BR0114352A - Conjunto de plasma à pressão atmosférica - Google Patents

Conjunto de plasma à pressão atmosférica

Info

Publication number
BR0114352A
BR0114352A BR0114352-2A BR0114352A BR0114352A BR 0114352 A BR0114352 A BR 0114352A BR 0114352 A BR0114352 A BR 0114352A BR 0114352 A BR0114352 A BR 0114352A
Authority
BR
Brazil
Prior art keywords
atmospheric pressure
electrodes
pressure plasma
plates
dielectric
Prior art date
Application number
BR0114352-2A
Other languages
English (en)
Inventor
Fergal O'reilly
Peter Dobbyn
Anthony Herbert
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Publication of BR0114352A publication Critical patent/BR0114352A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

"CONJUNTO DE PLASMA à PRESSãO ATMOSFéRICA". Um conjunto de plasma atmosférico tem um par de eletrodos planos espaçados paralelos (36), cada um ligado a uma placa dielétrica (31) . Duas placas espaçadoras (21) separam as placas dielétricas (31), para a formação de uma região de plasma. Colunas de borrifamento (40) tendo bocais são usadas para a aspersão de água de resfriamento nas placas dielétricas (31) e nos eletrodos (36). De modo ideal, as placas dielétricas (31) e os eletrodos (36) são dispostos verticalmente.
BR0114352-2A 2000-10-26 2001-10-26 Conjunto de plasma à pressão atmosférica BR0114352A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IE20000867 2000-10-26
PCT/IE2001/000138 WO2002035576A1 (en) 2000-10-26 2001-10-26 An atmospheric pressure plasma assembly

Publications (1)

Publication Number Publication Date
BR0114352A true BR0114352A (pt) 2004-02-17

Family

ID=11042684

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0114352-2A BR0114352A (pt) 2000-10-26 2001-10-26 Conjunto de plasma à pressão atmosférica

Country Status (10)

Country Link
US (1) US20040052028A1 (pt)
EP (1) EP1334507A1 (pt)
JP (1) JP2004526276A (pt)
KR (1) KR20030074613A (pt)
CN (1) CN1466771A (pt)
AU (1) AU2002210861A1 (pt)
BR (1) BR0114352A (pt)
MX (1) MXPA03003661A (pt)
MY (1) MY138190A (pt)
WO (1) WO2002035576A1 (pt)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1326718B2 (en) 2000-10-04 2007-09-05 Dow Corning Ireland Limited Method and apparatus for forming a coating
TW200409669A (en) * 2002-04-10 2004-06-16 Dow Corning Ireland Ltd Protective coating composition
GB0208263D0 (en) * 2002-04-10 2002-05-22 Dow Corning Protective coating composition
GB0208261D0 (en) * 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly
EA010388B1 (ru) 2003-01-31 2008-08-29 Дау Корнинг Айэлэнд Лимитед Электродный узел для генерации плазмы
WO2005000363A2 (en) * 2003-06-16 2005-01-06 Cerionx, Inc. Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads
US20060162740A1 (en) * 2005-01-21 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US8092643B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US20060272675A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
US8092644B2 (en) * 2003-06-16 2012-01-10 Ionfield Systems, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
US8366871B2 (en) * 2003-06-16 2013-02-05 Ionfield Holdings, Llc Method and apparatus for cleaning and surface conditioning objects using plasma
US20060272674A1 (en) * 2005-06-02 2006-12-07 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects using plasma
TWI240328B (en) * 2004-08-27 2005-09-21 Univ Nat Cheng Kung Pretreatment process of substrate in micro-nano imprinting technology
GB0423685D0 (en) 2004-10-26 2004-11-24 Dow Corning Ireland Ltd Improved method for coating a substrate
US20060237030A1 (en) * 2005-04-22 2006-10-26 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
GB0509648D0 (en) 2005-05-12 2005-06-15 Dow Corning Ireland Ltd Plasma system to deposit adhesion primer layers
WO2007128947A1 (en) 2006-05-02 2007-11-15 Dow Corning Ireland Limited Fluid replacement system
WO2007128946A1 (en) 2006-05-02 2007-11-15 Dow Corning Ireland Limited Web sealing device
GB0717430D0 (en) * 2007-09-10 2007-10-24 Dow Corning Ireland Ltd Atmospheric pressure plasma
FR2921388B1 (fr) * 2007-09-20 2010-11-26 Air Liquide Dispositif et procede de depot cvd assiste par plasma tres haute frequence a la pression atmospherique, et ses applications
US8427807B2 (en) * 2008-01-07 2013-04-23 Siemens Aktiengesellschaft Capacitor for application in high pressure environments
PL2564412T3 (pl) * 2010-04-30 2018-08-31 Agc Glass Europe Elektroda do procesu plazmowego DBD
JP2012120677A (ja) * 2010-12-08 2012-06-28 Samsung Electronics Co Ltd プラズマ発生方法及びプラズマ発生装置
GB2501933A (en) * 2012-05-09 2013-11-13 Linde Ag device for providing a flow of non-thermal plasma
MX2015003569A (es) * 2012-09-19 2016-06-21 Apjet Inc Aparato y metodo para procesar plasma bajo presion atmosferica.
US9469912B2 (en) 2014-04-21 2016-10-18 Lam Research Corporation Pretreatment method for photoresist wafer processing
KR101748739B1 (ko) 2015-02-26 2017-07-04 주식회사 피글 표면방전과 가스 유도관을 이용한 유전격벽방전 대기압 플라즈마 장치
CN106683971A (zh) * 2017-01-06 2017-05-17 珠海宝丰堂电子科技有限公司 蚀刻电极装置
KR101920849B1 (ko) 2017-10-23 2018-11-21 국방과학연구소 플라즈마 직물과 이의 제조 장치 및 제조 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3959104A (en) * 1974-09-30 1976-05-25 Surface Activation Corporation Electrode structure for generating electrical discharge plasma
US4233109A (en) * 1976-01-16 1980-11-11 Zaidan Hojin Handotai Kenkyu Shinkokai Dry etching method
US4381965A (en) * 1982-01-06 1983-05-03 Drytek, Inc. Multi-planar electrode plasma etching
US5185132A (en) * 1989-12-07 1993-02-09 Research Development Corporation Of Japan Atomspheric plasma reaction method and apparatus therefor
DE4026897C2 (de) * 1990-08-23 1994-05-05 Mannesmann Ag Metallische Bodenelektrode für metallurgische Gefäße
US5414324A (en) * 1993-05-28 1995-05-09 The University Of Tennessee Research Corporation One atmosphere, uniform glow discharge plasma
US5876663A (en) * 1995-11-14 1999-03-02 The University Of Tennessee Research Corporation Sterilization of liquids using plasma glow discharge
US5776553A (en) * 1996-02-23 1998-07-07 Saint Gobain/Norton Industrial Ceramics Corp. Method for depositing diamond films by dielectric barrier discharge
DE19616197C2 (de) * 1996-04-23 1998-04-09 Fraunhofer Ges Forschung Verfahren zur Behandlung von Abgas
US6152071A (en) * 1996-12-11 2000-11-28 Canon Kabushiki Kaisha High-frequency introducing means, plasma treatment apparatus, and plasma treatment method
EP0997926B1 (en) * 1998-10-26 2006-01-04 Matsushita Electric Works, Ltd. Plasma treatment apparatus and method
EP1073091A3 (en) * 1999-07-27 2004-10-06 Matsushita Electric Works, Ltd. Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus
US6406618B1 (en) * 2000-08-02 2002-06-18 O'leary Richard A. Portable fire sprinkler chemical feed system

