BRPI0913752A2 - método, dispositivo, e, estrutura - Google Patents
método, dispositivo, e, estruturaInfo
- Publication number
- BRPI0913752A2 BRPI0913752A2 BRPI0913752A BRPI0913752A BRPI0913752A2 BR PI0913752 A2 BRPI0913752 A2 BR PI0913752A2 BR PI0913752 A BRPI0913752 A BR PI0913752A BR PI0913752 A BRPI0913752 A BR PI0913752A BR PI0913752 A2 BRPI0913752 A2 BR PI0913752A2
- Authority
- BR
- Brazil
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
- H10H20/0133—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
- H10H20/01335—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/813—Bodies having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8312—Electrodes characterised by their shape extending at least partially through the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8314—Electrodes characterised by their shape extending at least partially onto an outer side surface of the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/851—Wavelength conversion means
- H10H20/8514—Wavelength conversion means characterised by their shape, e.g. plate or foil
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/032—Manufacture or treatment of electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/236,853 | 2008-09-24 | ||
| US12/236,853 US9117944B2 (en) | 2008-09-24 | 2008-09-24 | Semiconductor light emitting devices grown on composite substrates |
| PCT/IB2009/054134 WO2010035211A1 (en) | 2008-09-24 | 2009-09-21 | Semiconductor light emitting devices grown on composite substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| BRPI0913752A2 true BRPI0913752A2 (pt) | 2015-10-20 |
| BRPI0913752B1 BRPI0913752B1 (pt) | 2019-09-17 |
Family
ID=41466848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BRPI0913752-1A BRPI0913752B1 (pt) | 2008-09-24 | 2009-09-21 | Método, dispositivo, e, estrutura |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9117944B2 (pt) |
| EP (1) | EP2329536B1 (pt) |
| JP (1) | JP5734190B2 (pt) |
| KR (2) | KR101799716B1 (pt) |
| CN (1) | CN102165609B (pt) |
| BR (1) | BRPI0913752B1 (pt) |
| RU (1) | RU2515205C2 (pt) |
| TW (1) | TWI497749B (pt) |
| WO (1) | WO2010035211A1 (pt) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090309114A1 (en) * | 2008-01-16 | 2009-12-17 | Luminus Devices, Inc. | Wavelength converting light-emitting devices and methods of making the same |
| JP5226449B2 (ja) * | 2008-10-03 | 2013-07-03 | スタンレー電気株式会社 | 半導体発光装置 |
| EP2465141B1 (en) | 2009-08-04 | 2021-04-07 | GaN Systems Inc. | Gallium nitride microwave and power switching transistors with matrix layout |
| US9029866B2 (en) * | 2009-08-04 | 2015-05-12 | Gan Systems Inc. | Gallium nitride power devices using island topography |
| US9818857B2 (en) | 2009-08-04 | 2017-11-14 | Gan Systems Inc. | Fault tolerant design for large area nitride semiconductor devices |
| US8581229B2 (en) | 2009-11-23 | 2013-11-12 | Koninklijke Philips N.V. | III-V light emitting device with thin n-type region |
