CA1037129A - Methode et appareil de gravure par plasma - Google Patents

Methode et appareil de gravure par plasma

Info

Publication number
CA1037129A
CA1037129A CA242,973A CA242973A CA1037129A CA 1037129 A CA1037129 A CA 1037129A CA 242973 A CA242973 A CA 242973A CA 1037129 A CA1037129 A CA 1037129A
Authority
CA
Canada
Prior art keywords
temperature
reaction chamber
gas
plasma
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA242,973A
Other languages
English (en)
Inventor
Robert G. Poulsen
Original Assignee
Northern Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northern Electric Co Ltd filed Critical Northern Electric Co Ltd
Priority to CA242,973A priority Critical patent/CA1037129A/fr
Application granted granted Critical
Publication of CA1037129A publication Critical patent/CA1037129A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Drying Of Semiconductors (AREA)
CA242,973A 1976-01-05 1976-01-05 Methode et appareil de gravure par plasma Expired CA1037129A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA242,973A CA1037129A (fr) 1976-01-05 1976-01-05 Methode et appareil de gravure par plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA242,973A CA1037129A (fr) 1976-01-05 1976-01-05 Methode et appareil de gravure par plasma

Publications (1)

Publication Number Publication Date
CA1037129A true CA1037129A (fr) 1978-08-22

Family

ID=4104899

Family Applications (1)

Application Number Title Priority Date Filing Date
CA242,973A Expired CA1037129A (fr) 1976-01-05 1976-01-05 Methode et appareil de gravure par plasma

Country Status (1)

Country Link
CA (1) CA1037129A (fr)

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