BRPI0923019A2 - disposição de emissor de infravermelho para porcessos a vácuo em alta temperatura - Google Patents

disposição de emissor de infravermelho para porcessos a vácuo em alta temperatura

Info

Publication number
BRPI0923019A2
BRPI0923019A2 BRPI0923019A BRPI0923019A BRPI0923019A2 BR PI0923019 A2 BRPI0923019 A2 BR PI0923019A2 BR PI0923019 A BRPI0923019 A BR PI0923019A BR PI0923019 A BRPI0923019 A BR PI0923019A BR PI0923019 A2 BRPI0923019 A2 BR PI0923019A2
Authority
BR
Brazil
Prior art keywords
high temperature
infrared emitter
temperature vacuum
vacuum processes
emitter arrangement
Prior art date
Application number
BRPI0923019A
Other languages
English (en)
Inventor
Sven Linow
Original Assignee
Heraeus Noblelight Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight Gmbh filed Critical Heraeus Noblelight Gmbh
Publication of BRPI0923019A2 publication Critical patent/BRPI0923019A2/pt

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/18—Mountings or supports for the incandescent body
    • H01K1/24—Mounts for lamps with connections at opposite ends, e.g. for tubular lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/58—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/48—Heating elements having the shape of rods or tubes non-flexible heating conductor embedded in insulating material
BRPI0923019A 2008-12-19 2009-11-13 disposição de emissor de infravermelho para porcessos a vácuo em alta temperatura BRPI0923019A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008063677A DE102008063677B4 (de) 2008-12-19 2008-12-19 Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer
PCT/EP2009/008076 WO2010069438A1 (de) 2008-12-19 2009-11-13 Infrarotstrahler-anordnung für hochtemperatur-vakuumprozesse

Publications (1)

Publication Number Publication Date
BRPI0923019A2 true BRPI0923019A2 (pt) 2015-12-15

Family

ID=42084614

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0923019A BRPI0923019A2 (pt) 2008-12-19 2009-11-13 disposição de emissor de infravermelho para porcessos a vácuo em alta temperatura

Country Status (7)

Country Link
US (1) US8436523B2 (pt)
EP (1) EP2359386A1 (pt)
KR (1) KR101285528B1 (pt)
CN (1) CN102257598B (pt)
BR (1) BRPI0923019A2 (pt)
DE (1) DE102008063677B4 (pt)
WO (1) WO2010069438A1 (pt)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011115841A1 (de) 2010-11-19 2012-05-24 Heraeus Noblelight Gmbh Bestrahlungsvorrichtung
DE102010064141A1 (de) 2010-12-23 2012-06-28 Von Ardenne Anlagentechnik Gmbh Heizeinrichtung für Substratbehandlungsanlagen und Substratbehandlungsanlage
DE102011009284B4 (de) 2011-01-24 2014-09-11 Von Ardenne Gmbh Elektrische Durchführung in ein Vakuumgehäuse
UA111631C2 (uk) 2011-10-06 2016-05-25 Санофі Пастер Са Нагрівальний пристрій для роторної барабанної ліофільної сушарки
DE102012025142A1 (de) 2012-12-21 2014-06-26 Heraeus Noblelight Gmbh Infrarotstrahler mit hoher Strahlungsleistung
JP6217251B2 (ja) * 2013-09-05 2017-10-25 岩崎電気株式会社 ハロゲンランプ
DE102015102665A1 (de) 2015-02-25 2016-08-25 Heraeus Noblelight Gmbh Bestrahlungsvorrichtung zur Einkopplung von Infrarot-Strahlung in eine Vakuum-Prozesskammer mit einem einseitig gesockelten Infrarotstrahler
JP6946274B2 (ja) * 2015-09-09 2021-10-06 ワットロー・エレクトリック・マニュファクチャリング・カンパニー 高温管状ヒーター
USD783117S1 (en) * 2015-09-15 2017-04-04 Cutting Edge Products, Inc. Electric stun gun
USD771219S1 (en) * 2015-09-15 2016-11-08 Cutting Edge Products, Inc Electric stun gun having an electric cigarette-shaped mouthpiece
DE102016111234B4 (de) * 2016-06-20 2018-01-25 Heraeus Noblelight Gmbh Vorrichtung für die thermische Behandlung eines Substrats sowie Trägerhorde und Substrat-Trägerelement dafür
WO2018054610A1 (de) 2016-09-22 2018-03-29 Heraeus Noblelight Gmbh Infrarot-strahler
CN108863028A (zh) * 2017-05-10 2018-11-23 张忠恕 一种新型石英管加工方法
US11589966B2 (en) * 2018-10-29 2023-02-28 Vita Zahnfabrik H. Rauter Gmbh & Co. Kg Heating element for a dental-ceramic furnace and dental sintering furnace
US11370213B2 (en) 2020-10-23 2022-06-28 Darcy Wallace Apparatus and method for removing paint from a surface

