BE777203A - Procede et appareil de preparation de films d'oxyde de fer pourla fabrication de masques photosensibles - Google Patents

Procede et appareil de preparation de films d'oxyde de fer pourla fabrication de masques photosensibles

Info

Publication number: BE777203A
Authority: BE; Belgium
Prior art keywords: manufacture; iron oxide; oxide films; preparing iron; masks
Prior art date: 1970-12-28

Application number

BE777203A

Other languages

English (en)

French (fr)

Inventor

F G Peters

W R Sinclairet M V Sullivan

Original Assignee

Western Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-12-28

Filing date

1971-12-23

Publication date

1972-04-17

1971-12-23 Application filed by Western Electric Co filed Critical Western Electric Co

1972-04-17 Publication of BE777203A publication Critical patent/BE777203A/xx

Links

UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 title 2
238000004519 manufacturing process Methods 0.000 title 1
238000000034 method Methods 0.000 title 1

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/085—Oxides of iron group metals
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Physical Vapour Deposition (AREA)
Credit Cards Or The Like (AREA)
Preparing Plates And Mask In Photomechanical Process (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Compounds Of Iron (AREA)

BE777203A 1970-12-28 1971-12-23 Procede et appareil de preparation de films d'oxyde de fer pourla fabrication de masques photosensibles BE777203A (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US10147870A	1970-12-28	1970-12-28

Publications (1)

Publication Number	Publication Date
BE777203A true BE777203A (fr)	1972-04-17

Family

ID=22284863

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE777203A BE777203A (fr)	1970-12-28	1971-12-23	Procede et appareil de preparation de films d'oxyde de fer pourla fabrication de masques photosensibles

Country Status (13)

Country	Link
US (1)	US3669863A (2)
JP (1)	JPS5128080B1 (2)
KR (1)	KR780000519B1 (2)
BE (1)	BE777203A (2)
CA (1)	CA937199A (2)
CH (1)	CH585603A5 (2)
DE (1)	DE2163077C3 (2)
FR (1)	FR2120025B1 (2)
GB (1)	GB1373416A (2)
HK (1)	HK35076A (2)
IT (1)	IT945644B (2)
NL (1)	NL170025C (2)
SE (1)	SE370727B (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4096026A (en) *	1976-07-27	1978-06-20	Toppan Printing Co., Ltd.	Method of manufacturing a chromium oxide film
US5942090A (en) *	1996-04-12	1999-08-24	Asahi Glass Company Ltd.	Methods of producing a laminate
US10964590B2 (en) *	2017-11-15	2021-03-30	Taiwan Semiconductor Manufacturing Co., Ltd.	Contact metallization process

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1104935A (en) *	1964-05-08	1968-03-06	Standard Telephones Cables Ltd	Improvements in or relating to a method of forming a layer of an inorganic compound
US3461054A (en) *	1966-03-24	1969-08-12	Bell Telephone Labor Inc	Cathodic sputtering from a cathodically biased target electrode having an rf potential superimposed on the cathodic bias

1970
- 1970-12-28 US US101478A patent/US3669863A/en not_active Expired - Lifetime
1971
- 1971-07-30 CA CA119541A patent/CA937199A/en not_active Expired
- 1971-12-15 SE SE7116061A patent/SE370727B/xx unknown
- 1971-12-18 DE DE2163077A patent/DE2163077C3/de not_active Expired
- 1971-12-23 BE BE777203A patent/BE777203A/xx not_active IP Right Cessation
- 1971-12-23 GB GB5990371A patent/GB1373416A/en not_active Expired
- 1971-12-24 IT IT54995/71A patent/IT945644B/it active
- 1971-12-27 NL NLAANVRAGE7117890,A patent/NL170025C/xx not_active IP Right Cessation
- 1971-12-27 KR KR7101869A patent/KR780000519B1/ko not_active Expired
- 1971-12-27 CH CH1898871A patent/CH585603A5/xx not_active IP Right Cessation
- 1971-12-27 FR FR7146745A patent/FR2120025B1/fr not_active Expired
- 1971-12-28 JP JP47003650A patent/JPS5128080B1/ja active Pending
1976
- 1976-06-10 HK HK350/76*UA patent/HK35076A/xx unknown

Also Published As

Publication number	Publication date
DE2163077B2 (de)	1974-07-25
HK35076A (en)	1976-06-18
JPS5128080B1 (2)	1976-08-17
DE2163077A1 (de)	1972-07-13
NL7117890A (2)	1972-06-30
SE370727B (2)	1974-10-28
IT945644B (it)	1973-05-10
FR2120025A1 (2)	1972-08-11
GB1373416A (en)	1974-11-13
KR780000519B1 (en)	1978-10-26
NL170025B (nl)	1982-04-16
CH585603A5 (2)	1977-03-15
CA937199A (en)	1973-11-20
FR2120025B1 (2)	1974-06-07
DE2163077C3 (de)	1975-03-06
US3669863A (en)	1972-06-13
NL170025C (nl)	1982-09-16

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Legal Events

Date

Code

Title

Description

1985-06-30

RE

Patent lapsed

Owner name: WESTERN ELECTRIC CY INC.

Effective date: 19841223