BE788661A - Dispositif d'attaque d'une matiere par un gaz dans un champ electromagnetique - Google Patents

Dispositif d'attaque d'une matiere par un gaz dans un champ electromagnetique

Info

Publication number
BE788661A
BE788661A BE788661DA BE788661A BE 788661 A BE788661 A BE 788661A BE 788661D A BE788661D A BE 788661DA BE 788661 A BE788661 A BE 788661A
Authority
BE
Belgium
Prior art keywords
attacking
gas
electromagnetic field
electromagnetic
field
Prior art date
Application number
Other languages
English (en)
Inventor
A Jacob
Original Assignee
Lefe Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE788661A publication Critical patent/BE788661A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
BE788661D 1971-10-05 Dispositif d'attaque d'une matiere par un gaz dans un champ electromagnetique BE788661A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18673971A 1971-10-05 1971-10-05

Publications (1)

Publication Number Publication Date
BE788661A true BE788661A (fr) 1973-03-12

Family

ID=22686104

Family Applications (1)

Application Number Title Priority Date Filing Date
BE788661D BE788661A (fr) 1971-10-05 Dispositif d'attaque d'une matiere par un gaz dans un champ electromagnetique

Country Status (7)

Country Link
US (1) US3705091A (fr)
JP (1) JPS4844176A (fr)
BE (1) BE788661A (fr)
CA (1) CA978140A (fr)
DE (1) DE2245753A1 (fr)
FR (1) FR2156582A1 (fr)
GB (1) GB1358647A (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50267U (fr) * 1973-04-27 1975-01-06
US4362632A (en) * 1974-08-02 1982-12-07 Lfe Corporation Gas discharge apparatus
US4431898A (en) * 1981-09-01 1984-02-14 The Perkin-Elmer Corporation Inductively coupled discharge for plasma etching and resist stripping
DE3632340C2 (de) * 1986-09-24 1998-01-15 Leybold Ag Induktiv angeregte Ionenquelle
US5280154A (en) * 1992-01-30 1994-01-18 International Business Machines Corporation Radio frequency induction plasma processing system utilizing a uniform field coil
US5277751A (en) * 1992-06-18 1994-01-11 Ogle John S Method and apparatus for producing low pressure planar plasma using a coil with its axis parallel to the surface of a coupling window
US5433812A (en) * 1993-01-19 1995-07-18 International Business Machines Corporation Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination
JP3105403B2 (ja) * 1994-09-14 2000-10-30 松下電器産業株式会社 プラズマ処理装置
US6238533B1 (en) * 1995-08-07 2001-05-29 Applied Materials, Inc. Integrated PVD system for aluminum hole filling using ionized metal adhesion layer
US5962923A (en) * 1995-08-07 1999-10-05 Applied Materials, Inc. Semiconductor device having a low thermal budget metal filling and planarization of contacts, vias and trenches
US7253109B2 (en) 1997-11-26 2007-08-07 Applied Materials, Inc. Method of depositing a tantalum nitride/tantalum diffusion barrier layer system
WO1999027579A1 (fr) * 1997-11-26 1999-06-03 Applied Materials, Inc. Depot de revetement sculpte sans deterioration
US6217937B1 (en) 1998-07-15 2001-04-17 Cornell Research Foundation, Inc. High throughput OMVPE apparatus
US6239553B1 (en) * 1999-04-22 2001-05-29 Applied Materials, Inc. RF plasma source for material processing
US8454810B2 (en) 2006-07-14 2013-06-04 4D-S Pty Ltd. Dual hexagonal shaped plasma source
KR101874802B1 (ko) * 2016-04-19 2018-07-05 피에스케이 주식회사 플라스마 소스 및 이를 포함하는 기판 처리 장치
WO2022250145A1 (fr) * 2021-05-27 2022-12-01 旭化成株式会社 Dispositif de génération de plasma, dispositif de traitement par plasma et dispositif de gravure au plasma pour moule à rouleaux sans soudure

Also Published As

Publication number Publication date
US3705091A (en) 1972-12-05
CA978140A (en) 1975-11-18
GB1358647A (en) 1974-07-03
JPS4844176A (fr) 1973-06-25
FR2156582A1 (fr) 1973-06-01
DE2245753A1 (de) 1973-04-12

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