CA1032397A - Methode de fabrication d'un dispositif - Google Patents

Methode de fabrication d'un dispositif

Info

Publication number
CA1032397A
CA1032397A CA205,919A CA205919A CA1032397A CA 1032397 A CA1032397 A CA 1032397A CA 205919 A CA205919 A CA 205919A CA 1032397 A CA1032397 A CA 1032397A
Authority
CA
Canada
Prior art keywords
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA205,919A
Other languages
English (en)
Other versions
CA205919S (en
Inventor
Jan T. Gerkema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1032397A publication Critical patent/CA1032397A/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA205,919A 1973-07-06 1974-07-30 Methode de fabrication d'un dispositif Expired CA1032397A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7309451A NL7309451A (nl) 1973-07-06 1973-07-06 Werkwijze voor het vervaardigen van een inrichting.

Publications (1)

Publication Number Publication Date
CA1032397A true CA1032397A (fr) 1978-06-06

Family

ID=19819217

Family Applications (1)

Application Number Title Priority Date Filing Date
CA205,919A Expired CA1032397A (fr) 1973-07-06 1974-07-30 Methode de fabrication d'un dispositif

Country Status (7)

Country Link
JP (1) JPS5071273A (fr)
CA (1) CA1032397A (fr)
DE (1) DE2431311C3 (fr)
FR (1) FR2236336B1 (fr)
GB (1) GB1453253A (fr)
IT (1) IT1037067B (fr)
NL (1) NL7309451A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165395A (en) * 1977-06-30 1979-08-21 International Business Machines Corporation Process for forming a high aspect ratio structure by successive exposures with electron beam and actinic radiation
GB8825826D0 (en) * 1988-11-04 1988-12-07 Gen Electric Co Plc Deposition processes
US4985116A (en) * 1990-02-23 1991-01-15 Mint-Pac Technologies, Inc. Three dimensional plating or etching process and masks therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518084A (en) * 1967-01-09 1970-06-30 Ibm Method for etching an opening in an insulating layer without forming pinholes therein

Also Published As

Publication number Publication date
FR2236336B1 (fr) 1977-10-07
DE2431311B2 (de) 1980-08-21
IT1037067B (it) 1979-11-10
GB1453253A (en) 1976-10-20
DE2431311A1 (de) 1975-01-30
NL7309451A (nl) 1975-01-08
FR2236336A1 (fr) 1975-01-31
JPS5071273A (fr) 1975-06-13
DE2431311C3 (de) 1981-07-02

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