (1)	BE764314A (fr)
DE (1)	DE2111946C3 (fr)
FR (1)	FR2084643A5 (fr)
GB (1)	GB1315298A (fr)
NL (1)	NL144496B (fr)
SE (1)	SE377054B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3036317A1 (de) *	1980-09-26	1982-05-19	Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt	Verfahren und vorrichtung zur fluessigphasenepitaxie
JPS58148426A (ja) *	1982-03-01	1983-09-03	Semiconductor Res Found	成長装置
JP2001160540A (ja) *	1999-09-22	2001-06-12	Canon Inc	半導体装置の製造方法、液相成長法及び液相成長装置、太陽電池
WO2007122865A1 (fr) *	2006-03-24	2007-11-01	Ngk Insulators, Ltd.	Procédé de fabrication d'un monocristal au nitrure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US1422545A (en) *	1920-06-01	1922-07-11	Ernest L Dayton	Coating apparatus
US3206322A (en) *	1960-10-31	1965-09-14	Morgan John Robert	Vacuum deposition means and methods for manufacture of electronic components
BE624740A (fr) *	1961-11-15
DE1287047B (de) *	1965-02-18	1969-01-16	Siemens Ag	Verfahren und Vorrichtung zum Abscheiden einer einkristallinen Halbleiterschicht
US3491720A (en) *	1965-07-29	1970-01-27	Monsanto Co	Epitaxial deposition reactor
US3382843A (en) *	1965-10-23	1968-05-14	Optical Coating Laboratory Inc	Vacuum coating apparatus utilizing rotating sources
US3524426A (en) *	1968-02-29	1970-08-18	Libbey Owens Ford Glass Co	Apparatus for coating by thermal evaporation
US3551219A (en) *	1968-05-09	1970-12-29	Bell Telephone Labor Inc	Epitaxial growth technique
US3560276A (en) *	1968-12-23	1971-02-02	Bell Telephone Labor Inc	Technique for fabrication of multilayered semiconductor structure
US3565702A (en) *	1969-02-14	1971-02-23	Rca Corp	Depositing successive epitaxial semiconductive layers from the liquid phase

1970
- 1970-03-16 US US19929A patent/US3648654A/en not_active Expired - Lifetime
1971
- 1971-03-05 SE SE7102846A patent/SE377054B/xx unknown
- 1971-03-12 DE DE2111946A patent/DE2111946C3/de not_active Expired
- 1971-03-15 FR FR7109005A patent/FR2084643A5/fr not_active Expired
- 1971-03-15 NL NL717103418A patent/NL144496B/xx not_active IP Right Cessation
- 1971-03-16 BE BE764314A patent/BE764314A/fr not_active IP Right Cessation
- 1971-03-16 JP JP46014124A patent/JPS528796B1/ja active Pending
- 1971-04-19 GB GB2403371*A patent/GB1315298A/en not_active Expired

Also Published As

Publication number	Publication date
FR2084643A5 (fr)	1971-12-17
DE2111946C3 (de)	1974-03-07
SE377054B (fr)	1975-06-23
GB1315298A (en)	1973-05-02
DE2111946B2 (de)	1973-08-02
DE2111946A1 (de)	1971-09-30
JPS528796B1 (fr)	1977-03-11
NL144496B (nl)	1975-01-15
US3648654A (en)	1972-03-14
NL7103418A (fr)	1971-09-20

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Legal Events

Date

Code

Title

Description

1984-09-30

RE

Patent lapsed

Owner name: WESTERN ELECTRIC CY INC.

Effective date: 19840316