BE837780A - Procede de fabrication de contacts electriques sur un four tubulaire en silicium polycristallin, a chauffage direct - Google Patents

Procede de fabrication de contacts electriques sur un four tubulaire en silicium polycristallin, a chauffage direct

Info

Publication number
BE837780A
BE837780A BE163689A BE163689A BE837780A BE 837780 A BE837780 A BE 837780A BE 163689 A BE163689 A BE 163689A BE 163689 A BE163689 A BE 163689A BE 837780 A BE837780 A BE 837780A
Authority
BE
Belgium
Prior art keywords
polycrystalline silicon
electrical contacts
directly heated
manufacturing electrical
tubular oven
Prior art date
Application number
BE163689A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE837780A publication Critical patent/BE837780A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12—Heating of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
BE163689A 1975-04-23 1976-01-21 Procede de fabrication de contacts electriques sur un four tubulaire en silicium polycristallin, a chauffage direct BE837780A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752518045 DE2518045C3 (de) 1975-04-23 1975-04-23 Rohr für Diffusionsprozesse in der Halbleitertechnik aus polykristallinem Silicium

Publications (1)

Publication Number Publication Date
BE837780A true BE837780A (fr) 1976-05-14

Family

ID=5944798

Family Applications (1)

Application Number Title Priority Date Filing Date
BE163689A BE837780A (fr) 1975-04-23 1976-01-21 Procede de fabrication de contacts electriques sur un four tubulaire en silicium polycristallin, a chauffage direct

Country Status (2)

Country Link
BE (1) BE837780A (fr)
DE (1) DE2518045C3 (fr)

Also Published As

Publication number Publication date
DE2518045B2 (de) 1977-10-06
DE2518045C3 (de) 1978-06-01
DE2518045A1 (de) 1976-10-28

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