BRPI0914364A8 - Método de pré tratamento de susbtratos para processos pvd e seu uso - Google Patents
Método de pré tratamento de susbtratos para processos pvd e seu usoInfo
- Publication number
- BRPI0914364A8 BRPI0914364A8 BRPI0914364A BRPI0914364A BRPI0914364A8 BR PI0914364 A8 BRPI0914364 A8 BR PI0914364A8 BR PI0914364 A BRPI0914364 A BR PI0914364A BR PI0914364 A BRPI0914364 A BR PI0914364A BR PI0914364 A8 BRPI0914364 A8 BR PI0914364A8
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- electrode
- target
- spark
- work pieces
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000002203 pretreatment Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 12
- 239000000463 material Substances 0.000 abstract 7
- 230000015572 biosynthetic process Effects 0.000 abstract 3
- 238000004381 surface treatment Methods 0.000 abstract 3
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 239000013077 target material Substances 0.000 abstract 2
- 238000009489 vacuum treatment Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000012495 reaction gas Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
- H01J37/32064—Circuits specially adapted for controlling the arc discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
MÉTODO DE PRÉ-TRATAMENTO DE SUBSTRATOS PARA PROCESSOS PVD, por tratar a invenção de um método para o tratamento superficial de peças de trabalho em um equipamento de tratamento a vácuo compreendendo um primeiro eletrodo, que é projetado como parte de uma fonte de vaporização a arco, sendo que uma centelha é gerada com uma corrente de centelha a partir do primeiro eletrodo e com a qual o material do alvo é vaporizado e se deposita pelo menos parcialmente e pelo menos por um período de tempo sobre as peças de trabalho, e que compreende ainda um segundo eletrodo projetado como suporte para as peças de trabalho e que forma juntamente com as peças de trabalho um eletrodo de polarização, sendo que ao eletrodo de polarização uma tensão de polarização é aplicada através de uma tensão de polarização, sendo que a tensão de polarização é aplicada de acordo com a corrente da centelha de tal maneira que em termos líquidos substancialmente nenhum acúmulo de material ocorra na superfície.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BR122012006619-2A BR122012006619B1 (pt) | 2008-11-18 | 2009-10-27 | método de revestimento de peças de trabalho e método de produção de um sistema multicamada |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11556908P | 2008-11-18 | 2008-11-18 | |
| US61/115,569 | 2008-11-18 | ||
| EP09004581A EP2236641B1 (de) | 2009-03-30 | 2009-03-30 | Verfahren zur Vorbehandlung von Substraten fuer PVD Verfahren |
| EP09004581.6 | 2009-03-30 | ||
| PCT/EP2009/064137 WO2010057747A1 (de) | 2008-11-18 | 2009-10-27 | Verfahren zur vorbehandlung von substraten für pvd verfahren |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| BRPI0914364A2 BRPI0914364A2 (pt) | 2014-02-04 |
| BRPI0914364A8 true BRPI0914364A8 (pt) | 2017-09-19 |
| BRPI0914364B1 BRPI0914364B1 (pt) | 2020-07-07 |
Family
ID=40887095
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR122012006619-2A BR122012006619B1 (pt) | 2008-11-18 | 2009-10-27 | método de revestimento de peças de trabalho e método de produção de um sistema multicamada |
| BRPI0914364-5A BRPI0914364B1 (pt) | 2008-11-18 | 2009-10-27 | método de pré tratamento de susbtratos para processos pvd e seu uso |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR122012006619-2A BR122012006619B1 (pt) | 2008-11-18 | 2009-10-27 | método de revestimento de peças de trabalho e método de produção de um sistema multicamada |
Country Status (16)
| Country | Link |
|---|---|
| US (2) | US20110278157A1 (pt) |
| EP (1) | EP2236641B1 (pt) |
| JP (2) | JP2012509402A (pt) |
| KR (2) | KR101640415B1 (pt) |
| CN (2) | CN102216486B (pt) |
| AT (1) | ATE527390T1 (pt) |
| AU (1) | AU2009317432B2 (pt) |
| BR (2) | BR122012006619B1 (pt) |
| CA (1) | CA2743988A1 (pt) |
| ES (1) | ES2374864T3 (pt) |
| MX (1) | MX2011005039A (pt) |
| PL (1) | PL2236641T3 (pt) |
| PT (1) | PT2236641E (pt) |
| RU (2) | RU2519709C2 (pt) |
| SG (2) | SG179493A1 (pt) |
| WO (1) | WO2010057747A1 (pt) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8652589B2 (en) * | 2008-01-25 | 2014-02-18 | Oerlikon Trading Ag, Truebbach | Permeation barrier layer |
| US8815317B2 (en) | 2009-01-12 | 2014-08-26 | Graphic Packaging International, Inc. | Elevated microwave heating construct |
