BRPI0518980A2 - sistema e mÉtodo de tratamento de gÁs de escapamento - Google Patents
sistema e mÉtodo de tratamento de gÁs de escapamentoInfo
- Publication number
- BRPI0518980A2 BRPI0518980A2 BRPI0518980-2A BRPI0518980A BRPI0518980A2 BR PI0518980 A2 BRPI0518980 A2 BR PI0518980A2 BR PI0518980 A BRPI0518980 A BR PI0518980A BR PI0518980 A2 BRPI0518980 A2 BR PI0518980A2
- Authority
- BR
- Brazil
- Prior art keywords
- exhaust gas
- treatment system
- gas treatment
- prefilter
- phase
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000012071 phase Substances 0.000 abstract 2
- 238000011045 prefiltration Methods 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000012808 vapor phase Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 230000001877 deodorizing effect Effects 0.000 abstract 1
- 239000000428 dust Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0038—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions with means for influencing the odor, e.g. deodorizing substances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/81—Solid phase processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/30—Physical properties of adsorbents
- B01D2253/302—Dimensions
- B01D2253/304—Linear dimensions, e.g. particle shape, diameter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/90—Odorous compounds not provided for in groups B01D2257/00 - B01D2257/708
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Treating Waste Gases (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
SISTEMA E MÉTODO DE TRATAMENTO DE GÁS DE ESCAPAMENTO. É descrito um sistema de tratamento de gás de escapamento para tratar gás de escapamento proveniente de uma linha de fabricação de semicondutor, linha de fabricação de ICD, etc. O gás de escapamento, que é aspirado e conduzido por uma ventoinha 16, é primeiro introduzido e passado através de um filtro de carvão ativo em camadas desodorizante 12 que age como um pré-filtro. Conseqúentemente, as substâncias odoríferas aprisionadas em uma fase gasosa ou uma fase de vapor, ou ambas, são removidas. O gás de escapamento resultante é em seguida passado através de elemento de filtro de saco 14 para remover sua poeira etc. O elemento de filtro de saco 14 não pode ficar entupido em um estágio precoce, uma vez que as substâncias odoríferas, que estão em uma fase gasosa ou uma fase de vapor, ou ambas, tiveram suas propriedades adesivas elevadas removidas por um pré-filtro 12.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004362416 | 2004-12-15 | ||
| JP2005003299 | 2005-01-11 | ||
| PCT/JP2005/022942 WO2006064836A1 (ja) | 2004-12-15 | 2005-12-14 | 排ガスの処理方法及び装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BRPI0518980A2 true BRPI0518980A2 (pt) | 2008-12-16 |
Family
ID=36587892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BRPI0518980-2A BRPI0518980A2 (pt) | 2004-12-15 | 2005-12-14 | sistema e mÉtodo de tratamento de gÁs de escapamento |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US20080134882A1 (pt) |
| EP (1) | EP1829597B1 (pt) |
| JP (1) | JP4179377B2 (pt) |
| KR (1) | KR20070097048A (pt) |
| CN (1) | CN101107053B (pt) |
| BR (1) | BRPI0518980A2 (pt) |
| TW (1) | TW200628212A (pt) |
| WO (1) | WO2006064836A1 (pt) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101025881B1 (ko) * | 2009-02-09 | 2011-03-30 | 신종수 | 액체포집장치 |
