BE904130A - Procede pour revetir des elements de machines ou outils d'une matiere dure et elements de machines et outils fabriques par application de ce procede. - Google Patents

Procede pour revetir des elements de machines ou outils d'une matiere dure et elements de machines et outils fabriques par application de ce procede.

Info

Publication number
BE904130A
BE904130A BE0/216199A BE216199A BE904130A BE 904130 A BE904130 A BE 904130A BE 0/216199 A BE0/216199 A BE 0/216199A BE 216199 A BE216199 A BE 216199A BE 904130 A BE904130 A BE 904130A
Authority
BE
Belgium
Prior art keywords
machinery
tools
hard material
elements
group
Prior art date
Application number
BE0/216199A
Other languages
English (en)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of BE904130A publication Critical patent/BE904130A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

Procédé pour revetir des pièces en aciers sensibles à la température d'une matière dure constituée par un composé azoté et/ou carboné d'un métal du groupe Ti, Zr, Hf, Cr, Ta, Tu, Nb, par pulvérisation cathodique réactive de l'un de ces métaux dans une atmosphère azotée ou carbonée. Pour obtenir des couches épaisses et sans fissures sur des substrats (5) sensibles à la température, on dépose en alternance des couches élémentaires de matière dure (7) du groupe TiN, TiC, TiCN; ZrN; HfN; CrN, Cr2C3; TaC, TaN; TuN, TuC; NbN, qui n'occupent qu'une fraction de l'épaisseur totale, et des couches intercalaires métalliques (6) d'au moins l'un des métaux du groupe Ti, Zr, Hf, Cr, Ta, Tu, Nb; Al, Ni,Fe, ces dernières étant déposées par pulvérisation cathodique dans des conditions non réactives.
BE0/216199A 1985-01-30 1986-01-29 Procede pour revetir des elements de machines ou outils d'une matiere dure et elements de machines et outils fabriques par application de ce procede. BE904130A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853503105 DE3503105A1 (de) 1985-01-30 1985-01-30 Verfahren zum beschichten von maschinenteilen und werkzeugen mit hartstoffmaterial und durch das verfahren hergestellte maschinenteile und werkzeuge

Publications (1)

Publication Number Publication Date
BE904130A true BE904130A (fr) 1986-05-15

Family

ID=6261185

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/216199A BE904130A (fr) 1985-01-30 1986-01-29 Procede pour revetir des elements de machines ou outils d'une matiere dure et elements de machines et outils fabriques par application de ce procede.

Country Status (6)

Country Link
JP (1) JPS61177365A (fr)
BE (1) BE904130A (fr)
DE (1) DE3503105A1 (fr)
FR (1) FR2576608A1 (fr)
GB (1) GB2170226A (fr)
SE (1) SE8600208L (fr)

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US6033790A (en) * 1997-04-30 2000-03-07 Masco Corporation Article having a coating
US5989730A (en) * 1997-04-30 1999-11-23 Masco Corporation Article having a decorative and protective multi-layer coating
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JP5660696B2 (ja) * 2008-09-30 2015-01-28 Ｄｏｗａサーモテック株式会社 硬質皮膜被覆部材およびその製造方法
JP5634669B2 (ja) * 2008-09-30 2014-12-03 Ｄｏｗａサーモテック株式会社 硬質皮膜被覆部材およびその製造方法
JP5660697B2 (ja) * 2008-09-30 2015-01-28 Ｄｏｗａサーモテック株式会社 硬質皮膜被覆部材およびその製造方法
JP5676854B2 (ja) * 2009-04-02 2015-02-25 Ｄｏｗａサーモテック株式会社 硬質皮膜被覆部材およびその製造方法
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CN102560344A (zh) * 2010-12-24 2012-07-11 鸿富锦精密工业（深圳）有限公司 硬质薄膜、具备硬质薄膜的产品及该产品的制作方法
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CN103953772B (zh) * 2014-04-21 2017-03-15 宁波丰基特种阀门有限公司 碳化钨氮化铬复合涂层的超硬耐磨阀门
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Also Published As

Publication number Publication date
JPS61177365A (ja) 1986-08-09
SE8600208L (sv) 1986-07-31
GB8600580D0 (en) 1986-02-19
DE3503105A1 (de) 1986-07-31
SE8600208D0 (sv) 1986-01-17
GB2170226A (en) 1986-07-30
FR2576608A1 (fr) 1986-08-01

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: LEYBOLD-HERAEUS G.M.B.H.

Effective date: 19890131