BE904998A - Super purificateur pour l'azote et procede pour purifier ce gaz. - Google Patents

Super purificateur pour l'azote et procede pour purifier ce gaz.

Info

Publication number
BE904998A
BE904998A BE2/61004A BE2061004A BE904998A BE 904998 A BE904998 A BE 904998A BE 2/61004 A BE2/61004 A BE 2/61004A BE 2061004 A BE2061004 A BE 2061004A BE 904998 A BE904998 A BE 904998A
Authority
BE
Belgium
Prior art keywords
nitrogen
super
purifying
gas
gas containing
Prior art date
Application number
BE2/61004A
Other languages
English (en)
Inventor
Kiyoshi Nagai
Claudio Boffito
Fabrizio Doni
Marco Succi
Original Assignee
Taiyo Sanso Co Ltd
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Sanso Co Ltd, Getters Spa filed Critical Taiyo Sanso Co Ltd
Publication of BE904998A publication Critical patent/BE904998A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0494—Combined chemical and physical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0004—Chemical processing by oxidation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C01B2210/0023—Physical processing by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0042—Making ultrapure specific gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)

Abstract

Le super purificateur de l'invention comporte des moyens pour mettre en contact un azote gazeux contenant des impuretés avec un dégazeur constitué d'un alliage contenant de 15 à 30 % en poids de fer et de 70 à 85% en poids de zirconium. Le procédé de la présente invention consiste à mettre en contact un gaz contenant des impuretés avec un tel dégazeur. L'invention concerne particulièrement un super purificateur et un procédé pour purifier un gaz contenant des impuretés jusqu'à une pureté plus élevée que celle obtenue par les procédés de purification conventionnels.
BE2/61004A 1985-06-28 1986-06-26 Super purificateur pour l'azote et procede pour purifier ce gaz. BE904998A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140628A JPS623006A (ja) 1985-06-28 1985-06-28 窒素の超精製装置、並びに精製方法

Publications (1)

Publication Number Publication Date
BE904998A true BE904998A (fr) 1986-10-16

Family

ID=15273115

Family Applications (1)

Application Number Title Priority Date Filing Date
BE2/61004A BE904998A (fr) 1985-06-28 1986-06-26 Super purificateur pour l'azote et procede pour purifier ce gaz.

Country Status (10)

Country Link
JP (1) JPS623006A (fr)
KR (1) KR930006690B1 (fr)
BE (1) BE904998A (fr)
CA (1) CA1300346C (fr)
DE (1) DE3621013C2 (fr)
FR (1) FR2584062B1 (fr)
GB (1) GB2177080B (fr)
IT (1) IT1204420B (fr)
NL (1) NL192104C (fr)
SE (1) SE463149B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (fr) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (fr) * 1989-02-07 1990-08-10 Air Liquide Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1244006B (it) * 1990-11-02 1994-06-28 Getters Spa Procedimento di purificazione dell'ammoniaca.
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
JPH1157371A (ja) * 1997-08-11 1999-03-02 Taiyo Toyo Sanso Co Ltd 超清浄空気の製造方法
ES2171044T3 (es) 1997-10-15 2002-08-16 Saes Pure Gas Inc Sistema de purificacion de gas dotado de un dispositivo de seguridad y procedimiento de purificacion de gas.
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system
KR100356611B1 (ko) * 2000-08-10 2002-10-18 주식회사 아토 질소 정제 방법 및 정제 장치
ITMI20010930A1 (it) 2001-05-07 2002-11-07 Getters Spa Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4918255B2 (ja) * 2005-12-22 2012-04-18 ウチヤ・サーモスタット株式会社 窒素ガス発生装置
CN110759323A (zh) * 2018-07-27 2020-02-07 隆基绿能科技股份有限公司 一种气体纯化反应器及气体纯化方法
CN112978692B (zh) * 2021-03-04 2022-08-05 北京高麦克仪器科技有限公司 780氦气纯化器
JP7210803B1 (ja) * 2022-10-04 2023-01-23 レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガス精製装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
BE792561A (fr) * 1972-12-11 1973-03-30 Getters Spa Dispositif purificateur pour gaz rares et hydrogene,
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
DE3137569A1 (de) * 1981-09-22 1983-04-21 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur herstellung von hochreinem stickstoff
JPS6020323A (ja) * 1983-07-15 1985-02-01 Toshiba Corp デイスク装置

Also Published As

Publication number Publication date
GB2177080B (en) 1989-08-31
CA1300346C (fr) 1992-05-12
SE8602870D0 (sv) 1986-06-27
NL192104C (nl) 1997-02-04
FR2584062A1 (fr) 1987-01-02
SE8602870L (sv) 1986-12-29
SE463149B (sv) 1990-10-15
GB2177080A (en) 1987-01-14
DE3621013C2 (de) 1996-02-15
IT1204420B (it) 1989-03-01
FR2584062B1 (fr) 1990-12-21
GB8615619D0 (en) 1986-07-30
NL8601692A (nl) 1987-01-16
JPH0456763B2 (fr) 1992-09-09
DE3621013A1 (de) 1987-01-08
JPS623006A (ja) 1987-01-09
IT8620963A0 (it) 1986-06-27
KR930006690B1 (ko) 1993-07-22
NL192104B (nl) 1996-10-01
KR870000237A (ko) 1987-02-17

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Legal Events

Date Code Title Description
RE20 Patent expired

Owner name: *SAES GETTERS S.P.A.

Effective date: 20060626

Owner name: *TAIYO SANSO CO., LTD

Effective date: 20060626