BE774194A - Production de silicium elementaire - Google Patents

Production de silicium elementaire

Info

Publication number
BE774194A
BE774194A BE774194A BE774194A BE774194A BE 774194 A BE774194 A BE 774194A BE 774194 A BE774194 A BE 774194A BE 774194 A BE774194 A BE 774194A BE 774194 A BE774194 A BE 774194A
Authority
BE
Belgium
Prior art keywords
silicon production
elementary silicon
elementary
production
silicon
Prior art date
Application number
BE774194A
Other languages
English (en)
Inventor
H B Bradley
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of BE774194A publication Critical patent/BE774194A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Silicon Compounds (AREA)
BE774194A 1970-10-21 1971-10-20 Production de silicium elementaire BE774194A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8277670A 1970-10-21 1970-10-21

Publications (1)

Publication Number Publication Date
BE774194A true BE774194A (fr) 1972-04-20

Family

ID=22173394

Family Applications (1)

Application Number Title Priority Date Filing Date
BE774194A BE774194A (fr) 1970-10-21 1971-10-20 Production de silicium elementaire

Country Status (6)

Country Link
BE (1) BE774194A (fr)
BR (1) BR7106999D0 (fr)
CA (1) CA957828A (fr)
DE (1) DE2152313A1 (fr)
FR (1) FR2111630A5 (fr)
NL (1) NL7114431A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101410A (ja) * 1984-10-24 1986-05-20 Hiroshi Ishizuka 多結晶珪素の製造法及びそのための装置
US6726955B1 (en) 2000-06-27 2004-04-27 Applied Materials, Inc. Method of controlling the crystal structure of polycrystalline silicon
JP5604803B2 (ja) * 2008-03-28 2014-10-15 三菱マテリアル株式会社 多結晶シリコン製造装置におけるポリマー不活性化方法
FR3136500B1 (fr) 2022-06-08 2024-06-14 Somfy Activites Sa Actionneur électromécanique et dispositif d’occultation comprenant un tel actionneur

Also Published As

Publication number Publication date
BR7106999D0 (pt) 1973-04-10
DE2152313A1 (de) 1972-04-27
FR2111630A5 (en) 1972-06-02
NL7114431A (fr) 1972-04-25
CA957828A (en) 1974-11-19

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