| ES2374864T3 (es) | 2009-03-30 | 2012-02-22 | Oerlikon Trading Ag, Trübbach | Método para pretratar sustratos para métodos pvd. |
| DE102011016681A1 (de) * | 2011-04-11 | 2012-10-11 | Oerlikon Trading Ag, Trübbach | Kohlenstofffunkenverdampfung |
| EP2607517A1 (en) * | 2011-12-22 | 2013-06-26 | Oerlikon Trading AG, Trübbach | Low temperature arc ion plating coating |
| US20130266473A1 (en) * | 2012-04-05 | 2013-10-10 | GM Global Technology Operations LLC | Method of Producing Sintered Magnets with Controlled Structures and Composition Distribution |
| JP6243796B2 (ja) * | 2014-05-26 | 2017-12-06 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン膜の成膜方法 |
| EA026984B1 (ru) * | 2015-02-26 | 2017-06-30 | Артур Игоревич Покровский | Способ нанесения упрочняющего покрытия на изделие из чугуна |
| RU2599073C1 (ru) * | 2015-05-05 | 2016-10-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" | Способ ионно-плазменного нанесения многослойного покрытия на изделия из алюминиевых сплавов |
| AT15412U1 (de) * | 2016-06-27 | 2017-08-15 | Ceratizit Austria Gmbh | Verfahren zur mechanischen Ausheilung funktionaler Hartmetall- oder Cermet-Oberflächen |
| CZ307842B6 (cs) * | 2018-05-02 | 2019-06-12 | Fyzikální Ústav Av Čr, V. V. I. | Způsob generování nízkoteplotního plazmatu, způsob povlakování vnitřního povrchu dutých elektricky vodivých nebo feromagnetických trubic a zařízení pro provádění těchto způsobů |
| JP6846387B2 (ja) | 2018-06-22 | 2021-03-24 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
| CN115637418B (zh) * | 2022-10-12 | 2024-10-11 | 中微半导体设备(上海)股份有限公司 | 形成涂层的方法、涂覆装置、零部件及等离子体反应装置 |
| CN116949410B (zh) * | 2023-09-20 | 2023-12-19 | 西安聚能医工科技有限公司 | 一种合金基体表面磁控溅射涂层的方法及其产品与应用 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4288306A (en) * | 1978-07-08 | 1981-09-08 | Wolfgang Kieferle | Process for forming a metal or alloy layer and device for executing same |
| US4497874A (en) | 1983-04-28 | 1985-02-05 | General Electric Company | Coated carbide cutting tool insert |
| AT382892B (de) * | 1983-08-25 | 1987-04-27 | Vni Instrument Inst | Verfahren zum auftragen einer beschichtung |
| CH671238A5 (pt) | 1986-11-06 | 1989-08-15 | Vni Instrument Inst | |
| JPS6442574A (en) | 1987-08-07 | 1989-02-14 | Nissin Electric Co Ltd | Arc power source device for vacuum arc discharge type pvd device |
| US4830886A (en) | 1988-03-07 | 1989-05-16 | Gte Valenite Corporation | Process for making cutting insert with titanium carbide coating |
| FR2670218B1 (fr) * | 1990-12-06 | 1993-02-05 | Innovatique Sa | Procede de traitement de metaux par depot de matiere, et pour la mise en óoeuvre dudit procede. |
| US5503725A (en) | 1991-04-29 | 1996-04-02 | Novatech | Method and device for treatment of products in gas-discharge plasma |
| DE4238784C1 (de) * | 1992-11-17 | 1994-01-20 | Multi Arc Oberflaechentechnik | Verfahren zur Verringerung der Korrosionsanfälligkeit und Erhöhung der Verschleißbeständigkeit von Gegenständen aus niedrig legierten Stählen |
| JP3060876B2 (ja) * | 1995-02-15 | 2000-07-10 | 日新電機株式会社 | 金属イオン注入装置 |
| DE19546826C1 (de) * | 1995-12-15 | 1997-04-03 | Fraunhofer Ges Forschung | Verfahren und Einrichtung zur Vorbehandlung von Substraten |
| US6503373B2 (en) * | 2000-01-13 | 2003-01-07 | Ingersoll-Rand Company | Method of applying a coating by physical vapor deposition |
| DE10124749A1 (de) | 2001-05-21 | 2002-11-28 | Wolf-Dieter Muenz | Kombiniertes Beschichtungs Verfahren magnetfeldunterstützte Hochleistungs-Impuls-Kathodenzerstäubung und Unbalanziertes Magnetron |
| RU2238999C1 (ru) * | 2003-02-19 | 2004-10-27 | Государственное научное учреждение "Научно-исследовательский институт ядерной физики при Томском политехническом университете" | Способ импульсно-периодической имплантации ионов и плазменного осаждения покрытий |
| PL1863947T3 (pl) | 2005-03-24 | 2012-06-29 | Oerlikon Trading Ag | Warstwa z twardego materiału |
| US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
| RU2294395C2 (ru) * | 2005-04-29 | 2007-02-27 | Открытое акционерное общество "Национальный институт авиационных технологий" (ОАО "НИАТ") | Установка для вакуумной ионно-плазменной обработки поверхностей |
| RU2296180C2 (ru) * | 2005-05-04 | 2007-03-27 | Открытое акционерное общество "Наро-Фоминский машиностроительный завод" | Способ нанесения покрытия на изделия в вакуумной камере |
