BE798985A - Procede d'attaque du tungstene par voie electrolytique, - Google Patents

Procede d'attaque du tungstene par voie electrolytique,

Info

Publication number
BE798985A
BE798985A BE130647A BE130647A BE798985A BE 798985 A BE798985 A BE 798985A BE 130647 A BE130647 A BE 130647A BE 130647 A BE130647 A BE 130647A BE 798985 A BE798985 A BE 798985A
Authority
BE
Belgium
Prior art keywords
electrolytical
attack process
tungsten
tungsten attack
electrolytical tungsten
Prior art date
Application number
BE130647A
Other languages
English (en)
Inventor
D M Macarthur
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE798985A publication Critical patent/BE798985A/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/66—Wet etching of conductive or resistive materials
    • H10P50/663—Wet etching of conductive or resistive materials by chemical means only
    • H10P50/667—Wet etching of conductive or resistive materials by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/08—Etching of refractory metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
BE130647A 1972-05-04 1973-05-02 Procede d'attaque du tungstene par voie electrolytique, BE798985A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25025872A 1972-05-04 1972-05-04

Publications (1)

Publication Number Publication Date
BE798985A true BE798985A (fr) 1973-08-31

Family

ID=22946995

Family Applications (1)

Application Number Title Priority Date Filing Date
BE130647A BE798985A (fr) 1972-05-04 1973-05-02 Procede d'attaque du tungstene par voie electrolytique,

Country Status (6)

Country Link
US (1) US3785945A (fr)
JP (1) JPS4954240A (fr)
BE (1) BE798985A (fr)
DE (1) DE2321798A1 (fr)
FR (1) FR2183037B1 (fr)
GB (1) GB1425219A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4098659A (en) * 1977-07-13 1978-07-04 The United States Of America As Represented By The Secretary Of The Air Force Electrochemical milling process to prevent localized heating
JPS5496775A (en) * 1978-01-17 1979-07-31 Hitachi Ltd Method of forming circuit
US4629539A (en) * 1982-07-08 1986-12-16 Tdk Corporation Metal layer patterning method
HU190811B (en) * 1982-09-01 1986-11-28 Mta Mueszaki Fizikai Kutato Intezet,Hu Method for decomposing hard metal wastes by anodic oxidation and dissolving
US5374338A (en) * 1993-10-27 1994-12-20 International Business Machines Corporation Selective electroetch of copper and other metals
US20060021974A1 (en) * 2004-01-29 2006-02-02 Applied Materials, Inc. Method and composition for polishing a substrate
DE102004060507A1 (de) * 2004-12-16 2006-06-29 Forschungszentrum Karlsruhe Gmbh Verfahren zur elektrochemischen Abtragung von Refraktärmetallen oder -legierungen und Lösung zur Durchführung dieses Verfahrens
JP4900351B2 (ja) * 2008-09-19 2012-03-21 住友電気工業株式会社 構造体の製造方法および構造体の製造装置

Also Published As

Publication number Publication date
FR2183037A1 (fr) 1973-12-14
FR2183037B1 (fr) 1976-04-09
DE2321798A1 (de) 1973-11-15
US3785945A (en) 1974-01-15
GB1425219A (en) 1976-02-18
JPS4954240A (fr) 1974-05-27

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