Also Published As

Publication number Publication date
MY138190A (en) 2009-05-29
US20040052028A1 (en) 2004-03-18
JP2004526276A (ja) 2004-08-26
CN1466771A (zh) 2004-01-07
MXPA03003661A (es) 2005-01-25
KR20030074613A (ko) 2003-09-19
AU2002210861A1 (en) 2002-05-06
EP1334507A1 (en) 2003-08-13
WO2002035576A1 (en) 2002-05-02

Similar Documents

Publication Publication Date Title
MY138190A (en) An atmospheric pressure plasma assembly
ATE321436T1 (de) Atmosphärendruck-plasmavorrichtung
CU22567A3 (es) Soporte poliposicionable para monitores de television
AU4916500A (en) Device for detecting electrical potentials in the forehead-area of a patient
AR029851A1 (es) Nuevos peptidos como inhibidores de ns3-serina proteasa del virus de hepatitis c
BR0306931A (pt) Peptìdeos como inibidores de protease serina-ns3 do vìrus da hepatite c
AR013746A1 (es) Sustitucion bioisosterica de catecol por indazol en compuesto terapeuticos activos
BRPI0504926A (pt) calha de arco e disjuntor empregando a mesma
BR9705274A (pt) Dissipador de calor para um interruptor a vácuo e interruptor a vácuo.
BR0111744A (pt) Eletrodo de célula de combustìvel de grafite flexìvel permeável a fluido
YU63201A (sh) Generator ozona i postupak za proizvodnju ozona
ES2053429T3 (es) El uso de buspirona para la preparacion de composiciones farmaceuticas para aliviar la ansiedad fobica.
WO2008123357A1 (ja) プラズマ発生体及び反応装置
ES2167401T3 (es) Uso de ascorbil-gamma-linolenato o un ascorbil-dihomo-gamma-linolenato para el tratamiento de asma, cancer, enfermedades cardiovasculares y anti-inflamatorias.
ES2067136T3 (es) Electrolizador.
DK1015421T3 (da) Nye phenylamidinderivater, fremgangsmåder til deres fremstilling og deres anvendelse som lægemidler
ES2098164T3 (es) Mezcla sinergetica de al menos un ligando especifico de los rxrs y al menos un ligando especifico de rar-alfa.
UA85161C2 (ru) Разрядник для защиты от перенапряжений и его активная часть
WO2001057072A3 (en) Pharmacologically active antiviral peptides and methods of their use
ES2072739T3 (es) Equipo para electrolisis y electrodialisis.
NO20010785D0 (no) Tablett som kan deles eksakt
DK0506769T3 (da) Farmaceutisk præparat til behandling eller forebyggelse af retrovirus-infektioner
MX9201831A (es) Proceso mejorado para la preparacion de (1s-(1r*,2s*,3r*) )-n-(4-(morfolinilsulfonil)-l-fenilalanil-3-(2-amino-4-tiazolil)-n-((1 -cilohexilmetil)-2,3-dihidroxi-5-metilhexil)-l-alaninamida.
DK0405298T3 (da) Nye thienopyran-derivater, en fremgangsmåde til deres fremstilling og deres anvendelse
NO991589L (no) Nye 3-,5- og/eller 6-substituerte analoger av swainsonin, fremgangsmÕter for deres fremstilling og deres anvendelse som terapeutiske midler

Legal Events

Date Code Title Description
B08F Application fees: application dismissed [chapter 8.6 patent gazette]

Free format text: REFERENTE A 8A , 9A E 10 ANUIDADES.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2144 DE 07/02/2012.