| JP5782736B2 (ja) * | 2010-03-16 | 2015-09-24 | 株式会社リコー | 感熱記録媒体 |
| US20130055893A1 (en) * | 2011-09-01 | 2013-03-07 | Michael Lowe | Chamber Air Scrubber Assembly |
| CN104524880B (zh) * | 2015-01-26 | 2016-06-22 | 张海峙 | 多功能型环保空气净化器 |
| CN106621587A (zh) * | 2016-10-18 | 2017-05-10 | 合肥海宝节能科技有限公司 | 锅炉废气净化装置的吸附器 |
| CN110732219B (zh) * | 2019-11-11 | 2020-08-25 | 朱洪岐 | 一种有机物废气净化的活性炭吸附装置 |
| CN111760207A (zh) * | 2020-07-24 | 2020-10-13 | 党国际 | 一种融合pet-ct功能的放射治疗系统 |
| CN113278196B (zh) * | 2021-06-21 | 2022-01-18 | 徐州托普新材料有限公司 | 一种废橡胶再生装置 |
| CN116651178A (zh) * | 2023-05-25 | 2023-08-29 | 生态环境部南京环境科学研究所 | 一种铸造行业全流程异味物质组合式深度治理工艺 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116383B1 (pt) * | 1969-06-19 | 1976-05-24 | ||
| US4339250A (en) * | 1980-07-17 | 1982-07-13 | Thut Timothy T | Fresh air fountain air filter arrangement |
| GB2164870B (en) * | 1984-10-02 | 1988-06-29 | Marshall D A G | Fluid filter |
| US4963134A (en) * | 1989-03-03 | 1990-10-16 | United States Medical Corporation | Laser surgery plume evacuator with aspirator |
| JP3208820B2 (ja) * | 1992-03-13 | 2001-09-17 | 富士通株式会社 | ドライエッチング装置の清浄化方法 |
| US5910291A (en) * | 1992-03-16 | 1999-06-08 | Envirosurgical, Inc. | Surgery plume filter device and method of filtering |
| US5685895A (en) * | 1994-08-10 | 1997-11-11 | Nikon Corporation | Air cleaning apparatus used for an exposure apparatus |
| JP3411484B2 (ja) * | 1997-10-01 | 2003-06-03 | 住友重機械工業株式会社 | ゴミ焼却炉の排ガス処理装置における脱離ガス処理方法 |
| JP3965748B2 (ja) * | 1997-11-27 | 2007-08-29 | 石川島播磨重工業株式会社 | 活性炭吸着塔 |
| JP2000158176A (ja) * | 1998-11-20 | 2000-06-13 | Sumitomo Heavy Ind Ltd | レーザ加工装置 |
| US6649082B2 (en) * | 2000-05-26 | 2003-11-18 | Showa Denko K.K. | Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof |
| JP3840877B2 (ja) * | 2000-05-26 | 2006-11-01 | 昭和電工株式会社 | ハロゲン系ガスの除害剤、除害方法及びその用途 |
| CN1241672C (zh) * | 2000-05-26 | 2006-02-15 | 昭和电工株式会社 | 除害剂、使含卤素气体无害的方法及其用途 |
| US6585791B1 (en) * | 2002-01-29 | 2003-07-01 | Jon C. Garito | Smoke plume evacuation filtration system |
-
2005
- 2005-12-14 US US11/666,893 patent/US20080134882A1/en not_active Abandoned
- 2005-12-14 KR KR1020077014523A patent/KR20070097048A/ko not_active Ceased
- 2005-12-14 BR BRPI0518980-2A patent/BRPI0518980A2/pt not_active Application Discontinuation
- 2005-12-14 CN CN2005800425195A patent/CN101107053B/zh not_active Expired - Lifetime
- 2005-12-14 TW TW094144220A patent/TW200628212A/zh unknown
- 2005-12-14 WO PCT/JP2005/022942 patent/WO2006064836A1/ja not_active Ceased
- 2005-12-14 JP JP2006548877A patent/JP4179377B2/ja not_active Expired - Lifetime
- 2005-12-14 EP EP05816833A patent/EP1829597B1/en not_active Expired - Lifetime
-
2009
- 2009-11-03 US US12/588,932 patent/US20100043642A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CN101107053A (zh) | 2008-01-16 |
| WO2006064836A1 (ja) | 2006-06-22 |
| TW200628212A (en) | 2006-08-16 |
| EP1829597A4 (en) | 2010-02-24 |
| KR20070097048A (ko) | 2007-10-02 |
| US20080134882A1 (en) | 2008-06-12 |
| JPWO2006064836A1 (ja) | 2008-06-12 |
| US20100043642A1 (en) | 2010-02-25 |
| EP1829597B1 (en) | 2012-11-07 |
| CN101107053B (zh) | 2010-06-02 |
| EP1829597A1 (en) | 2007-09-05 |
| JP4179377B2 (ja) | 2008-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B11A | Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing | ||
| B11Y | Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette] |