| TWI414088B (zh) * | 2009-12-16 | 2013-11-01 | 晶元光電股份有限公司 | 發光元件及其製造方法 |
| CN102859726B (zh) * | 2010-04-06 | 2015-09-16 | 首尔伟傲世有限公司 | 发光二极管及其制造方法 |
| KR101165255B1 (ko) | 2010-09-24 | 2012-07-19 | 서울옵토디바이스주식회사 | 고효율 발광 다이오드 및 그것을 제조하는 방법 |
| KR20130088743A (ko) | 2010-04-13 | 2013-08-08 | 갠 시스템즈 인크. | 아일랜드 토폴로지를 이용한 고밀도 질화 갈륨 디바이스 |
| JP5449039B2 (ja) | 2010-06-07 | 2014-03-19 | 株式会社東芝 | 半導体発光装置及びその製造方法 |
| JP5343040B2 (ja) * | 2010-06-07 | 2013-11-13 | 株式会社東芝 | 半導体発光装置 |
| DE102011013052A1 (de) * | 2011-03-04 | 2012-09-06 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung zumindest eines optoelektronischen Halbleiterbauelements |
| CN103563099A (zh) * | 2011-06-01 | 2014-02-05 | 皇家飞利浦有限公司 | 键合到支撑衬底的发光器件 |
| JP5869678B2 (ja) | 2011-09-16 | 2016-02-24 | ソウル バイオシス カンパニー リミテッドSeoul Viosys Co.,Ltd. | 発光ダイオード及びそれを製造する方法 |
| DE102011113775B9 (de) * | 2011-09-19 | 2021-10-21 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung eines optoelektronischen Bauelements |
| DE102012101409A1 (de) * | 2011-12-23 | 2013-06-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Mehrzahl von optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
| FR2992466A1 (fr) * | 2012-06-22 | 2013-12-27 | Soitec Silicon On Insulator | Procede de realisation de contact pour led et structure resultante |
| CN103579431A (zh) * | 2012-08-07 | 2014-02-12 | 华夏光股份有限公司 | 半导体发光结构及其制造方法 |
| DE102012111123A1 (de) * | 2012-09-26 | 2014-03-27 | Osram Opto Semiconductors Gmbh | Licht emittierendes Halbleiterbauelement |
| US8765563B2 (en) * | 2012-09-28 | 2014-07-01 | Intel Corporation | Trench confined epitaxially grown device layer(s) |
| CN103227265B (zh) * | 2013-04-12 | 2015-08-19 | 厦门大学 | 一种氮化镓基垂直腔面发射激光器的制作方法 |
| CN105518886A (zh) * | 2013-12-02 | 2016-04-20 | 东芝北斗电子株式会社 | 发光单元、发光装置及发光单元的制造方法 |
| KR102181398B1 (ko) * | 2014-06-11 | 2020-11-23 | 엘지이노텍 주식회사 | 발광소자 및 조명시스템 |
| WO2016209892A1 (en) * | 2015-06-22 | 2016-12-29 | University Of South Carolina | DOUBLE MESA LARGE AREA AlInGaBN LED DESIGN FOR DEEP UV AND OTHER APPLICATIONS |
| WO2016209886A1 (en) | 2015-06-22 | 2016-12-29 | University Of South Carolina | MOCVD SYSTEM INJECTOR FOR FAST GROWTH OF AlInGaBN MATERIAL |
| DE102015114587A1 (de) * | 2015-09-01 | 2017-03-02 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement und Verfahren zu dessen Herstellung |
| FR3063571B1 (fr) | 2017-03-01 | 2021-04-30 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat donneur pour la formation de dispositifs optoelectroniques, collection de substrats issus de ce procede |
| KR102381866B1 (ko) * | 2017-05-02 | 2022-04-04 | 서울바이오시스 주식회사 | 자외선 발광 다이오드 |
| TWI689092B (zh) * | 2017-06-09 | 2020-03-21 | 美商晶典有限公司 | 具有透光基材之微發光二極體顯示模組及其製造方法 |
| FR3086100B1 (fr) | 2018-09-13 | 2022-08-12 | Commissariat Energie Atomique | Procede de fabrication d'un dispositif optoelectronique comprenant une pluralite de diodes |
| KR102590229B1 (ko) | 2018-10-15 | 2023-10-17 | 삼성전자주식회사 | Led 소자 및 led 소자의 제조 방법 |