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Publication number Priority date Publication date Assignee Title
GB817908A (en) 1956-08-17 1959-08-06 Gen Electric Co Ltd Improvements in or relating to electrical devices and terminal caps therefor
JPS59138812A (ja) * 1983-01-31 1984-08-09 Ngk Spark Plug Co Ltd セラミツクグロ−プラグ
US4918355A (en) * 1985-04-01 1990-04-17 Gte Products Corporation Electric lamp with protective base
US5252132A (en) 1990-11-22 1993-10-12 Mitsubishi Denki Kabushiki Kaisha Apparatus for producing semiconductor film
DE9401436U1 (de) * 1994-01-28 1994-03-31 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH, 81543 München Metallhalogenidentladungslampe für Projektionszwecke
US5951896A (en) * 1996-12-04 1999-09-14 Micro C Technologies, Inc. Rapid thermal processing heater technology and method of use
EP1228668B1 (de) * 1999-11-09 2005-02-09 Centrotherm Elektrische Anlagen Gmbh + Co. Strahlungsheizung mit einer hohen infrarot-strahlungsleistung für bearbeitungskammern
US6376992B1 (en) * 1999-12-23 2002-04-23 Godfrey Engineering, Inc. Sealed beam high intensity discharge lamp system for aircraft
EP1168417A1 (en) 2000-06-26 2002-01-02 General Electric Company Incandescent lamp with an IR reflective coating and a fully reflective end coating
US6573656B2 (en) * 2000-07-14 2003-06-03 Matsushita Electric Industrial Co., Ltd. High-pressure discharge lamp and method for producing the same
US6600138B2 (en) * 2001-04-17 2003-07-29 Mattson Technology, Inc. Rapid thermal processing system for integrated circuits
JP3899273B2 (ja) 2002-02-01 2007-03-28 株式会社トゥルーウェル ヒータ
DE10204691C1 (de) * 2002-02-06 2003-04-24 Philips Corp Intellectual Pty Quecksilberfreie Hochdruckgasentladungslampe und Beleuchtungseinheit mit einer solchen Hochdruckgasentladungslampe
EP1588400A2 (en) * 2003-01-15 2005-10-26 Philips Intellectual Property & Standards GmbH Lamp and lighting unit with interference coating and blocking device for improved uniformity of colour temperature
JP2004342417A (ja) * 2003-05-14 2004-12-02 Ushio Inc 白熱ランプ
DE102004002357A1 (de) * 2004-01-15 2005-08-11 Heraeus Noblelight Gmbh Verfahren zum Betreiben eines Infrarotstrahlerelements sowie Verwendung
JP2005315447A (ja) * 2004-04-27 2005-11-10 Kyocera Corp セラミックヒーターおよびグロープラグ
DE102004051846B4 (de) * 2004-08-23 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Bauteil mit einer Reflektorschicht sowie Verfahren für seine Herstellung
JP4734885B2 (ja) 2004-10-08 2011-07-27 ウシオ電機株式会社 加熱ユニット
JP4751392B2 (ja) * 2005-07-26 2011-08-17 京セラ株式会社 ロウ付け構造体、セラミックヒータおよびグロープラグ
US20080036384A1 (en) * 2006-08-09 2008-02-14 Chowdhury Ashfaqul I Lamp with high reflectance end coat
DE202007017598U1 (de) * 2007-12-18 2008-07-31 Osram Gesellschaft mit beschränkter Haftung Halogenglühlampe mit IRC-Beschichtung

Also Published As

Publication number Publication date
DE102008063677B4 (de) 2012-10-04
CN102257598B (zh) 2015-05-20
DE102008063677A1 (de) 2010-07-08
CN102257598A (zh) 2011-11-23
WO2010069438A1 (de) 2010-06-24
KR101285528B1 (ko) 2013-07-17
US20110248621A1 (en) 2011-10-13
KR20110086710A (ko) 2011-07-29
EP2359386A1 (de) 2011-08-24
US8436523B2 (en) 2013-05-07

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]
B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]