| EP2466614A3 (de) | 2006-05-16 | 2013-05-22 | Oerlikon Trading AG, Trübbach | Arcquelle und Magnetanordnung |
| ES2374864T3 (es) | 2009-03-30 | 2012-02-22 | Oerlikon Trading Ag, Trübbach | Método para pretratar sustratos para métodos pvd. |
-
2009
- 2009-03-30 ES ES09004581T patent/ES2374864T3/es active Active
- 2009-03-30 PT PT09004581T patent/PT2236641E/pt unknown
- 2009-03-30 AT AT09004581T patent/ATE527390T1/de active
- 2009-03-30 PL PL09004581T patent/PL2236641T3/pl unknown
- 2009-03-30 EP EP09004581A patent/EP2236641B1/de active Active
- 2009-10-27 KR KR1020117014110A patent/KR101640415B1/ko not_active Expired - Fee Related
- 2009-10-27 CN CN2009801458404A patent/CN102216486B/zh not_active Expired - Fee Related
- 2009-10-27 CA CA2743988A patent/CA2743988A1/en not_active Abandoned
- 2009-10-27 JP JP2011536809A patent/JP2012509402A/ja active Pending
- 2009-10-27 WO PCT/EP2009/064137 patent/WO2010057747A1/de not_active Ceased
- 2009-10-27 BR BR122012006619-2A patent/BR122012006619B1/pt not_active IP Right Cessation
- 2009-10-27 SG SG2012018578A patent/SG179493A1/en unknown
- 2009-10-27 KR KR1020127007632A patent/KR20120033360A/ko not_active Ceased
- 2009-10-27 US US13/130,050 patent/US20110278157A1/en not_active Abandoned
- 2009-10-27 CN CN201210096960.3A patent/CN102605330B/zh not_active Expired - Fee Related
- 2009-10-27 BR BRPI0914364-5A patent/BRPI0914364B1/pt not_active IP Right Cessation
- 2009-10-27 AU AU2009317432A patent/AU2009317432B2/en not_active Ceased
- 2009-10-27 RU RU2011124154/02A patent/RU2519709C2/ru not_active IP Right Cessation
- 2009-10-27 SG SG2011044757A patent/SG172251A1/en unknown
- 2009-10-27 MX MX2011005039A patent/MX2011005039A/es active IP Right Grant
-
2012
- 2012-04-05 RU RU2012113242/02A patent/RU2543575C2/ru not_active IP Right Cessation
- 2012-04-12 JP JP2012090972A patent/JP2012177198A/ja active Pending
-
2013
- 2013-11-08 US US14/075,085 patent/US9845527B2/en active Active
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| BRPI0914364A8 (pt) | Método de pré tratamento de susbtratos para processos pvd e seu uso | |
| US7081186B2 (en) | Combined coating process comprising magnetic field-assisted, high power, pulsed cathode sputtering and an unbalanced magnetron | |
| US8702912B2 (en) | Coating process, workpiece or tool and its use | |
| JP6245576B2 (ja) | 被覆部を備えたドリル | |
| DE10124749A1 (de) | Kombiniertes Beschichtungs Verfahren magnetfeldunterstützte Hochleistungs-Impuls-Kathodenzerstäubung und Unbalanziertes Magnetron | |
| EP2829635B1 (en) | Method for controlled production of diffusion based coatings by vacuum cathodic arc systems | |
| EP3411512A1 (en) | Method of deposition of a wear resistant dlc layer | |
| JP6892423B2 (ja) | マクロ粒子を含む皮膜及びその皮膜を形成する陰極アークプロセス | |
| RU2660502C1 (ru) | Способ нанесения покрытия на поверхность стального изделия | |
| CN103608483A (zh) | 提供溅射颗粒的增强电离的高功率脉冲磁控溅射方法以及用于其实施的装置 | |
| JPH07300665A (ja) | 金属基材のホウ素拡散浸透層・ホウ素膜形成方法 | |
| Zakharov et al. | Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering | |
| Vetter et al. | An Innovative Approach to New Hybrid Coatings based on HiPIMS Technology: The HI3 process | |
| HK1219516A1 (zh) | Tixsi1-xn层及其制造 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B25F | Entry of change of name and/or headquarter and transfer of application, patent and certif. of addition of invention: change of name on requirement |
Owner name: OERLIKON TRADING AG, TRUEBBACH (CH) |
|
| B25D | Requested change of name of applicant approved |
Owner name: OERLIKON SURFACE SOLUTIONS AG, TRUEBBACH (CH) |
|
| B25D | Requested change of name of applicant approved |
Owner name: OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON (CH) |
|
| B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
| B06T | Formal requirements before examination [chapter 6.20 patent gazette] | ||
| B06A | Patent application procedure suspended [chapter 6.1 patent gazette] | ||
| B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
| B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 07/07/2020, OBSERVADAS AS CONDICOES LEGAIS. |
|
| B21F | Lapse acc. art. 78, item iv - on non-payment of the annual fees in time |
Free format text: REFERENTE A 14A ANUIDADE. |
|
| B24J | Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12) |
Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2746 DE 22-08-2023 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |