BE821564A - Dispositifs semi-conducteurs avec des couches metalliques refractaires - Google Patents
Dispositifs semi-conducteurs avec des couches metalliques refractairesInfo
- Publication number
- BE821564A BE821564A BE149953A BE149953A BE821564A BE 821564 A BE821564 A BE 821564A BE 149953 A BE149953 A BE 149953A BE 149953 A BE149953 A BE 149953A BE 821564 A BE821564 A BE 821564A
- Authority
- BE
- Belgium
- Prior art keywords
- semiconductor devices
- metal layers
- refractory metal
- refractory
- layers
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
- H10D64/0111—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
- H10D64/0112—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors using conductive layers comprising silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0682—Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Silicon Compounds (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41181973A | 1973-11-01 | 1973-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE821564A true BE821564A (fr) | 1975-02-17 |
Family
ID=23630455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE149953A BE821564A (fr) | 1973-11-01 | 1974-10-28 | Dispositifs semi-conducteurs avec des couches metalliques refractaires |
Country Status (9)
| Country | Link |
|---|---|
| JP (1) | JPS5080790A (fr) |
| BE (1) | BE821564A (fr) |
| DE (1) | DE2450341A1 (fr) |
| FR (1) | FR2250198B1 (fr) |
| GB (1) | GB1448610A (fr) |
| IN (1) | IN140056B (fr) |
| IT (1) | IT1022138B (fr) |
| NL (1) | NL7414233A (fr) |
| SE (1) | SE7413660L (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114366A (en) * | 1977-03-16 | 1978-10-05 | Toshiba Corp | Semiconductor device |
| US4180596A (en) * | 1977-06-30 | 1979-12-25 | International Business Machines Corporation | Method for providing a metal silicide layer on a substrate |
| US4359490A (en) * | 1981-07-13 | 1982-11-16 | Fairchild Camera & Instrument Corp. | Method for LPCVD co-deposition of metal and silicon to form metal silicide |
| US4507851A (en) * | 1982-04-30 | 1985-04-02 | Texas Instruments Incorporated | Process for forming an electrical interconnection system on a semiconductor |
| JPS58202553A (ja) * | 1982-05-21 | 1983-11-25 | Toshiba Corp | 半導体装置 |
| GB2139419A (en) * | 1983-05-05 | 1984-11-07 | Standard Telephones Cables Ltd | Semiconductor devices |
| JPS6014852U (ja) * | 1983-07-07 | 1985-01-31 | 屋敷 静雄 | スベリドメ付きドライバ− |
| NL9000795A (nl) * | 1990-04-04 | 1991-11-01 | Imec Inter Uni Micro Electr | Werkwijze voor het aanbrengen van metaalsilicides op silicium. |
-
1974
- 1974-09-11 IN IN2028/CAL/74A patent/IN140056B/en unknown
- 1974-09-19 IT IT27498/74A patent/IT1022138B/it active
- 1974-10-22 GB GB4562174A patent/GB1448610A/en not_active Expired
- 1974-10-23 DE DE19742450341 patent/DE2450341A1/de active Pending
- 1974-10-28 BE BE149953A patent/BE821564A/fr unknown
- 1974-10-28 FR FR7436005A patent/FR2250198B1/fr not_active Expired
- 1974-10-29 JP JP49125334A patent/JPS5080790A/ja active Pending
- 1974-10-30 SE SE7413660A patent/SE7413660L/xx not_active Application Discontinuation
- 1974-10-31 NL NL7414233A patent/NL7414233A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2450341A1 (de) | 1975-05-07 |
| FR2250198B1 (fr) | 1978-06-09 |
| GB1448610A (en) | 1976-09-08 |
| IN140056B (fr) | 1976-09-04 |
| IT1022138B (it) | 1978-03-20 |
| JPS5080790A (fr) | 1975-07-01 |
| SE7413660L (fr) | 1975-05-02 |
| FR2250198A1 (fr) | 1975-05-30 |
| NL7414233A (nl) | 1975-05-06 |
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