| DE102019121678B4 (de) * | 2019-08-12 | 2025-02-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Bauelement mit verbesserter wärmeabfuhr und verfahren zur herstellung eines bauelements |
| GB2586862B (en) | 2019-09-06 | 2021-12-15 | Plessey Semiconductors Ltd | LED precursor incorporating strain relaxing structure |
| FR3104809B1 (fr) * | 2019-12-11 | 2021-12-17 | Commissariat Energie Atomique | Procede de realisation d’une couche de materiau structuree |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003142728A (ja) * | 2001-11-02 | 2003-05-16 | Sharp Corp | 半導体発光素子の製造方法 |
| US6869812B1 (en) * | 2003-05-13 | 2005-03-22 | Heng Liu | High power AllnGaN based multi-chip light emitting diode |
| WO2005008791A2 (en) | 2003-07-16 | 2005-01-27 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting device, method of manufacturing the same, and lighting apparatus and display apparatus using the same |
| JP2004048067A (ja) | 2003-10-14 | 2004-02-12 | Sanyo Electric Co Ltd | 発光部品およびその製造方法 |
| US7285801B2 (en) * | 2004-04-02 | 2007-10-23 | Lumination, Llc | LED with series-connected monolithically integrated mesas |
| US7361938B2 (en) * | 2004-06-03 | 2008-04-22 | Philips Lumileds Lighting Company Llc | Luminescent ceramic for a light emitting device |
| US20050274970A1 (en) * | 2004-06-14 | 2005-12-15 | Lumileds Lighting U.S., Llc | Light emitting device with transparent substrate having backside vias |
| US7256483B2 (en) * | 2004-10-28 | 2007-08-14 | Philips Lumileds Lighting Company, Llc | Package-integrated thin film LED |
| WO2006098545A2 (en) * | 2004-12-14 | 2006-09-21 | Seoul Opto Device Co., Ltd. | Light emitting device having a plurality of light emitting cells and package mounting the same |
| US7413918B2 (en) * | 2005-01-11 | 2008-08-19 | Semileds Corporation | Method of making a light emitting diode |
| US7525248B1 (en) * | 2005-01-26 | 2009-04-28 | Ac Led Lighting, L.L.C. | Light emitting diode lamp |
| KR101138944B1 (ko) * | 2005-01-26 | 2012-04-25 | 서울옵토디바이스주식회사 | 직렬 연결된 복수개의 발광셀들을 갖는 발광 소자 및그것을 제조하는 방법 |
| RU2277736C1 (ru) * | 2005-02-02 | 2006-06-10 | Закрытое акционерное общество "Нитридные источники света" | Полупроводниковый элемент, излучающий свет в синей области видимого спектра |
| CN1697205A (zh) | 2005-04-15 | 2005-11-16 | 南昌大学 | 在硅衬底上制备铟镓铝氮薄膜及发光器件的方法 |
| US8163575B2 (en) * | 2005-06-17 | 2012-04-24 | Philips Lumileds Lighting Company Llc | Grown photonic crystals in semiconductor light emitting devices |
| JP2008544540A (ja) * | 2005-06-22 | 2008-12-04 | ソウル オプト デバイス カンパニー リミテッド | 発光素子及びその製造方法 |
| KR100599012B1 (ko) * | 2005-06-29 | 2006-07-12 | 서울옵토디바이스주식회사 | 열전도성 기판을 갖는 발광 다이오드 및 그것을 제조하는방법 |
| US7273798B2 (en) * | 2005-08-01 | 2007-09-25 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Gallium nitride device substrate containing a lattice parameter altering element |
| US8334155B2 (en) * | 2005-09-27 | 2012-12-18 | Philips Lumileds Lighting Company Llc | Substrate for growing a III-V light emitting device |
