BRPI0814936A2 - Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração - Google Patents

Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração

Info

Publication number
BRPI0814936A2
BRPI0814936A2 BRPI0814936-4A2A BRPI0814936A BRPI0814936A2 BR PI0814936 A2 BRPI0814936 A2 BR PI0814936A2 BR PI0814936 A BRPI0814936 A BR PI0814936A BR PI0814936 A2 BRPI0814936 A2 BR PI0814936A2
Authority
BR
Brazil
Prior art keywords
conception
optimized
oxide
metal
next generation
Prior art date
Application number
BRPI0814936-4A2A
Other languages
English (en)
Inventor
Taewook Hwang
J Gary Baldoni
Thomas Puthanangady
Original Assignee
Saint Gobain Abrasives Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Abrasives Inc filed Critical Saint Gobain Abrasives Inc
Publication of BRPI0814936A2 publication Critical patent/BRPI0814936A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
BRPI0814936-4A2A 2007-08-23 2008-08-21 Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração BRPI0814936A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US96586207P 2007-08-23 2007-08-23
PCT/US2008/073823 WO2009026419A1 (en) 2007-08-23 2008-08-21 Optimized cmp conditioner design for next generation oxide/metal cmp

Publications (1)

Publication Number Publication Date
BRPI0814936A2 true BRPI0814936A2 (pt) 2015-02-03

Family

ID=39967215

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0814936-4A2A BRPI0814936A2 (pt) 2007-08-23 2008-08-21 Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração

Country Status (8)

Country Link
US (1) US8657652B2 (pt)
EP (1) EP2193007B1 (pt)
JP (1) JP2010536183A (pt)
KR (1) KR101251893B1 (pt)
CN (2) CN101983116B (pt)
BR (1) BRPI0814936A2 (pt)
MY (1) MY159601A (pt)
WO (1) WO2009026419A1 (pt)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI0814936A2 (pt) 2007-08-23 2015-02-03 Saint Gobain Abrasives Inc Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração
CN102341215B (zh) * 2009-03-24 2014-06-18 圣戈班磨料磨具有限公司 用作化学机械平坦化垫修整器的研磨工具
CA2764358A1 (en) * 2009-06-02 2010-12-09 Saint-Gobain Abrasives, Inc. Corrosion-resistant cmp conditioning tools and methods for making and using same
WO2011020105A2 (en) * 2009-08-14 2011-02-17 Saint-Gobain Abrasives, Inc. Abrasive articles including abrasive particles bonded to an elongated body
EP2474025A2 (en) 2009-09-01 2012-07-11 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
TW201246342A (en) * 2010-12-13 2012-11-16 Saint Gobain Abrasives Inc Chemical mechanical planarization (CMP) pad conditioner and method of making
KR101144981B1 (ko) 2011-05-17 2012-05-11 삼성전자주식회사 Ｃｍｐ 패드 컨디셔너 및 상기 ｃｍｐ 패드 컨디셔너 제조방법
TWI664057B (zh) 2015-06-29 2019-07-01 美商聖高拜磨料有限公司 研磨物品及形成方法
US11819979B2 (en) 2016-02-22 2023-11-21 A.L.M.T. Corp. Abrasive tool
CN111699439A (zh) * 2018-02-06 2020-09-22 Asml荷兰有限公司 用于修复衬底支撑件的系统、装置和方法
CH716096B1 (de) * 2019-09-24 2020-11-13 Reishauer AG Abrichtwerkzeug sowie ein Verfahren zum Auftragen von Hartstoffpartikeln.
KR102951450B1 (ko) * 2022-12-21 2026-04-13 일진다이아몬드(주) 초정밀 연삭용 다이아몬드 지립 및 그 제조방법
CN116619246B (zh) * 2023-07-24 2023-11-10 北京寰宇晶科科技有限公司 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法

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BRPI0814936A2 (pt) 2007-08-23 2015-02-03 Saint Gobain Abrasives Inc Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração
JP4922322B2 (ja) 2008-02-14 2012-04-25 エーエスエムエル ネザーランズ ビー．ブイ． コーティング
CN102341215B (zh) 2009-03-24 2014-06-18 圣戈班磨料磨具有限公司 用作化学机械平坦化垫修整器的研磨工具
CA2764358A1 (en) 2009-06-02 2010-12-09 Saint-Gobain Abrasives, Inc. Corrosion-resistant cmp conditioning tools and methods for making and using same

Also Published As

Publication number Publication date
CN102825547A (zh) 2012-12-19
KR20100051856A (ko) 2010-05-18
EP2193007A1 (en) 2010-06-09
JP2010536183A (ja) 2010-11-25
MY159601A (en) 2017-01-13
WO2009026419A1 (en) 2009-02-26
US20090053980A1 (en) 2009-02-26
CN101983116B (zh) 2012-10-24
CN101983116A (zh) 2011-03-02
KR101251893B1 (ko) 2013-04-08
US8657652B2 (en) 2014-02-25
EP2193007B1 (en) 2015-01-07

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