BR9814771A - Disposição para revestimento a vácuo de mancais deslizantes - Google Patents

Disposição para revestimento a vácuo de mancais deslizantes

Info

Publication number
BR9814771A
BR9814771A BR9814771-4A BR9814771A BR9814771A BR 9814771 A BR9814771 A BR 9814771A BR 9814771 A BR9814771 A BR 9814771A BR 9814771 A BR9814771 A BR 9814771A
Authority
BR
Brazil
Prior art keywords
coating
several
conveyance
chambers
slide bearings
Prior art date
Application number
BR9814771-4A
Other languages
English (en)
Inventor
Gerd Andler
Wolfgang Wixwat-Ernst
Christoph Metzner
Jeans-Peter Heinss
Klaus Goedicke
Siegfried Schiller
Original Assignee
Federal Mogul Wiesbaden Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Federal Mogul Wiesbaden Gmbh filed Critical Federal Mogul Wiesbaden Gmbh
Publication of BR9814771A publication Critical patent/BR9814771A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/14—Special methods of manufacture; Running-in

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Sliding-Contact Bearings (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Compressor (AREA)
  • Spray Control Apparatus (AREA)

Abstract

Patente de Invenção: <B>"DISPOSIçãO PARA REVESTIMENTO A VáCUO DE MANCAIS DESLIZANTES"<D>. As disposições conhecidas para revestimento a vácuo de substratos de forma diferente, quer como instalações de circulação ou de carga, estão equipadas de tal modo que várias camadas são aplicadas de acordo com um processo de revestimento. Os mancais deslizantes são dotados de várias camadas e os materiais de revestimento utilizados e as condições relacionadas aos mesmos requerem a aplicação de várias tecnologias de revestimento. Isto se refere, entre outros, aos parâmetros de transporte. Instalações conhecidas não permitem que essas exigências sejam atendidas. De acordo com a invenção, uma disposição desse tipo consiste em várias câmaras de processo, que estão enfileiradas. Pelas mesmas são movidos mancais deslizantes sustentados com fecho devido à forma e devido à força em corpos de suporte temperáveis, por uma câmara de tratamento prévio, de pulverização e de catodização, com um regime de transporte adaptado ao processo. Ao caminho de revestimento está ligado previamente um dispositivo de regulagem de temperatura para os corpos de suporte. Respectivamente uma passagem de entrada e de saída possibilitam o transporte de ar a ar.
BR9814771-4A 1997-12-03 1998-11-19 Disposição para revestimento a vácuo de mancais deslizantes BR9814771A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19753656A DE19753656C1 (de) 1997-12-03 1997-12-03 Einrichtung zur Vakuumbeschichtung von Gleitlagern
PCT/DE1998/003455 WO1999028523A1 (de) 1997-12-03 1998-11-19 Einrichtung zur vakuumbeschichtung von gleitlagern

Publications (1)

Publication Number Publication Date
BR9814771A true BR9814771A (pt) 2000-10-03

Family

ID=7850630

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9814771-4A BR9814771A (pt) 1997-12-03 1998-11-19 Disposição para revestimento a vácuo de mancais deslizantes

Country Status (16)

Country Link
US (1) US6444086B1 (pt)
EP (1) EP1036212B1 (pt)
JP (1) JP2001525490A (pt)
KR (1) KR100532031B1 (pt)
CN (1) CN1177950C (pt)
AT (2) ATE202160T1 (pt)
BR (1) BR9814771A (pt)
CZ (1) CZ293929B6 (pt)
DE (2) DE19753656C1 (pt)
ES (1) ES2158704T3 (pt)
PL (1) PL187394B1 (pt)
PT (1) PT1036212E (pt)
RU (1) RU2221080C2 (pt)
SK (1) SK285253B6 (pt)
TR (1) TR200001348T2 (pt)
WO (1) WO1999028523A1 (pt)