| US20070069225A1 (en) * | 2005-09-27 | 2007-03-29 | Lumileds Lighting U.S., Llc | III-V light emitting device |
| US7514721B2 (en) * | 2005-11-29 | 2009-04-07 | Koninklijke Philips Electronics N.V. | Luminescent ceramic element for a light emitting device |
| JP2007173465A (ja) * | 2005-12-21 | 2007-07-05 | Rohm Co Ltd | 窒化物半導体発光素子の製造方法 |
| JP2007266589A (ja) | 2006-03-01 | 2007-10-11 | Kyocera Corp | 窒化ガリウム系化合物半導体の製造方法、窒化ガリウム系化合物半導体、発光素子の製造方法及び発光素子 |
| US7795600B2 (en) * | 2006-03-24 | 2010-09-14 | Goldeneye, Inc. | Wavelength conversion chip for use with light emitting diodes and method for making same |
| JP4901453B2 (ja) | 2006-12-20 | 2012-03-21 | 東芝ディスクリートテクノロジー株式会社 | 半導体発光素子 |
| US7547908B2 (en) * | 2006-12-22 | 2009-06-16 | Philips Lumilieds Lighting Co, Llc | III-nitride light emitting devices grown on templates to reduce strain |
| US20080157090A1 (en) * | 2006-12-28 | 2008-07-03 | Darren Brent Thomson | Transplanted epitaxial regrowth for fabricating large area substrates for electronic devices |
| JP2010517274A (ja) * | 2007-01-22 | 2010-05-20 | クリー レッド ライティング ソリューションズ、インコーポレイテッド | 外部で相互接続された発光素子のアレイを用いる照明デバイスとその製造方法 |
| DE102007008524A1 (de) * | 2007-02-21 | 2008-08-28 | Osram Opto Semiconductors Gmbh | Strahlung emittierender Chip mit mindestens einem Halbleiterkörper |
| KR100849826B1 (ko) * | 2007-03-29 | 2008-07-31 | 삼성전기주식회사 | 발광소자 및 이를 포함하는 패키지 |
| GB2451884A (en) * | 2007-08-16 | 2009-02-18 | Sharp Kk | A Semiconductor Device and a Method of Manufacture Thereof |
| KR100889956B1 (ko) * | 2007-09-27 | 2009-03-20 | 서울옵토디바이스주식회사 | 교류용 발광다이오드 |
-
2008
- 2008-09-24 US US12/236,853 patent/US9117944B2/en active Active
-
2009
- 2009-09-21 KR KR1020167020554A patent/KR101799716B1/ko active Active
- 2009-09-21 CN CN2009801374697A patent/CN102165609B/zh active Active
- 2009-09-21 BR BRPI0913752-1A patent/BRPI0913752B1/pt active IP Right Grant
- 2009-09-21 TW TW098131841A patent/TWI497749B/zh active
- 2009-09-21 RU RU2011116095/28A patent/RU2515205C2/ru active
- 2009-09-21 WO PCT/IB2009/054134 patent/WO2010035211A1/en not_active Ceased
- 2009-09-21 KR KR1020117009159A patent/KR101674228B1/ko active Active
- 2009-09-21 JP JP2011527460A patent/JP5734190B2/ja active Active
- 2009-09-21 EP EP09787265.9A patent/EP2329536B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9117944B2 (en) | 2015-08-25 |
| WO2010035211A1 (en) | 2010-04-01 |
| KR20160096210A (ko) | 2016-08-12 |
| EP2329536A1 (en) | 2011-06-08 |
| TWI497749B (zh) | 2015-08-21 |
| RU2515205C2 (ru) | 2014-05-10 |
| BRPI0913752B1 (pt) | 2019-09-17 |
| EP2329536B1 (en) | 2018-08-15 |
| CN102165609A (zh) | 2011-08-24 |
| JP2012503861A (ja) | 2012-02-09 |
| JP5734190B2 (ja) | 2015-06-17 |
| KR20110055745A (ko) | 2011-05-25 |
| RU2011116095A (ru) | 2012-10-27 |
| TW201019513A (en) | 2010-05-16 |
| US20100072489A1 (en) | 2010-03-25 |
| KR101799716B1 (ko) | 2017-11-20 |
| CN102165609B (zh) | 2013-12-04 |
| KR101674228B1 (ko) | 2016-11-08 |
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