BE779528A - Appareillage de precipitation de minces couches multiples sous vide - Google Patents

Appareillage de precipitation de minces couches multiples sous vide

Info

Publication number
BE779528A
BE779528A BE779528A BE779528A BE779528A BE 779528 A BE779528 A BE 779528A BE 779528 A BE779528 A BE 779528A BE 779528 A BE779528 A BE 779528A BE 779528 A BE779528 A BE 779528A
Authority
BE
Belgium
Prior art keywords
layer thin
precipitation apparatus
thin vacuum
vacuum precipitation
layer
Prior art date
Application number
BE779528A
Other languages
English (en)
Inventor
G.M.B.H. + Co. Kg. Leybold-Heraeus
Original Assignee
Leybold Heraeus Verwaltung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung filed Critical Leybold Heraeus Verwaltung
Publication of BE779528A publication Critical patent/BE779528A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE779528A 1971-04-08 1972-02-18 Appareillage de precipitation de minces couches multiples sous vide BE779528A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712117421 DE2117421A1 (de) 1971-04-08 1971-04-08 Anlage fur das Niederschlagen von dünnen Mehrfachschichten im Vakuum

Publications (1)

Publication Number Publication Date
BE779528A true BE779528A (fr) 1972-06-16

Family

ID=5804346

Family Applications (1)

Application Number Title Priority Date Filing Date
BE779528A BE779528A (fr) 1971-04-08 1972-02-18 Appareillage de precipitation de minces couches multiples sous vide

Country Status (4)

Country Link
BE (1) BE779528A (fr)
DE (1) DE2117421A1 (fr)
FR (1) FR2132642B1 (fr)
GB (1) GB1323658A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4166018A (en) * 1974-01-31 1979-08-28 Airco, Inc. Sputtering process and apparatus

Also Published As

Publication number Publication date
GB1323658A (en) 1973-07-18
FR2132642B1 (fr) 1975-04-25
FR2132642A1 (fr) 1972-11-24
DE2117421A1 (de) 1972-10-12

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