Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P36/00—Gettering within semiconductor bodies
  • H10P36/03—Gettering within semiconductor bodies within silicon bodies
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
  • H10P95/90—Thermal treatments, e.g. annealing or sintering
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/60—Wet etching
  • H10P50/64—Wet etching of semiconductor materials
  • H10P50/642—Chemical etching

Applications Claiming Priority (1)

Publications (1)

Family

ID=23963371

Family Applications (1)

Country Status (7)

Families Citing this family (1)

• 1975
  • 1975-06-24 IN IN1243/CAL/75A patent/IN140598B/en unknown
  • 1975-07-02 IT IT25039/75A patent/IT1039690B/it active
  • 1975-07-24 SE SE7508447A patent/SE7508447L/ not_active Application Discontinuation
  • 1975-07-26 DE DE19752533550 patent/DE2533550A1/de active Pending
  • 1975-07-28 FR FR7523541A patent/FR2280976A1/fr not_active Withdrawn
  • 1975-08-01 BE BE158891A patent/BE832064A/fr unknown
  • 1975-08-01 JP JP50094676A patent/JPS5140757A/ja active Pending

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