CA1024535A - Substance mixte de nitrure de silicium et de carbure de silicium - Google Patents

Substance mixte de nitrure de silicium et de carbure de silicium

Info

Publication number
CA1024535A
CA1024535A CA194,856A CA194856A CA1024535A CA 1024535 A CA1024535 A CA 1024535A CA 194856 A CA194856 A CA 194856A CA 1024535 A CA1024535 A CA 1024535A
Authority
CA
Canada
Prior art keywords
composite material
carbide composite
silicon
silicon nitride
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA194,856A
Other languages
English (en)
Inventor
Frederick F. Lange
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of CA1024535A publication Critical patent/CA1024535A/fr
Expired legal-status Critical Current

Links

CA194,856A 1973-04-16 1974-03-13 Substance mixte de nitrure de silicium et de carbure de silicium Expired CA1024535A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35174473A 1973-04-16 1973-04-16

Publications (1)

Publication Number Publication Date
CA1024535A true CA1024535A (fr) 1978-01-17

Family

ID=23382190

Family Applications (1)

Application Number Title Priority Date Filing Date
CA194,856A Expired CA1024535A (fr) 1973-04-16 1974-03-13 Substance mixte de nitrure de silicium et de carbure de silicium

Country Status (1)

Country Link
CA (1) CA1024535A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209996A (en) * 1989-07-26 1993-05-11 Shin-Etsu Chemical Co., Ltd. Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209996A (en) * 1989-07-26 1993-05-11 Shin-Etsu Chemical Co., Ltd. Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same

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