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CN101469403B (zh) * 2003-02-18 2011-11-23 松下电器产业株式会社 等离子体显示屏的基板保持件
CN100479082C (zh) * 2003-04-04 2009-04-15 松下电器产业株式会社 等离子体显示面板的制造方法
DE10324570A1 (de) * 2003-05-30 2004-12-23 Daimlerchrysler Ag Vorrichtung und Verfahren zur Oberflächenbehandlung einer metallischen Laufbahn einer Maschine mittels Plasmatechnologie
RU2006105789A (ru) * 2004-05-25 2007-10-10 Эпплайд Матириалз Гмбх Энд Ко.Кг (De) Установка для обработки ленточного материала
CN1304628C (zh) * 2004-08-31 2007-03-14 成建波 真空线源蒸发镀膜方法及其装置
WO2006100968A1 (ja) 2005-03-18 2006-09-28 Ulvac, Inc. 成膜方法及び成膜装置並びに永久磁石及び永久磁石の製造方法
AT501722B1 (de) 2005-07-12 2006-11-15 Miba Gleitlager Gmbh Beschichtungsverfahren
CN100595320C (zh) * 2005-11-16 2010-03-24 比亚迪股份有限公司 一种真空镀膜方法和系统
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CN101144149B (zh) * 2006-09-11 2010-12-22 柏腾科技股份有限公司 无时间延迟的连续式真空制程设备及真空加工方法
JP5069956B2 (ja) * 2007-06-25 2012-11-07 株式会社神戸製鋼所 成膜装置
DE102007049669A1 (de) * 2007-10-17 2009-04-23 Sms Demag Ag Schleusenvorrichtung und Verfahren zum Öffnen der Schleusenvorrichtung
RU2349829C1 (ru) * 2007-12-27 2009-03-20 Евгений Алексеевич Деулин Устройство для нанесения защитных покрытий на внутреннюю поверхность магистральных трубопроводов
CN101608301B (zh) * 2009-06-24 2011-12-07 江苏常松机械集团有限公司 连续真空等离子蒸发金属复合材料生产线
JP5244723B2 (ja) * 2009-07-10 2013-07-24 株式会社日立ハイテクノロジーズ 成膜装置
CN102703867A (zh) * 2012-01-13 2012-10-03 东莞宏威数码机械有限公司 电子轰击镀膜机
CN103866255B (zh) * 2014-03-10 2016-04-27 江西沃格光电股份有限公司 磁控溅射镀膜系统
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TWM557347U (zh) * 2017-07-21 2018-03-21 Guay Guay Trading Co Ltd 彈匣氣體加熱結構
CN117966103B (zh) * 2024-02-04 2024-06-18 浙江晟霖益嘉科技有限公司 一种蒸发真空设备生产线

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Also Published As

Publication number Publication date
KR20010032666A (ko) 2001-04-25
CN1177950C (zh) 2004-12-01
PL340722A1 (en) 2001-02-26
PL187394B1 (pl) 2004-06-30
WO1999028523A1 (de) 1999-06-10
SK285253B6 (sk) 2006-09-07
PT1036212E (pt) 2001-11-30
EP1036212B1 (de) 2001-06-13
CN1279728A (zh) 2001-01-10
DE19753656C1 (de) 1998-12-03
DE59800874D1 (de) 2001-07-19
ATA912298A (de) 2000-12-15
KR100532031B1 (ko) 2005-11-29
AT407995B (de) 2001-07-25
CZ293929B6 (cs) 2004-08-18
SK8302000A3 (en) 2001-01-18
TR200001348T2 (tr) 2000-11-21
ES2158704T3 (es) 2001-09-01
RU2221080C2 (ru) 2004-01-10
JP2001525490A (ja) 2001-12-11
CZ20001932A3 (cs) 2000-09-13
US6444086B1 (en) 2002-09-03
EP1036212A1 (de) 2000-09-20
ATE202160T1 (de) 2001-06-15

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B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 19/11/1998, OBSERVADAS AS CONDICOES LEGAIS.

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